2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)最新文献_第4页

A broad-band vibrational energy harvester utilizing symmetrical comb-drives coupled with strong charged electret 利用对称梳状驱动器与强带电驻极体耦合的宽带振动能量收集器

2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984480

H. Mitsuya, H. Ashizawa, D. Anai, G. Hashiguchi, H. Homma, H. Fujita, H. Toshiyoshi

引用次数: 0

New type of energy harvester with electric double layer electrets 新型双电层驻极体能量采集器

2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984482

S. Ono, K. Miwa, J. Iori, C. Sano, H. Toshiyoshi, H. Fujita, H. Mitsuya, K. Ishibashi

引用次数: 0

Time and temperature dependent mechanical behavior of Al/Ti thin films application for MEMS MEMS中Al/Ti薄膜的力学性能随时间和温度的变化

2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984495

Tai-Ting Lin, A. Tsai, Ming-Tzer Lin

{"title":"Time and temperature dependent mechanical behavior of Al/Ti thin films application for MEMS","authors":"Tai-Ting Lin, A. Tsai, Ming-Tzer Lin","doi":"10.1109/DTIP.2017.7984495","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984495","url":null,"abstract":"Al-Ti alloy is widely used in MEMS components such as RF MEMS switches. When the moving part of MEMS components operating in higher temperature, such as switches and mirrors, their reliability is always an issue which needs to be focused. In order to manufacture a better reliable component, it is needed to clarify such mechanical properties of the materials. Here, we deposit four different kind of Al-Ti alloy films specimens by using sputtering system, and measured the mechanical properties of these films by using Bulge Test. The principle of Bulge Test is to add stress on Al-Ti alloy films from pressure differences, then used Position Sensing Detector(PSD) to measure the height of bulge that caused by the pressure. According to the relation between stress and the height of Bulge the mechanical properties can be measured. The experiment was divided into two parts which are stress-strain ramp tests and creep tests. The stress-strain ramp tests provided the Young's modulus and residual stress of the films and the creep tests were observed for the creep behavior of the films. In the stress-strain ramp tests, it shows that higher titanium content of the Al-Ti alloy film has higher Young's modulus. On the other hand, higher titanium content shows better creep resistance.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"184 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122466508","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 2

Design and simulation of a 3-bit DMTL phase shifter for wideband applications 宽带3位DMTL移相器的设计与仿真

2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984468

Noor Amalina Ramli, T. Arslan, N. Haridas

{"title":"Design and simulation of a 3-bit DMTL phase shifter for wideband applications","authors":"Noor Amalina Ramli, T. Arslan, N. Haridas","doi":"10.1109/DTIP.2017.7984468","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984468","url":null,"abstract":"This paper presents a wideband distributed coplanar waveguide (CPW) phase shifter for S-band operation. A 3-bit distributed MEMS transmission line (DMTL) phase shifter is developed by periodically loading MEMS shunt switches on a CPW transmission line (TL). A total of 105 MEMS shunt switches are utilized in the design to provide phase shifts of 0°, 45°, 90°, 135°, 180°, 225°, 270° and 315° at 2.45 GHz. Two large metal-insulator-metal (MIM) capacitors are implemented on the CPW centre conductor as DC blocking capacitors to separate the DC actuation voltage between three bit segments during operation. The high resistivity silicon substrate (ρ=10 Ω·cm) and 2 μm thick aluminium centre conductor are employed to reduce the insertion loss due to the transmission line (TL). The simulated reflection coefficients are better than −10 dB across the operating band with an average insertion loss of −2.94 dB at 2.45 GHz. The CPW transmission line has been meandered using 60° mitered bends to optimise the size of the phase shifter to result in overall size of 30 mm × 10 mm. The simulated pull-in voltage of the doubly clamped beams implemented in the design is 17.18 V. The proposed DMTL phase shifter is suitable for use in smart antenna applications, radar systems and ultra-wideband (UWB) microwave medical applications.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"190 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130968922","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 5

Development of wide-band low-frequency MEMS vibration energy harvester for utility infrastructure core monitoring system 公用事业核心监测系统宽带低频MEMS振动能量采集器的研制

2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984481

Lan Zhang, R. Takei, Jian Lu, N. Makimoto, Takeshi Kobayashi, T. Itoh

{"title":"Development of wide-band low-frequency MEMS vibration energy harvester for utility infrastructure core monitoring system","authors":"Lan Zhang, R. Takei, Jian Lu, N. Makimoto, Takeshi Kobayashi, T. Itoh","doi":"10.1109/DTIP.2017.7984481","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984481","url":null,"abstract":"An aluminum-nitride (AlN) based energy-harvesting MEMS sensor is developed. We aimed at realizing energy-harvesting sensor with functional feature of wide-band response at low-frequency vibration domain, owing to the high-power density of vibration sources energy in a particular low frequency with several Hz deviations. By simplifying and analyzing the vibration module of the sensor structure, a special design was implemented for the first time. The given wide-band vibration energy-harvesting sensor has a disk proof mass attached to three sandwiched-AlN spring-system flexures. By MEMS techniques, the given sensors were fabricated well with the single die size of 7×7 mm and observed by the scanning electron microscopy (SEM) comprehensively. The functional feature of electrical performance of the energy-harvesting sensor was evaluated. The results demonstrated that a low resonant frequency of 57 Hz at central with wide band of 10 Hz and the voltage output of 2.5–4 mV at acceleration of 0.1–0.6g can be typically achieved. We look forward the low-frequency vibration sensor with wide-band response function can be used for many industrial and civilian applications to eliminate the restriction on power source.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"67 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126350536","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

Aspect ratio dependent etching in advanced deep reactive ion etching of quartz 石英高级深度反应离子刻蚀中依赖宽高比的刻蚀

2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984500

P. Chapellier, P. Lavenus, B. Bourgeteau-Verlhac, C. Gageant, O. Le Traon, B. Dulmet

{"title":"Aspect ratio dependent etching in advanced deep reactive ion etching of quartz","authors":"P. Chapellier, P. Lavenus, B. Bourgeteau-Verlhac, C. Gageant, O. Le Traon, B. Dulmet","doi":"10.1109/DTIP.2017.7984500","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984500","url":null,"abstract":"Quartz due to its piezoelectricity and its good temperature stability is one of the most used materials in devices for time-frequency applications. Quartz resonators are generally obtained by chemical etching or chemical mechanical polishing but these two methods do not allow the shrinking of the dimensions of the devices and limit reachable geometry: in particular structures with high aspect ratios or vertical flanks are not feasible. The development of the deep reactive ion etching (DRIE) of quartz over the last fifteen years allowed the manufacture of the first quartz resonators with structures not realizable by the conventional methods However, the DRIE technology on quartz is not as mature as that on silicon and undesired effects such as the aspect ratio dependent etching (ARDE) which consists in a decrease of the etching rate as the width of the features shrinks or micro-loading which involves decreasing of the etching rate as the density of features rises have not been widely studied. In this paper, experimental data reveal the phenomenon known as ARDE. The effect of key experimental parameters on ARDE has been studied and a simple model is used to analyse this phenomenon.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114819950","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 4

Micro patterned test cell arrays for high-throughput battery materials research 用于高通量电池材料研究的微图案测试电池阵列

2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984484

R. Hahn, M. Ferch, K. Hoeppner, M. Queisser, K. Marquardt, G. Elia

{"title":"Micro patterned test cell arrays for high-throughput battery materials research","authors":"R. Hahn, M. Ferch, K. Hoeppner, M. Queisser, K. Marquardt, G. Elia","doi":"10.1109/DTIP.2017.7984484","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984484","url":null,"abstract":"A cost effective and reliable technology for the fabrication of electrochemical test cell arrays for battery materials investigation, based on batch fabricated glass micro packages was developed and tested. Semi-automatic micro dispensing was investigated as a process for the standardized application of different electrode materials and SiO2-based separator. The process shows sufficient reproducibility over the whole range of investigated materials, especially for the cells with interdigital (side-by-side) electrodes. Such setup gives rise to an improved reliability and reproducibility of electrochemical experiments. The economic fabrication of our test chips by batch processing allows for their single-use in electrochemical experiments, herby preventing contamination issues due to repeated use as in conventional laboratory test cells. In addition, the integration of micro pseudo reference electrodes was demonstrated. Thus, the presented test cell array together with the developed electrode/electrolyte deposition technology represents a highly efficient tool for combinatorial and high throughput testing of battery materials on system level (full cell tests). The method will speed up electrochemical materials research significantly.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114714477","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Relative humidity effect on pull-off forces in MEMS flexible structures measured by AFM 相对湿度对AFM测量MEMS柔性结构拔离力的影响

2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984478

C. Bîrleanu, M. Pustan, F. Rusu, C. Dudescu, R. Muller, A. Baracu

{"title":"Relative humidity effect on pull-off forces in MEMS flexible structures measured by AFM","authors":"C. Bîrleanu, M. Pustan, F. Rusu, C. Dudescu, R. Muller, A. Baracu","doi":"10.1109/DTIP.2017.7984478","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984478","url":null,"abstract":"An atomic force microscope operating in contact mode is used in this paper for determining the pull-off forces as a function of relative humidity. The paper reports the measurements and the modeling of adhesion forces versus humidity in controlled ranges between 20 to 90%RH. In the low RH range (<20%) where the adsorbed water layer is insignificant, due to the absence of water meniscus, adhesion force increases slowly. However, in relative higher RH range (>20%), adhesion force increases very sharply once ‘liquid-like’ adsorbed water layer forms, because it increases the capillary force. After the relative humidity reaches about 70–80% the drop in the experimental values of the adhesive force is a result of desorption of water molecules and the corresponding decrease of water menisci contribution. To investigate the effect of relative humidity on adhesion for flexible structures such as aluminum microbridges with different lengths against silicon substrate we used an analytical method which encompasses the effect of capillarity as well as the solid-to-solid interaction. The capillary force is expressed as the sum between the Laplace force and the surface tension, while the solid-to-solid interaction is estimated using the DMT model. The analytical results are in good agreement with the experimental ones.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128901140","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 3

Localization in coupled systems: Part II — Consideration on damping issue in a mode-localized cantilever array 耦合系统的局部化:第二部分-模态局部化悬臂阵列阻尼问题的思考

2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984503

Xiaodong Li, Di Zhou, R. Liu, Shuyi Liu, Xin Liu, Dong F. Wang

{"title":"Localization in coupled systems: Part II — Consideration on damping issue in a mode-localized cantilever array","authors":"Xiaodong Li, Di Zhou, R. Liu, Shuyi Liu, Xin Liu, Dong F. Wang","doi":"10.1109/DTIP.2017.7984503","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984503","url":null,"abstract":"The use of vibration mode localization in arrays of mechanically-coupled, nearly identical cantilevers has been studied for ultra-sensitive mass detection and analyte identification. The effects of geometrical design of the coupling overhang, cantilever length, as well as the number of identical coupled cantilevers on the magnitude enhancement with a small mass perturbation were previously reported in DTIP 2011. This paper however, analytically investigates the effect of material damping, induced by the internal friction loss, on energy confinement in a mode-localized three-cantilever array. Firstly, the material damping will not change three typical eigenstates of the array. Therefore, the proposed three-cantilever array can be applied to mass detection and analyte identification as well. Secondly, the sensitivity of mass sensing with the proposed array declined from 22990.70 to 33.56 because of the decrease in amplitude values caused by energy loss. It is the material damping that brings about the energy loss that influences the spatial propagation confinement of vibration. Additionally, experimental verification will be conducted in our future work.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125922003","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 4

A mems-based gas chromatograph front-end for a miniature spectrometer 用于微型光谱仪的mems气相色谱仪前端

2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984483

A. Hoogerwerf, G. S. Durante, A. Morse, G. Morgan, S. Barber, S. Sheridan, I. Wright

引用次数: 1