Microspectrometer: From ideas to product

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics Pub Date : 2008-08-26 DOI:10.1109/OMEMS.2008.4607827

H. Herzig, T. Scharf, O. Manzardo

引用次数: 2

Abstract

Spectroscopy with miniaturized systems is one of the fastest developing fields and enters now industrial applications. We will discuss near infrared sensing systems based on MEMS spectrometers starting from concepts, explain prototypes and show final product.

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显微光谱仪:从想法到产品

小型化系统光谱学是发展最快的领域之一，现已进入工业应用。我们将讨论基于MEMS光谱仪的近红外传感系统，从概念开始，解释原型并展示最终产品。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics

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