{"title":"MEMS with five senses for IRT","authors":"I. Shimoyama","doi":"10.1109/MHS.2009.5352101","DOIUrl":"https://doi.org/10.1109/MHS.2009.5352101","url":null,"abstract":"IRT is a new technological domain created by the integration of Information Technology (IT), which encompasses high-speed computing and network and software technologies, and Robot Technology (RT), whose forms and movements function in the physical world. IT, formed from technologies of the cyber-world, has the power to process information in the real world through communication and computer technologies. It promises to have even more advanced capabilities in the future. RT, formed from the technologies of the physical world, has advanced greatly in reliability and real-world functionality. By integration IT and RT, IRT innovations promise to give birth to industries that support life and society, and to bring about social transformation. One of the killer applications of IRT is a kitchen robot. The robot we have developed has tactile sensors to deal with plates and glasses on a tray and put them into a dishwasher. The tactile sensors are molded by elastic materials with tiny cantilevers in it. Not only tactile sensors but also vision/acoustic sensors are necessary for motion, safety and reliability of household robots. MEMS (MicroElectroMechanical Systems) give tiny/thin sensor arrays which cover a robot as smart skin.","PeriodicalId":344667,"journal":{"name":"2009 International Symposium on Micro-NanoMechatronics and Human Science","volume":"354 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134085464","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
B. Tang, M. Gosálvez, P. Pal, S. Itoh, H. Hida, M. Shikida, Kazuo Sato
{"title":"Adsorbed surfactant thickness on: A Si wafer dominating etching properties of TMAH solution","authors":"B. Tang, M. Gosálvez, P. Pal, S. Itoh, H. Hida, M. Shikida, Kazuo Sato","doi":"10.1109/MHS.2009.5352098","DOIUrl":"https://doi.org/10.1109/MHS.2009.5352098","url":null,"abstract":"The goal of this article is to study the etching properties as a function of various adsorbed surfactant thickness in wet anisotropic etching process of TMAH solution. The thickness of preferentially adsorbed surfactant molecules on Si{110} and Si{100} has been evaluated by using spectroscopic ellipsometry (SE). The dependence of the etch rate in TMAH and the surface roughness on the layer thickness demonstrates that the surfactant is adsorbed at the interface during etching in TMAH+Triton. A thin pre-adsorbed layer is sufficient to dramatically improve the etching characteristics of silicon.","PeriodicalId":344667,"journal":{"name":"2009 International Symposium on Micro-NanoMechatronics and Human Science","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129647657","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Y. Matsuno, M. Nakajima, M. Kojima, Y. Tanaka-Takiguchi, K. Takiguchi, K. Nogawa, M. Homma, T. Fukuda
{"title":"Pico-liter injection control to individual nano-liter solution coated by lipid layer","authors":"Y. Matsuno, M. Nakajima, M. Kojima, Y. Tanaka-Takiguchi, K. Takiguchi, K. Nogawa, M. Homma, T. Fukuda","doi":"10.1109/MHS.2009.5351948","DOIUrl":"https://doi.org/10.1109/MHS.2009.5351948","url":null,"abstract":"This paper presents the evaluation of ultra-minimal spout amount from micro-nano pipettes into phospholipid-coated micro-droplets. The pipettes can be used to control the local environment around/inside single cells. Conventionally, the microinjection with pipette has been conducted by air pressures. In this method, the spout of high viscosity solutions is difficult because of the frictional forces between the surface of a pipette and a solution. It is also needed to evaluate the spout amount quantitatively. On the other hand, the research about artificial cell model has been actively conducted, injecting various biological samples into liposomes which are vesicle of lipid bilayer membrane. If additional injection of various proteins into liposome is realized with micro/nano pipette, the observation of dynamic reaction of multiple biological samples, which is required for formulation of artificial cell, will become possible. In our research, the spouting method using electro-osmosis is used. The local spouts of the proteins such as GFP and F-actin have been presented experimentally before. In this paper, the amount of spout solution in this method is quantitatively evaluated by injection of fluorescent solution into a phospholipid-coated micro-droplet.","PeriodicalId":344667,"journal":{"name":"2009 International Symposium on Micro-NanoMechatronics and Human Science","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129731761","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
T. Bui, D. Dao, K. Nakamura, T. Toriyama, S. Sugiyama
{"title":"Characterization of the piezoresistive effect and temperature coefficient of resistance in single crystalline silicon nanowires","authors":"T. Bui, D. Dao, K. Nakamura, T. Toriyama, S. Sugiyama","doi":"10.1109/MHS.2009.5351972","DOIUrl":"https://doi.org/10.1109/MHS.2009.5351972","url":null,"abstract":"This paper reports the design, fabrication and evaluation of piezoresistive effect of the top-down fabricated p-type <110> Si Nanowires (SiNWs). The SiNWs with the length of 2µm, thickness of 35nm and width ranges from 35nm to 490nm have been fabricated by electron beam (EB) direct writing and reactive ion etching (RIE). The impurity concentration of the SiNWs is 2×1018 cm−3, obtained by ion implantation. The SiNWs are protected by a thermally grown SiO2 to avoid the environment influence and to deactivate the outer layer, which was attacked during RIE process. Dependence of piezoresistive effects on the width of the SiNWs of both longitudinal and transverse SiNWs has been characterized. The significant increasing had been found in longitudinal piezoresistive coefficient πl[110]. The results showed that when the width of the SiNWs reduces to nanometer size, the smaller the width, the bigger the piezoresistive coefficient. The coefficient πl[110] along <110> crystallographic orientation increased up to 60% when the width of SiNWs down from 490nm to 35nm. Furthermore, rather small influence of temperature to piezoresistive coefficient has been characterized. Piezoresistive effect slightly decreases when the temperature increases. The temperature coefficient of resistance (TCR) of the SiNWs has been measured to be from 450 to 850ppm/°C, i.e. about 8 times smaller than that of bulk silicon at same doping concentration. These excellent characteristics are important for high sensitive and low-temperature-affected mechanical sensors.","PeriodicalId":344667,"journal":{"name":"2009 International Symposium on Micro-NanoMechatronics and Human Science","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132042446","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
T. Itoyama, T. Nakano, S. Ikeda, T. Fukuda, T. Matsuda, M. Negoro, F. Arai
{"title":"Fabrication of biodegradable scaffold by powder sintering process","authors":"T. Itoyama, T. Nakano, S. Ikeda, T. Fukuda, T. Matsuda, M. Negoro, F. Arai","doi":"10.1109/MHS.2009.5351879","DOIUrl":"https://doi.org/10.1109/MHS.2009.5351879","url":null,"abstract":"To reproduce blood vessel, we proposed new process for fabricating biodegradable scaffold by powder sintering process. In this process, model for molding scaffold was materialized by rapid prototyping. Biodegradable polymer powder and porogen were dusted to model and heated. So, arbitrary shape scaffold would be fabricated. Also, porosity that influences compliance of blood vessel scaffold would be adjusted by changing ratio of the polymer powder and porogen. We studied fabrication condition of blood vessel scaffold by measuring porosity and Young's modulus when the ratio of the polymer powder and porogen was adjusted. Also, HUVECs were cultured on the scaffold, and the scaffold's biocompatibility was confirmed.","PeriodicalId":344667,"journal":{"name":"2009 International Symposium on Micro-NanoMechatronics and Human Science","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115318067","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
T. Mizunuma, Y. Yamanishi, S. Sakuma, H. Maruyama, F. Arai
{"title":"On-chip particle-laden droplet dispensing by disposable inkjet system","authors":"T. Mizunuma, Y. Yamanishi, S. Sakuma, H. Maruyama, F. Arai","doi":"10.1109/MHS.2009.5351878","DOIUrl":"https://doi.org/10.1109/MHS.2009.5351878","url":null,"abstract":"We succeeded in dispensing micro-droplet by a disposable on-chip inkjet mechanism. Novelty of this paper is summarized as follows. (1) We employed a glass plate bonded Poly-dimethylsiloxane (PDMS) membrane to obtain leaf spring structure whose spring coefficient is 14 times of the conventional PDMS membrane. As a result, we succeeded in dispensing droplets continuously (up to 10 Hz) by vibrating the membrane using the multilayers piezoelectric actuator attached to the PDMS disposable chip. (2) The nozzle for droplet dispensing was fabricated by thick photoresist (SU-8) to obtain the hydrophobic surface which prevents any undesired satellite droplets produced. Consequently the accuracy of position of the droplet dispensing was achieved ± 5 μm. The size of the droplet produced from the disposable nozzle (diameter = 100 μm) was in the range of 95–105 μm at the applied voltage of 105 V.","PeriodicalId":344667,"journal":{"name":"2009 International Symposium on Micro-NanoMechatronics and Human Science","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124553712","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. Ito, Hirokazu Akiyama, Yasunori Yamamoto, Y. Kawabe, M. Kamihira
{"title":"Skeletal muscle tissue engineering using functional magnetite nanoparticles","authors":"A. Ito, Hirokazu Akiyama, Yasunori Yamamoto, Y. Kawabe, M. Kamihira","doi":"10.1109/MHS.2009.5351986","DOIUrl":"https://doi.org/10.1109/MHS.2009.5351986","url":null,"abstract":"Skeletal muscular tissues were constructed using magnetic force-based tissue engineering (Mag-TE) techniques. Mouse myoblast C2C12 cells labeled with magnetite cationic liposomes (MCLs) were seeded into a well of 24-well ultra-low cell attachment culture plates. When a magnet was positioned underneath the well, cells accumulated evenly onto the culture surface and formed a multilayered cell sheet. Furthermore, because an angiogenic potential of transplants is considered to be important for the long-term maintenance of cell survival and tissue functions, a vascular endothelial growth factor (VEGF) gene-modified C2C12 (C2C12/VEGF) cell sheets were also fabricated by the Mag-TE technique. The secretion level of C2C12/VEGF sheets was 3.0 ng/day, indicating that VEGF gene-expressing cell sheets were successfully fabricated. Since the shape of artificial tissue constructs can be controlled by magnetic force, a cellular string-like assembly was formed by placing a linear-shaped magnetic field concentrator with a magnet. These cellular sheets and strings shrank and did not maintain their shapes for an additional in vitro culture period during myogenic differentiation. On the other hand, when a silicone plug was positioned at the center of well during the fabrication of cell sheets, the cell sheets shrank and formed a ring-like assembly around the plug. After 6-d cultivation of cell rings in differentiation medium, the C2C12 cells differentiated to form multinucleated myotubes. Thus, these procedures can provide a novel strategy for skeletal muscular tissue engineering.","PeriodicalId":344667,"journal":{"name":"2009 International Symposium on Micro-NanoMechatronics and Human Science","volume":"104 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126438854","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"A new decision making criteria of ROI evaluation in video sequences and comparison with human evaluation psychology","authors":"M. Rokunuzzaman, K. Sekiyama, T. Fukuda","doi":"10.1109/MHS.2009.5351755","DOIUrl":"https://doi.org/10.1109/MHS.2009.5351755","url":null,"abstract":"This paper introduces a new decision making criteria by which the Region of Interest (ROI) is selected and evaluated. This criterion is based on Human psychology of relevance in visual perception. The experimental results are validated by comparing with Eye tracker system and Human evaluation measured by Subjective Correlation value for each ROI.","PeriodicalId":344667,"journal":{"name":"2009 International Symposium on Micro-NanoMechatronics and Human Science","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131160297","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"A new multi-scale micromanipulation system with dexterous motion","authors":"E. Avci, K. Ohara, T. Takubo, Y. Mae, T. Arai","doi":"10.1109/MHS.2009.5351959","DOIUrl":"https://doi.org/10.1109/MHS.2009.5351959","url":null,"abstract":"Micro robotics is a significant area to be able to manipulate micro level objects dexterously. Until now, various micro manipulation systems have been presented. In micro environment, different kinds of objects have different dimensions. Some of them are a few micrometers (µm) such as donor cells, some of them are more than a hundred µm such as egg cells. At this point, a manipulator which has multi-scale manipulation ability can manipulate different size objects. Otherwise, for different diameter objects, different micro-hands are necessary. Furthermore, when we want to manipulate micro objects, manipulation distance is not always same. Because, with micro hand, we do not just want to grasp or rotate the objects, sometimes we could also want to carry the object from one micro environment to another one. Therefore, workspace of micro manipulator is also important for various micro tasks. In this paper, we propose a new micro manipulation system which includes parallel mechanism for grasping and releasing tasks. This new system has ability of multi-scale manipulation, which means manipulation of different size objects with same micro hand. Moreover, short distance (nm) and long distances carriage (mm) are feasible with this micro manipulator.","PeriodicalId":344667,"journal":{"name":"2009 International Symposium on Micro-NanoMechatronics and Human Science","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131532167","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Development of evolutionary and self-assembling robot-organisms","authors":"P. Levi","doi":"10.1109/MHS.2009.5352063","DOIUrl":"https://doi.org/10.1109/MHS.2009.5352063","url":null,"abstract":"Symbiotic robotics is a discipline within collective robotics that is concerned with artificial multi-cellular robot-organisms that define their morphological structure by aggregation through self-assembling and they are also able to disaggregate afterwards. This contribution is concerned to the description of evolutionary and cognitive principles that governs such a symbiotic cycle to build artificial organisms of different forms and operate with them. The evolutionary approach starts with a artificial genome, will be continued by the insertion of different types of regulative cycles, and ends up in an embryogenetic formed body. Hereby there is differentiation between the genetic based learning and the fitness based learning. Further there are dominant differences between multi-cellular organism and structured cooperative aggregations of swarm members. The cognitive approach is focused on cognitive maps, on cognitive sensor data fusion and finally to the definition of information that governs the the process of organism formation and body survival in a given environment. This more engineering oriented approach is used to build all HW-components and all kinds of embedded “operating systems” to control and to operate symbiotic robot organisms.","PeriodicalId":344667,"journal":{"name":"2009 International Symposium on Micro-NanoMechatronics and Human Science","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-12-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130721777","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}