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2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)最新文献

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Co-design of an adaptive hyperspectral imager based on MEMS arrays: From proof of principle to a research prototype 基于MEMS阵列的自适应高光谱成像仪的协同设计:从原理验证到研究原型
2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-29 DOI: 10.1109/DTIP.2017.7984470
J. Roul, F. Blanc, S. Lacroix, A. Monmayrant
{"title":"Co-design of an adaptive hyperspectral imager based on MEMS arrays: From proof of principle to a research prototype","authors":"J. Roul, F. Blanc, S. Lacroix, A. Monmayrant","doi":"10.1109/DTIP.2017.7984470","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984470","url":null,"abstract":"We have defined a hyperspectral imager based on micro-mirror MEMS array, that features easily adaptable spectral resolution, adjustable acquisition time, and high spatial resolution independent of spectral resolution. We present the development of an integrated research prototype of the imager, that allows the control of both the micro-mirrors array and CMOS data reading from the same FPGA board, so as to allow the definition of acquisition schemes adapted to the scene in real time.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122361377","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Zeolite-based thermal mass gas sensor with self-identification algorithm 基于自识别算法的沸石热质量气体传感器
2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-29 DOI: 10.1109/DTIP.2017.7984464
M. Denoual, M. Pouliquen, C. Jorel, C. Radu, D. Robbes, M. Harnois, O. de Sagazan, J. Grand, H. Awala, S. Mintova, S. Inoue, E. Lebrasseur, K. Yamada, Y. Okamoto, A. Mita-Tixier, Y. Mita
{"title":"Zeolite-based thermal mass gas sensor with self-identification algorithm","authors":"M. Denoual, M. Pouliquen, C. Jorel, C. Radu, D. Robbes, M. Harnois, O. de Sagazan, J. Grand, H. Awala, S. Mintova, S. Inoue, E. Lebrasseur, K. Yamada, Y. Okamoto, A. Mita-Tixier, Y. Mita","doi":"10.1109/DTIP.2017.7984464","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984464","url":null,"abstract":"We demonstrate a new operation mode of thermal gas sensor based on thermal mass extraction with identification algorithm. The system is a silicon microstructure covered with zeolites operated at constant temperature while stimulated by heat pseudo-random sequence. The proposed detection principle is demonstrated at room temperature and atmospheric pressure through the detection of gas water molecules with an hydrophilic FAU-type zeolite coating.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"47 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117336323","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Chemical gas sensor based on a novel capacitive microwave flexible transducer and composite polymer carbon nanomaterials 基于新型电容式微波柔性换能器和复合高分子碳纳米材料的化学气体传感器
2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-29 DOI: 10.1109/DTIP.2017.7984509
P. Bahoumina, H. Hallil, J. Lachaud, D. Rebière, C. Dejous, A. Abdelghani, K. Frigui, S. Bila, D. Baillargeat, Q. Zhang, P. Coquet, C. Paragua, E. Pichonat, H. Happy
{"title":"Chemical gas sensor based on a novel capacitive microwave flexible transducer and composite polymer carbon nanomaterials","authors":"P. Bahoumina, H. Hallil, J. Lachaud, D. Rebière, C. Dejous, A. Abdelghani, K. Frigui, S. Bila, D. Baillargeat, Q. Zhang, P. Coquet, C. Paragua, E. Pichonat, H. Happy","doi":"10.1109/DTIP.2017.7984509","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984509","url":null,"abstract":"This study presents the results on the feasibility of a resonant planar chemical capacitive sensor in the microwave frequency range suitable for gas detection and for wireless communications applications. The objective is to develop a low cost ultra-sensitive sensor that can be integrated into a real time multi-sensing platform. The first demonstrators target the detection of harmful gases such as volatile organic compounds (VOCs) to monitor environmental pollution.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"124 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116451416","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
Design of micro-fabricated thermal flow-rate sensor for water network monitoring 用于水网监测的微加工热流量传感器设计
2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-29 DOI: 10.1109/DTIP.2017.7984474
Ferdous Shaun, Hugo Regina, F. Marty, E. Nefzaoui, T. Bourouina, W. Cesar
{"title":"Design of micro-fabricated thermal flow-rate sensor for water network monitoring","authors":"Ferdous Shaun, Hugo Regina, F. Marty, E. Nefzaoui, T. Bourouina, W. Cesar","doi":"10.1109/DTIP.2017.7984474","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984474","url":null,"abstract":"We report on micro-machined flow-rate sensors as part of autonomous multi-parameter sensing devices for water network monitoring. Three different versions of the flow-rate sensors have been designed, fabricated and experimentally characterized. Those sensors are made of identical micrometric platinum resistors deposited on two different substrates-glass and silicon with and without insulation layer. The sensors were tested under the anemometric operating scheme. They were characterized under a water velocity range from 0 to 3.68 m/s. We highlight the fact that the glass substrate device is more sensitive and less power-consuming than the silicon one under the identical operating condition, which requires further design strategies when using silicon as the substrate material. Experimental results are analyzed with respect to CFD simulations with the Finite Element Method.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116117198","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
A low cost patternable packaging technology for biosensors 一种用于生物传感器的低成本可模式化包装技术
2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-29 DOI: 10.1109/DTIP.2017.7984493
A. Buchoux, E. Blair, A. Tsiamis, J. Marland, Stewart Smith
{"title":"A low cost patternable packaging technology for biosensors","authors":"A. Buchoux, E. Blair, A. Tsiamis, J. Marland, Stewart Smith","doi":"10.1109/DTIP.2017.7984493","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984493","url":null,"abstract":"This paper demonstrates a simple and low cost technology to reliably and accurately package integrated chips. Microchannels and cavities of minimum feature size of 500 μm can be reliably reproduced. In addition, the curing depth in relation to the exposure time was investigated. A simple microfluidic device, consisting of a 500 μm channel and 2 mm ports, was manufactured to demonstrate the possibilities of this technology. Extensive electrochemical experiments showed that the packaging material is a good insulator and leaves no residue on the chip.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"113 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126920784","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Synthesis and characterization of the interaction of ZnO and CdTe photoluminescent quantum dots for photovoltaic applications 用于光伏应用的ZnO和CdTe光致发光量子点的合成和相互作用的表征
2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984498
F. Orona-Magallanes, R. Guerrero-Gonzalez, A. Zazueta-Raynaud, A. Ayón, J. E. Pelayo, R. Ruelas, E. Saucedo-Flores
{"title":"Synthesis and characterization of the interaction of ZnO and CdTe photoluminescent quantum dots for photovoltaic applications","authors":"F. Orona-Magallanes, R. Guerrero-Gonzalez, A. Zazueta-Raynaud, A. Ayón, J. E. Pelayo, R. Ruelas, E. Saucedo-Flores","doi":"10.1109/DTIP.2017.7984498","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984498","url":null,"abstract":"We discuss the synthesis of zinc oxide (ZnO) and cadmium telluride (CdTe) quantum dots (QDs), the characterization of their optical properties on their own as well as combined, and their influence on the power conversion efficiency of photovoltaic structures when the QD blends were dispersed in a polymeric solution and deployed on the window surface of polycrystalline Si solar cells as down-shifting photoluminescent (PL) coatings. Upon the incorporation of increasing amounts of ZnO QDs into a colloidal solution of CdTe, the characteristic CdTe PL peak location was monotonically red-shifted from 598 nm to 611 nm. A 1:3 volumetric combination CdTe:ZnO QDs exhibited a the power conversion efficiency increase from 14.71% for an uncoated solar cell to 15.02% with the QD layer, that is, an approximate improvement of approximately 2%.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115377057","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Waste-aware fluid volume assignment for flow-based microfluidic biochips 基于流动的微流体生物芯片的废物感知流体体积分配
2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984507
Alexander Schneider, P. Pop, J. Madsen
{"title":"Waste-aware fluid volume assignment for flow-based microfluidic biochips","authors":"Alexander Schneider, P. Pop, J. Madsen","doi":"10.1109/DTIP.2017.7984507","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984507","url":null,"abstract":"Microfluidic biochips are replacing the conventional biochemical analysers integrating the necessary functions onchip. We are interested in Flow-Based Microfluidic Biochips (FBMB), where a continuous flow of liquid is manipulated using integrated microvalves. Using microvalves and channels, more complex Fluidic Units (FUs) such as switches, micropumps, mixers and separators can be constructed. When running a biochemical application on a FBMB, fluid volumes are dispensed from input reservoirs and used by the FUs. Given a biochemical application and a biochip, we are interested in determining the fluid volume assignment for each operation of the application, such that the FUs volume requirements are satisfied, while over- and underflow are avoided and the total volume of fluid used is minimized. We propose an algorithm for this fluid assignment problem. Compared to previous work, our method is able to minimize the fluid consumption through optimal fluid assignment and reuse of fluid waste. Due to the algorithm's low complexity, fluid requirements can also be calculated during runtime for error recovery or statically unknown cases.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116959022","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Design and fabrication of a high-power energy harvester based on a three-ports comb drive mechanism for large displacement 基于三孔梳状驱动机构的大功率大排量能量采集器的设计与制造
2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984479
H. Honma, H. Fujita, H. Toshiyoshi, H. Mitsuya, H. Ashizawa, G. Hashiguchi
{"title":"Design and fabrication of a high-power energy harvester based on a three-ports comb drive mechanism for large displacement","authors":"H. Honma, H. Fujita, H. Toshiyoshi, H. Mitsuya, H. Ashizawa, G. Hashiguchi","doi":"10.1109/DTIP.2017.7984479","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984479","url":null,"abstract":"This paper presents a high-power energy-harvesting device based on a three-ports electrostatic comb-drive mechanism. A symmetric electrodes structure is used to reduce the binding electrostatic force, thereby allowing large displacement of the oscillator mass at a low acceleration. With an acceleration of 0.27 G at 125 Hz, output power of 150.3 μW was obtained, where mechanical stroke of over 209 μm was confirmed by using a high-speed camera.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"59 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121026497","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Reconfigurable behavior of CdTe quantum dots at terahertz frequencies employing UV excitation 紫外激发下太赫兹CdTe量子点的可重构行为
2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984494
Clarissa D. Vázquez-Colón, Juan Adrián Zepeda- Galvez, A. Ayón, D. Shreiber
{"title":"Reconfigurable behavior of CdTe quantum dots at terahertz frequencies employing UV excitation","authors":"Clarissa D. Vázquez-Colón, Juan Adrián Zepeda- Galvez, A. Ayón, D. Shreiber","doi":"10.1109/DTIP.2017.7984494","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984494","url":null,"abstract":"We report the synthesis and characterization of cadmium-telluride (CdTe) quantum dots (QDs) and their performance at Terahertz frequencies employing THz time-domain spectroscopy (THZ-TDS). The data was analyzed using a combination of Fast Fourier Transform (FFT) and effective medium theory to obtain the optical characteristics of the aforementioned CdTe QDs. Additionally, we performed similar measurements while exposing the QDs to a UV excitation with a wavelength of 302 nm and observed a noticeable variation in both the real and imaginary components in the index of refraction that could prove crucial in the demonstration of reconfigurable devices operating in the THz regime.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"47 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128213738","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
PLL-FITC fluorescence thermography on dry surfaces 干燥表面的PLL-FITC荧光热成像
2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984505
B. Charlot, R. Desgarceaux, A. Giani, F. Bardin
{"title":"PLL-FITC fluorescence thermography on dry surfaces","authors":"B. Charlot, R. Desgarceaux, A. Giani, F. Bardin","doi":"10.1109/DTIP.2017.7984505","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984505","url":null,"abstract":"Fluorescence thermography[1] uses the property of fluorescent dyes to lower their fluorescence emission intensity with the temperature. By using a diblock molecule, Poly-L-Lysine grafted with Fluorescein isothiocyanate (FITC), it is possible to coat a surface with a thin layer of fluorescent dye and to use temperature variations of the fluorophore to measure a temperature map at small scale on a dry surface. By using Indium Tin Oxide as transparent conductor, we can observe with this non-perturbative technique the temperature increase inside a micro dissipator.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125657778","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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