An electrostatically-driven MEMS tunable miniature iris diaphragm

2012 International Conference on Optical MEMS and Nanophotonics Pub Date : 2012-10-04 DOI:10.1109/OMEMS.2012.6318854

Hongbin Yu, Guangya Zhou, F. Chau

引用次数: 3

Abstract

A miniature tunable multi-blade iris diaphragm driven by microelectromechanical systems (MEMS) is developed. The diameter of the iris diaphragm aperture is experimentally demonstrated to be able to adjust continuously from 0.45 mm to 1.56 mm.

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一种静电驱动MEMS可调谐微型虹膜隔膜

研制了一种微机电系统驱动的微型可调谐多叶片虹膜。实验证明，光圈孔径的直径可以从0.45 mm连续调节到1.56 mm。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

2012 International Conference on Optical MEMS and Nanophotonics

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