International Report on Wafer Level Reliability Workshop最新文献_第3页

Sensor-Based Control for Semiconductor Manufacturing Plasma EtchingAsA ProcessVehicle 半导体制造等离子蚀刻工艺车辆的传感器控制

International Report on Wafer Level Reliability Workshop Pub Date : 1900-01-01 DOI: 10.1109/IWLR.1992.657992

F. L. Terry, J. Freudenberg, M. Elta, M. Giles, J. Grizzle, S. Lafortune, P. Kabamba, P. Khargonekar, S. Meerkov, D. Teneketzis

引用次数: 0

EEPROM-based Charging-Effects Sensors for Plasma Etching and Ion Implantation 基于eeprom的等离子体刻蚀和离子注入充电效应传感器

International Report on Wafer Level Reliability Workshop Pub Date : 1900-01-01 DOI: 10.1109/IWLR.1992.657991

W. Lutkaszek

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引用次数: 2

Consistency Of Similarly Designed Wafer Level Reliability test Structures Produced In Multiple Fabrication Areas 在多个制造区域生产的相似设计晶圆级可靠性测试结构的一致性

International Report on Wafer Level Reliability Workshop Pub Date : 1900-01-01 DOI: 10.1109/IWLR.1992.658006

T. Turner

引用次数: 1

Low-field I-V Method For Improved Dielectric Reliability 提高电介质可靠性的低场I-V法

International Report on Wafer Level Reliability Workshop Pub Date : 1900-01-01 DOI: 10.1109/IWLR.1992.657995

J. Klema

引用次数: 0

The Influence Of Preoxidation Cleaning Chemistry And Wafer Substrate On Thin Gate Oxide Defect Density 预氧化清洗化学和晶圆衬底对薄栅氧化缺陷密度的影响

International Report on Wafer Level Reliability Workshop Pub Date : 1900-01-01 DOI: 10.1109/IWLR.1992.657990

B. Triplett, M. Tran, M. Aminzadeh

引用次数: 3

Wafer Level joule-heated J-Constant EM Tests 晶圆级焦耳加热j -常数电磁测试

International Report on Wafer Level Reliability Workshop Pub Date : 1900-01-01 DOI: 10.1109/IWLR.1992.658003

H. Katto

引用次数: 0

Summary Report: Component Design Discussion Group 总结报告:组件设计讨论组

International Report on Wafer Level Reliability Workshop Pub Date : 1900-01-01 DOI: 10.1109/IWLR.1992.658010

V. Tyree, C. Kuo

引用次数: 0

Thin Film Cracking / Delamination Evaluation Using Assembly Test Chip 用组装测试芯片评价薄膜开裂/分层

International Report on Wafer Level Reliability Workshop Pub Date : 1900-01-01 DOI: 10.1109/IWLR.1992.658000

C. Hong

引用次数: 5

Summary Report: Package/assembly Discussion Group 摘要报告:包/组装讨论组

International Report on Wafer Level Reliability Workshop Pub Date : 1900-01-01 DOI: 10.1109/IWLR.1992.658009

K. Mohan, G. Shirley, J. Sweet

引用次数: 0