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2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)最新文献

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Fabrication of ultralarge single order diffraction grating with high surface flatness 高表面平整度的超大单级衍射光栅的制备
2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984458
Yilei Hua, Changqing Xie, Nan Gao, Xiaoli Zhu, Hailiang Li
{"title":"Fabrication of ultralarge single order diffraction grating with high surface flatness","authors":"Yilei Hua, Changqing Xie, Nan Gao, Xiaoli Zhu, Hailiang Li","doi":"10.1109/DTIP.2017.7984458","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984458","url":null,"abstract":"In this work, we present the fabrication process of a large (100mmx40mm) and thick (30mm) single order diffraction grating with a very flat reflecting surface. This grating is designed for a soft X-ray monochromator. Three single order diffraction gratings with different line densities were integrated on one silicon plate. The gratings are patterned on a 6.35mm thick substrate using direct e-beam writing and etched using high density plasma. Then the grating is glued on to a 23.7mm thick bulk silicon. The flatness of the surface of the gratings was well controlled and tested with an interferometer, the test results show that the peak-to-valley value of the surface is less than 60nm, which meet the requirement for a soft X-ray monochromator.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"244 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125563657","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Recent advances in micro-gas chromatography — The opportunities and the challenges 微气相色谱的最新进展-机遇与挑战
2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984485
I. Azzouz, F. Marty, T. Bourouina
{"title":"Recent advances in micro-gas chromatography — The opportunities and the challenges","authors":"I. Azzouz, F. Marty, T. Bourouina","doi":"10.1109/DTIP.2017.7984485","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984485","url":null,"abstract":"This paper reviews the last two decades design, fabrication and characterization advances on high performance MEMS-based gas chromatography systems, the related architectures and their constitutive building blocks, which include preconcentrators, microvalves and related sample injection devices, micro-columns, and detectors. Micro-GCs hold potential for rapid analysis of volatile organic compounds (VOCs) within extremely compact and low-power platforms. This work presents portable GC analyzers both commercial and under development in research labs, with emphasis on their applications in various fields including air monitoring, industrial processes, and public health.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"58 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126857559","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Power management system of a MEMS vibrational energy harvesting sensor node under low vibration conditions 低振动条件下MEMS振动能量采集传感器节点的电源管理系统
2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984499
Wenjun Zhao, H. Homma, H. Toshiyoshi
{"title":"Power management system of a MEMS vibrational energy harvesting sensor node under low vibration conditions","authors":"Wenjun Zhao, H. Homma, H. Toshiyoshi","doi":"10.1109/DTIP.2017.7984499","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984499","url":null,"abstract":"This paper presents a power management system of self-supplied wireless sensor node based on MEMS electret vibrational energy harvester. The storage and control policy of the management circuit is optimized for small ambient excitation conditions to reduce power dissipation and avoid failure in wireless data transmissions. Live acceleration data collected from a bridge as well as simulation results were used to confirm the feasibility of the proposed circuit operating in real case low vibration environment.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127856364","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Capacitance measurement techniques in MOEMS angular vertical comb-drive actuators MOEMS角垂直梳状驱动器电容测量技术
2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984455
Barnaby Portelli, R. Farrugia, I. Grech, O. Casha, J. Micallef, E. Gatt
{"title":"Capacitance measurement techniques in MOEMS angular vertical comb-drive actuators","authors":"Barnaby Portelli, R. Farrugia, I. Grech, O. Casha, J. Micallef, E. Gatt","doi":"10.1109/DTIP.2017.7984455","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984455","url":null,"abstract":"This paper presents three novel techniques for the measurement of capacitance variation in high-frequency operation of angular comb-drive structures, with applications including optical projection micro-mirrors. The first technique uses a lock-in amplifier in order to measure the impedance of the comb structure by superimposing a test signal having a frequency that is at least one order of magnitude higher than the micro-mirror resonant frequency. The second measurement setup uses a digitizing oscilloscope to measure the capacitance from the instantaneous voltage and current in the comb structure. The third setup consists of a micro probe controlled by a high-resolution positioner in order to tilt the mirror to a desired angle. This allows for static capacitance measurement at different mirror deflection using a high precision LCR meter. The measurement results from the different setups were found to be in agreement with each other. The results were further verified against analytical and numerical modelling.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127331154","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Fabricate diamond nanowire based on the silver nano-tip grating towards plasmon-enhanced applicaiton 基于银纳米尖端光栅制备等离子体增强应用的金刚石纳米线
2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984457
Hao Guo, Wenyao Liu, Jun Tang, Zongmin Ma, Rui Zhao, Jun Liu
{"title":"Fabricate diamond nanowire based on the silver nano-tip grating towards plasmon-enhanced applicaiton","authors":"Hao Guo, Wenyao Liu, Jun Tang, Zongmin Ma, Rui Zhao, Jun Liu","doi":"10.1109/DTIP.2017.7984457","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984457","url":null,"abstract":"This work presents a method to fabricate the diamond nanowire at the tip of silver nano-grating which acted as the Plasmon substrates to enhance the quantum efficient of diamond NV color centers for the quantum sensors applications. Due to the well-organized silver nano-grating, the edges of colloidal diamond drop-casted on the silver nano-grating substrate have been arranged as the straightforward lines. And, the diamond nanowire would be manufactured along this line at the tip of silver nano-grating based on the coffee-ring effect. Because of the tip effect and the surface plasma resonance effect at the tip of silver nano-grating, the fluorescence and the quantum efficient have improved about 10 times. It was the potential methods to improve the sensitivity of spin-based sensors by improving the quantum efficient.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"36 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126670509","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A correct-by-construction design and programming approach for open paper-based digital microfluidics 开放式纸质数字微流体的结构校正设计与编程方法
2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984476
Georgi Tanev, J. Madsen
{"title":"A correct-by-construction design and programming approach for open paper-based digital microfluidics","authors":"Georgi Tanev, J. Madsen","doi":"10.1109/DTIP.2017.7984476","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984476","url":null,"abstract":"Advances in microfluidic research have allowed digital microfluidic (DMF) chips to be rapid prototyped using inexpensive materials and simple fabrication processes to the extend where the time spend on chip design can be significantly longer than the time required for fabrication. The growing need for application specific DMF chips challenges efficient handling of the increasing chip design and programming complexity. To address this, we propose a correct-by-construction modular chip design approach, which allows chips to be constructed from a component library and verified by simulation before fabrication. After fabrication, the chip is operated from a smartphone by remote instrumentation of a portable DMF chip control device. By combining structured design techniques with custom developed hardware and software tools, we present a full end-to-end solution for fast DMF chip design, simulation and operation.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129640933","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Modeling of structural-fluidic interactions for the design of digital MEMS speakers in hearing aids 助听器中数字MEMS扬声器的结构-流体相互作用建模
2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) Pub Date : 2017-05-01 DOI: 10.1109/DTIP.2017.7984506
V. Pedio, G. De Pasquale, A. Somà, L. Rufer, S. Basrour
{"title":"Modeling of structural-fluidic interactions for the design of digital MEMS speakers in hearing aids","authors":"V. Pedio, G. De Pasquale, A. Somà, L. Rufer, S. Basrour","doi":"10.1109/DTIP.2017.7984506","DOIUrl":"https://doi.org/10.1109/DTIP.2017.7984506","url":null,"abstract":"Micro Electro-Mechanical Systems (MEMS), applied to the field of hearing aids, offer ample possibilities for improving of performance, reliability and functional specifications, and they are also promising in terms of energy saving. In this paper, some of the major design problems relating to the use of MEMS for sound waves generation inside the ear canal are analyzed.","PeriodicalId":354534,"journal":{"name":"2017 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP)","volume":"76 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121728596","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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