2012 International Conference on Optical MEMS and Nanophotonics最新文献

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Guided-mode resonances in dielectric photonic crystal slabs with low index contrast 低折射率对比介质光子晶体板的导模共振
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318857
T. Kusserow, Yousuf Khan, R. Zamora, F. Messow, H. Hillmer
{"title":"Guided-mode resonances in dielectric photonic crystal slabs with low index contrast","authors":"T. Kusserow, Yousuf Khan, R. Zamora, F. Messow, H. Hillmer","doi":"10.1109/OMEMS.2012.6318857","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318857","url":null,"abstract":"We present nanophotonic structures consisting of a dielectric slab waveguide with low index contrast and photonic crystals. The guided-mode resonance effect is used to implement elements with selective reflection properties. The design procedure, including numerical simulations, as well as a fabrication approach employing a focused ion beam system is described. Finally, a device layout with DBR mirrors to reduce lateral losses is discussed.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"78 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130503725","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
The TeraMOS sensing pixel for monolithic passive uncooled THz imagers 用于单片被动非冷却太赫兹成像仪的TeraMOS传感像素
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318833
A. Svetlitza, I. Brouk, S. Bar-Lev, S. Stolyarova, Y. Nemirovsky
{"title":"The TeraMOS sensing pixel for monolithic passive uncooled THz imagers","authors":"A. Svetlitza, I. Brouk, S. Bar-Lev, S. Stolyarova, Y. Nemirovsky","doi":"10.1109/OMEMS.2012.6318833","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318833","url":null,"abstract":"We report a novel THz sensor, based on several leading technologies: THz photonics, CMOS-SOI and NEMS. By integrating the TeraMOS sensor with “thermal antenna”, we expect to achieve a breakthrough in uncooled Terahertz passive imaging.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"136 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121533284","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Magnetic-actuated stainless steel micro-scanner for confocal hyperspectral fluorescence microscope 用于共聚焦高光谱荧光显微镜的磁驱动不锈钢微扫描仪
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318790
Youmin Wang, Y. D. Gokdel, N. Triesault, C. Spruell, A. Hu, D. Waters, Xiaojing J Zhang
{"title":"Magnetic-actuated stainless steel micro-scanner for confocal hyperspectral fluorescence microscope","authors":"Youmin Wang, Y. D. Gokdel, N. Triesault, C. Spruell, A. Hu, D. Waters, Xiaojing J Zhang","doi":"10.1109/OMEMS.2012.6318790","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318790","url":null,"abstract":"This paper presents the fabrication, characterization and imaging results of a wide-scanning, low voltage driven and electrical discharge machining (EDM) process fabricated stainless steel micro-scanner based real-time confocal hyperspectral fluorescence microscope for skin cancer detection.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121675909","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Analysis of hard spring effect of tense poly-Si torsion bar of micromirror 微镜张力多晶硅扭杆的硬弹簧效应分析
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318853
S. Kundu, S. Ogawa, S. Kumagai, M. Fujishima, K. Hane, M. Sasaki
{"title":"Analysis of hard spring effect of tense poly-Si torsion bar of micromirror","authors":"S. Kundu, S. Ogawa, S. Kumagai, M. Fujishima, K. Hane, M. Sasaki","doi":"10.1109/OMEMS.2012.6318853","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318853","url":null,"abstract":"The tense polycrystalline (poly-) Si torsion bar micromirror is advantageous to realize large rotation angle and stabilized temperature characteristics, simultaneously. In this paper, the hard spring effect of tense poly-Si torsion bar is characterized.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"217 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124290926","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Development of an integrated tunable LED-based illumination system using the dielectric liquid lens 基于介电液体透镜的集成可调谐led照明系统的研制
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318832
Chun-Wen Chen, Pei-Jen Wang, D. Yao, J. Yeh
{"title":"Development of an integrated tunable LED-based illumination system using the dielectric liquid lens","authors":"Chun-Wen Chen, Pei-Jen Wang, D. Yao, J. Yeh","doi":"10.1109/OMEMS.2012.6318832","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318832","url":null,"abstract":"The tunable LED-based illumination system using dielectric liquid lens with changing light distribution from side emitting to focusing. LED and liquid lens set in one package filling with oil reducing the junction temperature.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124308732","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Reflow of non-circular nano-pillars to fabricate nano-scale solid immersion lenses 非圆形纳米柱回流制备纳米级固体浸没透镜
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318831
Myun-Sik Kim, E. Keeler, S. Rydberg, W. Nakagawa, G. Osowecki, T. Scharf, H. Herzig
{"title":"Reflow of non-circular nano-pillars to fabricate nano-scale solid immersion lenses","authors":"Myun-Sik Kim, E. Keeler, S. Rydberg, W. Nakagawa, G. Osowecki, T. Scharf, H. Herzig","doi":"10.1109/OMEMS.2012.6318831","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318831","url":null,"abstract":"We investigate the reflow of non-circular, i.e., triangular and square, shaped pillars to fabricate nano-scale solid immersion lenses (SILs). Electron beam lithography (EBL) and thermal reflow are the core of the fabrication process. For the optical characterization at λ = 642 nm, nano-SILs are replicated on a transparent substrate by soft lithography. The focal spots produced by the nano-SILs show both spot-size reduction and peak-intensity enhancement, which are consistent with the immersion effect.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115509455","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
An electrostatically-driven MEMS tunable miniature iris diaphragm 一种静电驱动MEMS可调谐微型虹膜隔膜
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318854
Hongbin Yu, Guangya Zhou, F. Chau
{"title":"An electrostatically-driven MEMS tunable miniature iris diaphragm","authors":"Hongbin Yu, Guangya Zhou, F. Chau","doi":"10.1109/OMEMS.2012.6318854","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318854","url":null,"abstract":"A miniature tunable multi-blade iris diaphragm driven by microelectromechanical systems (MEMS) is developed. The diameter of the iris diaphragm aperture is experimentally demonstrated to be able to adjust continuously from 0.45 mm to 1.56 mm.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115518853","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Reconfigurable optical tweezers using MEMS scanning micromirror 使用MEMS扫描微镜的可重构光镊
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318871
M. Strathman, Jingda Wu, L. Lin
{"title":"Reconfigurable optical tweezers using MEMS scanning micromirror","authors":"M. Strathman, Jingda Wu, L. Lin","doi":"10.1109/OMEMS.2012.6318871","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318871","url":null,"abstract":"We demonstrated generation of various optical trap spots using a MEMS scanning micromirror with optical tweezers. By controlling the actuation voltage pattern, various focused laser lines and separate laser spots were achieved.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"42 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115574168","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Independently-addressed tunable cat's eye retro-reflector array for an optical identification system 用于光学识别系统的独立寻址可调谐猫眼反向反射器阵列
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318855
Chih-chieh Chang, Keng-hsing Chao, Bing-jun Yang, Ming-chun Su, J. Tsai
{"title":"Independently-addressed tunable cat's eye retro-reflector array for an optical identification system","authors":"Chih-chieh Chang, Keng-hsing Chao, Bing-jun Yang, Ming-chun Su, J. Tsai","doi":"10.1109/OMEMS.2012.6318855","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318855","url":null,"abstract":"We report an independently-addressed micro tunable cat's eye retro-reflector array. The device aims at serving as the ID tag in an optical identification system, hopefully a superior alternative to the current RFID systems. Dynamic images have been successfully generated by the tunable cat's eye array.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129700781","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Fabrication of freestanding membrane GaN light-emitting diode on Si substrate for MEMS applications MEMS用硅衬底GaN发光二极管的制备
2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI: 10.1109/OMEMS.2012.6318787
T. Tanae, H. Kawaguchi, A. Iwabuchi, K. Hane
{"title":"Fabrication of freestanding membrane GaN light-emitting diode on Si substrate for MEMS applications","authors":"T. Tanae, H. Kawaguchi, A. Iwabuchi, K. Hane","doi":"10.1109/OMEMS.2012.6318787","DOIUrl":"https://doi.org/10.1109/OMEMS.2012.6318787","url":null,"abstract":"Freestanding membrane GaN light emitting diode (LED) was fabricated on Si substrate for MEMS applications. GaN LED layer grown on Si substrate was used for the fabrication. Removing Si substrate by deep reactive ion etching (DRIE), the freestanding membrane structure of GaN LED was generated. In spite of the DRIE, no degradation was observed in the fabricated membrane LED. Using the membrane structure with grating, wavelength selective emission was obtained.","PeriodicalId":347863,"journal":{"name":"2012 International Conference on Optical MEMS and Nanophotonics","volume":"119 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-10-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124594529","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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