利用对称梳状驱动器与强带电驻极体耦合的宽带振动能量收集器

2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-01 DOI:10.1109/DTIP.2017.7984480

H. Mitsuya, H. Ashizawa, D. Anai, G. Hashiguchi, H. Homma, H. Fujita, H. Toshiyoshi

{"title":"利用对称梳状驱动器与强带电驻极体耦合的宽带振动能量收集器","authors":"H. Mitsuya, H. Ashizawa, D. Anai, G. Hashiguchi, H. Homma, H. Fujita, H. Toshiyoshi","doi":"10.1109/DTIP.2017.7984480","DOIUrl":null,"url":null,"abstract":"We have developed a broad-band vibrational energy harvester by utilizing symmetrical comb-drive electrodes that were coated with solid-ion electrets made of potassium-doped thermal silicon oxide film. The device was sealed in a vacuum package for high energy conversion to eliminate mechanical losses. With this device, we capture vibrations of any frequency as well as of impulse motions for power generation.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A broad-band vibrational energy harvester utilizing symmetrical comb-drives coupled with strong charged electret\",\"authors\":\"H. Mitsuya, H. Ashizawa, D. Anai, G. Hashiguchi, H. Homma, H. Fujita, H. Toshiyoshi\",\"doi\":\"10.1109/DTIP.2017.7984480\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We have developed a broad-band vibrational energy harvester by utilizing symmetrical comb-drive electrodes that were coated with solid-ion electrets made of potassium-doped thermal silicon oxide film. The device was sealed in a vacuum package for high energy conversion to eliminate mechanical losses. With this device, we capture vibrations of any frequency as well as of impulse motions for power generation.\",\"PeriodicalId\":354534,\"journal\":{\"name\":\"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)\",\"volume\":\"28 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-05-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/DTIP.2017.7984480\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/DTIP.2017.7984480","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 0

摘要

我们开发了一种宽带振动能量收集器，利用对称梳状驱动电极，该电极涂有由掺钾热氧化硅薄膜制成的固体离子驻极体。该装置密封在真空封装中，用于高能量转换，以消除机械损失。有了这个装置，我们可以捕捉任何频率的振动以及用于发电的脉冲运动。

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A broad-band vibrational energy harvester utilizing symmetrical comb-drives coupled with strong charged electret

We have developed a broad-band vibrational energy harvester by utilizing symmetrical comb-drive electrodes that were coated with solid-ion electrets made of potassium-doped thermal silicon oxide film. The device was sealed in a vacuum package for high energy conversion to eliminate mechanical losses. With this device, we capture vibrations of any frequency as well as of impulse motions for power generation.

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来源期刊

2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)

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