F. L. Terry, J. Freudenberg, M. Elta, M. Giles, J. Grizzle, S. Lafortune, P. Kabamba, P. Khargonekar, S. Meerkov, D. Teneketzis
{"title":"Sensor-Based Control for Semiconductor Manufacturing Plasma EtchingAsA ProcessVehicle","authors":"F. L. Terry, J. Freudenberg, M. Elta, M. Giles, J. Grizzle, S. Lafortune, P. Kabamba, P. Khargonekar, S. Meerkov, D. Teneketzis","doi":"10.1109/IWLR.1992.657992","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":395564,"journal":{"name":"International Report on Wafer Level Reliability Workshop","volume":"1 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1900-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Report on Wafer Level Reliability Workshop","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IWLR.1992.657992","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}