Fabrication of aberration-corrected tunable micro-lenses

Pressure-actuated liquid-filled micro-lenses may be tuned in focal length from several millimeters to infinity and are thus suitable for use in tunable lens systems. A novel fabrication method for pneumatic multi-chamber lens systems which correct imaging errors such as chromatic and spherical aberrations is presented. The approach is a highly flexible, accurate and inexpensive way to implement lens combinations on the micro-scale which are similar to those in conventional macroscopic systems. A three-chamber lens system will demonstrate the potential of the process.