用于微型光谱仪的mems气相色谱仪前端

2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-01 DOI:10.1109/DTIP.2017.7984483

A. Hoogerwerf, G. S. Durante, A. Morse, G. Morgan, S. Barber, S. Sheridan, I. Wright

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引用次数: 1

摘要

研制了一种用于空间应用的mems质谱前端气相色谱仪(GC)。气相色谱采用分子气相沉积(MVD)来实现气相色谱柱的均匀涂层。特别注意的是MEMS与外部管道的流体连接。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A mems-based gas chromatograph front-end for a miniature spectrometer

A MEMS-based gas chromatograph (GC) front-end for a mass spectrometer has been developed for space applications. The GC uses Molecular Vapor Deposition (MVD) to achieve a uniform coating of the GC column. Particular attention has been paid to the fluidic connections of the MEMS to the external tubing.

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来源期刊

2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)

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