Towards integration of glass microlens with silicon comb-drive X-Y microstage

K. Laszczyk, S. Bargiel, C. Gorecki, J. Krężel
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引用次数: 9

Abstract

We present the design and the fabrication of a silicon X-Y microstage and a new concept of its integration with a glass microlens to obtain an optical 2D scanner for the miniaturized microscope on-chip.
玻璃微透镜与硅梳状驱动X-Y微台集成的研究
我们提出了一种硅X-Y微台的设计和制造,并提出了将其与玻璃微透镜集成的新概念,以获得用于微型化芯片上显微镜的光学二维扫描仪。
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