2009 International Symposium on Micro-NanoMechatronics and Human Science最新文献_第9页

MEMS with five senses for IRT 具有五感IRT的MEMS

2009 International Symposium on Micro-NanoMechatronics and Human Science Pub Date : 2009-12-11 DOI: 10.1109/MHS.2009.5352101

I. Shimoyama

{"title":"MEMS with five senses for IRT","authors":"I. Shimoyama","doi":"10.1109/MHS.2009.5352101","DOIUrl":"https://doi.org/10.1109/MHS.2009.5352101","url":null,"abstract":"IRT is a new technological domain created by the integration of Information Technology (IT), which encompasses high-speed computing and network and software technologies, and Robot Technology (RT), whose forms and movements function in the physical world. IT, formed from technologies of the cyber-world, has the power to process information in the real world through communication and computer technologies. It promises to have even more advanced capabilities in the future. RT, formed from the technologies of the physical world, has advanced greatly in reliability and real-world functionality. By integration IT and RT, IRT innovations promise to give birth to industries that support life and society, and to bring about social transformation. One of the killer applications of IRT is a kitchen robot. The robot we have developed has tactile sensors to deal with plates and glasses on a tray and put them into a dishwasher. The tactile sensors are molded by elastic materials with tiny cantilevers in it. Not only tactile sensors but also vision/acoustic sensors are necessary for motion, safety and reliability of household robots. MEMS (MicroElectroMechanical Systems) give tiny/thin sensor arrays which cover a robot as smart skin.","PeriodicalId":344667,"journal":{"name":"2009 International Symposium on Micro-NanoMechatronics and Human Science","volume":"354 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134085464","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Adsorbed surfactant thickness on: A Si wafer dominating etching properties of TMAH solution 硅片表面活性剂的厚度决定了TMAH溶液的蚀刻性能

2009 International Symposium on Micro-NanoMechatronics and Human Science Pub Date : 2009-12-11 DOI: 10.1109/MHS.2009.5352098

B. Tang, M. Gosálvez, P. Pal, S. Itoh, H. Hida, M. Shikida, Kazuo Sato

引用次数: 5

Pico-liter injection control to individual nano-liter solution coated by lipid layer 微升注射控制到单个纳升溶液涂有脂质层

2009 International Symposium on Micro-NanoMechatronics and Human Science Pub Date : 2009-12-11 DOI: 10.1109/MHS.2009.5351948

Y. Matsuno, M. Nakajima, M. Kojima, Y. Tanaka-Takiguchi, K. Takiguchi, K. Nogawa, M. Homma, T. Fukuda

{"title":"Pico-liter injection control to individual nano-liter solution coated by lipid layer","authors":"Y. Matsuno, M. Nakajima, M. Kojima, Y. Tanaka-Takiguchi, K. Takiguchi, K. Nogawa, M. Homma, T. Fukuda","doi":"10.1109/MHS.2009.5351948","DOIUrl":"https://doi.org/10.1109/MHS.2009.5351948","url":null,"abstract":"This paper presents the evaluation of ultra-minimal spout amount from micro-nano pipettes into phospholipid-coated micro-droplets. The pipettes can be used to control the local environment around/inside single cells. Conventionally, the microinjection with pipette has been conducted by air pressures. In this method, the spout of high viscosity solutions is difficult because of the frictional forces between the surface of a pipette and a solution. It is also needed to evaluate the spout amount quantitatively. On the other hand, the research about artificial cell model has been actively conducted, injecting various biological samples into liposomes which are vesicle of lipid bilayer membrane. If additional injection of various proteins into liposome is realized with micro/nano pipette, the observation of dynamic reaction of multiple biological samples, which is required for formulation of artificial cell, will become possible. In our research, the spouting method using electro-osmosis is used. The local spouts of the proteins such as GFP and F-actin have been presented experimentally before. In this paper, the amount of spout solution in this method is quantitatively evaluated by injection of fluorescent solution into a phospholipid-coated micro-droplet.","PeriodicalId":344667,"journal":{"name":"2009 International Symposium on Micro-NanoMechatronics and Human Science","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129731761","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 3

Characterization of the piezoresistive effect and temperature coefficient of resistance in single crystalline silicon nanowires 单晶硅纳米线压阻效应及电阻温度系数的表征

2009 International Symposium on Micro-NanoMechatronics and Human Science Pub Date : 2009-12-11 DOI: 10.1109/MHS.2009.5351972

T. Bui, D. Dao, K. Nakamura, T. Toriyama, S. Sugiyama

{"title":"Characterization of the piezoresistive effect and temperature coefficient of resistance in single crystalline silicon nanowires","authors":"T. Bui, D. Dao, K. Nakamura, T. Toriyama, S. Sugiyama","doi":"10.1109/MHS.2009.5351972","DOIUrl":"https://doi.org/10.1109/MHS.2009.5351972","url":null,"abstract":"This paper reports the design, fabrication and evaluation of piezoresistive effect of the top-down fabricated p-type <110> Si Nanowires (SiNWs). The SiNWs with the length of 2µm, thickness of 35nm and width ranges from 35nm to 490nm have been fabricated by electron beam (EB) direct writing and reactive ion etching (RIE). The impurity concentration of the SiNWs is 2×1018 cm−3, obtained by ion implantation. The SiNWs are protected by a thermally grown SiO2 to avoid the environment influence and to deactivate the outer layer, which was attacked during RIE process. Dependence of piezoresistive effects on the width of the SiNWs of both longitudinal and transverse SiNWs has been characterized. The significant increasing had been found in longitudinal piezoresistive coefficient πl[110]. The results showed that when the width of the SiNWs reduces to nanometer size, the smaller the width, the bigger the piezoresistive coefficient. The coefficient πl[110] along <110> crystallographic orientation increased up to 60% when the width of SiNWs down from 490nm to 35nm. Furthermore, rather small influence of temperature to piezoresistive coefficient has been characterized. Piezoresistive effect slightly decreases when the temperature increases. The temperature coefficient of resistance (TCR) of the SiNWs has been measured to be from 450 to 850ppm/°C, i.e. about 8 times smaller than that of bulk silicon at same doping concentration. These excellent characteristics are important for high sensitive and low-temperature-affected mechanical sensors.","PeriodicalId":344667,"journal":{"name":"2009 International Symposium on Micro-NanoMechatronics and Human Science","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132042446","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 12

Fabrication of biodegradable scaffold by powder sintering process 粉末烧结法制备可生物降解支架

2009 International Symposium on Micro-NanoMechatronics and Human Science Pub Date : 2009-12-11 DOI: 10.1109/MHS.2009.5351879

T. Itoyama, T. Nakano, S. Ikeda, T. Fukuda, T. Matsuda, M. Negoro, F. Arai

引用次数: 0

Development of evolutionary and self-assembling robot-organisms 进化和自组装机器人有机体的发展

2009 International Symposium on Micro-NanoMechatronics and Human Science Pub Date : 2009-12-11 DOI: 10.1109/MHS.2009.5352063

P. Levi

{"title":"Development of evolutionary and self-assembling robot-organisms","authors":"P. Levi","doi":"10.1109/MHS.2009.5352063","DOIUrl":"https://doi.org/10.1109/MHS.2009.5352063","url":null,"abstract":"Symbiotic robotics is a discipline within collective robotics that is concerned with artificial multi-cellular robot-organisms that define their morphological structure by aggregation through self-assembling and they are also able to disaggregate afterwards. This contribution is concerned to the description of evolutionary and cognitive principles that governs such a symbiotic cycle to build artificial organisms of different forms and operate with them. The evolutionary approach starts with a artificial genome, will be continued by the insertion of different types of regulative cycles, and ends up in an embryogenetic formed body. Hereby there is differentiation between the genetic based learning and the fitness based learning. Further there are dominant differences between multi-cellular organism and structured cooperative aggregations of swarm members. The cognitive approach is focused on cognitive maps, on cognitive sensor data fusion and finally to the definition of information that governs the the process of organism formation and body survival in a given environment. This more engineering oriented approach is used to build all HW-components and all kinds of embedded “operating systems” to control and to operate symbiotic robot organisms.","PeriodicalId":344667,"journal":{"name":"2009 International Symposium on Micro-NanoMechatronics and Human Science","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130721777","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Manipulating behaviors of targeted single cells in vivo by using IR-LEGO 利用IR-LEGO在体内操纵目标单细胞的行为

2009 International Symposium on Micro-NanoMechatronics and Human Science Pub Date : 2009-12-11 DOI: 10.1109/MHS.2009.5351899

Motoshi Suzuki, Y. Kamei, S. Yuba, S. Takagi

引用次数: 0

Development of the maskless photolithography device with an LCD-projector for fabrication of micropatterned surfaces 带lcd投影仪的无掩模光刻装置的研制

2009 International Symposium on Micro-NanoMechatronics and Human Science Pub Date : 2009-12-11 DOI: 10.1109/MHS.2009.5351890

K. Itoga, J. Kobayashi, M. Yamato, T. Okano

引用次数: 0

On-chip particle-laden droplet dispensing by disposable inkjet system 一次性喷墨系统的片上微粒负载液滴点胶

2009 International Symposium on Micro-NanoMechatronics and Human Science Pub Date : 2009-12-11 DOI: 10.1109/MHS.2009.5351878

T. Mizunuma, Y. Yamanishi, S. Sakuma, H. Maruyama, F. Arai

引用次数: 2

Microactuator using tensile thin film 微致动器采用拉伸薄膜

2009 International Symposium on Micro-NanoMechatronics and Human Science Pub Date : 2009-12-11 DOI: 10.1109/MHS.2009.5351764

M. Sasaki

引用次数: 0