M. Denoual, M. Pouliquen, C. Jorel, C. Radu, D. Robbes, M. Harnois, O. de Sagazan, J. Grand, H. Awala, S. Mintova, S. Inoue, E. Lebrasseur, K. Yamada, Y. Okamoto, A. Mita-Tixier, Y. Mita
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Zeolite-based thermal mass gas sensor with self-identification algorithm
We demonstrate a new operation mode of thermal gas sensor based on thermal mass extraction with identification algorithm. The system is a silicon microstructure covered with zeolites operated at constant temperature while stimulated by heat pseudo-random sequence. The proposed detection principle is demonstrated at room temperature and atmospheric pressure through the detection of gas water molecules with an hydrophilic FAU-type zeolite coating.