Design and fabrication of a high-power energy harvester based on a three-ports comb drive mechanism for large displacement

Abstract

This paper presents a high-power energy-harvesting device based on a three-ports electrostatic comb-drive mechanism. A symmetric electrodes structure is used to reduce the binding electrostatic force, thereby allowing large displacement of the oscillator mass at a low acceleration. With an acceleration of 0.27 G at 125 Hz, output power of 150.3 μW was obtained, where mechanical stroke of over 209 μm was confirmed by using a high-speed camera.