Dong Won Jeon , Wootaek Choi , Jun Hyuk Kang , Hyeon Woo Kim , Min Sung Kang , Woongchan Kim , Han Uk Lee , Hyunseok Ko , Patrick Joohyun Kim , Sung Beom Cho
{"title":"Rational material design of chemically inert oxide anode coating layers for lithium metal and all-solid-state batteries","authors":"Dong Won Jeon , Wootaek Choi , Jun Hyuk Kang , Hyeon Woo Kim , Min Sung Kang , Woongchan Kim , Han Uk Lee , Hyunseok Ko , Patrick Joohyun Kim , Sung Beom Cho","doi":"10.1016/j.apsadv.2025.100842","DOIUrl":"10.1016/j.apsadv.2025.100842","url":null,"abstract":"<div><div>While many coating materials have been explored to address the compatibility issues between Li anodes and solid-state electrolytes, a fully tailored material has yet to be suggested. Herein, we systematically evaluated potential coating candidate material properties to establish effective guidelines for functional battery material discovery. By performing high-throughput screening with various methodologies, we identified promising coating candidates such as LiTbO<sub>2</sub>, and LiDyO<sub>2</sub>, which exhibit inhibition of Li dendrite growth, non-reactivity, lithiophilicity, and sufficient ionic conductivity. Additionally, instead of directly synthesizing the coating layer from commercialized binary precursors, we experimentally induced the coating layers LiTbO<sub>2</sub> and LiDyO<sub>2</sub> from the binaries within the cell and validated their potential as coatings. Our findings provide a systematic framework for discovering and developing new materials to enhance the performance, safety, and commercial viability of all solid-state batteries.</div></div>","PeriodicalId":34303,"journal":{"name":"Applied Surface Science Advances","volume":"29 ","pages":"Article 100842"},"PeriodicalIF":8.7,"publicationDate":"2025-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145019134","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
M․ E․ Pronsato , G. Brizuela , R. Ambrusi , A. Juan , J․ M․ Marchetti
{"title":"The adsorption of oleic acid on CaO(100): A DFT study","authors":"M․ E․ Pronsato , G. Brizuela , R. Ambrusi , A. Juan , J․ M․ Marchetti","doi":"10.1016/j.apsadv.2025.100853","DOIUrl":"10.1016/j.apsadv.2025.100853","url":null,"abstract":"<div><div>The adsorption behavior of oleic acid on the CaO(100) surface was investigated using density functional theory (DFT) with van der Waals corrections. Two main adsorption configurations were explored: interaction through the carboxylic group (upright orientation) and through the C=C double bond (flat orientation). The most stable adsorption corresponds to the upright configuration, in which the carboxylic acid group dissociates spontaneously upon contact with the surface, forming a bidentate oleate species with a calculated adsorption energy of –1.94 eV. In contrast, adsorption via the double bond resulted in weaker interactions, with energies ranging from –0.59 to –0.76 eV. Charge distribution, density of states (DOS), and bond order analyses confirm significant electronic rearrangement upon adsorption, particularly in the carboxylic group and adjacent surface sites. These findings provide molecular-level insight into the interaction mechanisms between fatty acids and basic oxide catalysts, contributing to the understanding of CaO's role in several important phenomena, including metal leaching in biodiesel reactions and initial steps in decarboxylation of oleic acid into lighter organic compounds and separation of calcium minerals by flotation.</div></div>","PeriodicalId":34303,"journal":{"name":"Applied Surface Science Advances","volume":"29 ","pages":"Article 100853"},"PeriodicalIF":8.7,"publicationDate":"2025-09-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145094895","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Influence of solute doping on nanotwinning, texture, and properties of Co-sputtered Ag–Cu alloy thin films","authors":"Yu-Chieh Wang , Chi-Shen Chen , Hsin-Yi Tiffany Chen , Fan-Yi Ouyang","doi":"10.1016/j.apsadv.2025.100831","DOIUrl":"10.1016/j.apsadv.2025.100831","url":null,"abstract":"<div><div>Silver (Ag) and copper (Cu) are widely used in interconnect applications due to their excellent electrical and thermal conductivities. Both metals can form twin structures, which contribute to enhanced mechanical strength, low resistivity, and high thermal stability. To further improve hardness while maintaining functional performance, this study explores the effects of solute doping in Cu-doped Ag and Ag-doped Cu alloy thin films using a combination of density functional theory (DFT) calculations and co-sputtering deposition. The results reveal that doping reduces the stacking fault energy (SFE) in both systems, thereby influencing twin formation and microstructural evolution. In Cu-doped Ag films, increased doping concentrations significantly reduce SFE, promoting the formation of dense nanotwins and a strong (111) crystallographic texture. In contrast, Ag-doped Cu films exhibit more random microstructures and weaker texturing, primarily due to the limited solubility of Ag in Cu. Solute doping also introduces lattice distortions, leading to residual stress variations, grain refinement, and reduced surface roughness. Notably, Cu-doped Ag films with 4.7 at. % Cu exhibit a surface roughness of ∼5 nm and nearly double the hardness of pure Ag, while maintaining a moderate increase in resistivity (∼50 %). These improvements are attributed to solid solution strengthening, twin formation, and inhibited atomic mobility during growth. The combined enhancements in hardness, texture, and surface smoothness make solute-doped Ag–Cu alloy thin films promising candidates for metal-to-metal direct bonding and hybrid bonding in advanced electronic packaging applications.</div></div>","PeriodicalId":34303,"journal":{"name":"Applied Surface Science Advances","volume":"29 ","pages":"Article 100831"},"PeriodicalIF":8.7,"publicationDate":"2025-08-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144916555","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Green synthesis of carboxymethyl cellulose-derived carbon quantum dots using microplasma technology","authors":"Jirasak Sukunta , Rangsan Panyathip , Kittisak Jantanasakulwong , Sarinthip Thanakkasaranee , Choncharoen Sawangrat , Wassanai Wattanutchariya , Takron Opassuwan , Pornchai Rachtanapun","doi":"10.1016/j.apsadv.2025.100830","DOIUrl":"10.1016/j.apsadv.2025.100830","url":null,"abstract":"<div><div>Carbon quantum dots (CQDs) are promising nanomaterials known for their exceptional optical and electronic properties, making them ideal candidates for quantum dot-based devices. In this study, carboxymethyl cellulose (CMC) as a biomass-derived precursor, was utilized to synthesize CQDs (QCMC) through a microplasma-assisted approach under atmospheric pressure. The influence of plasma generating and NaOH concentration (0–0.5 M) on the hydrolysis, depolymerization, and carbonization processes of CMC was systematically investigated. The UV–Vis, FTIR, fluorescence, and TEM characterization confirmed the successful synthesis of QCMC. The results indicated that increasing NaOH concentration in microplasma synthesis facilitated the reduced particle size and formation of carboxyl functional groups through sequential hydrolysis, depolymerization, carbonization, and formation processes. These QCMC featured surface-enriched carboxyl functional groups. Specifically, QCMC synthesized from a 0.5 M NaOH solution demonstrated an average particle size of 1.3 nm within 60 min of reaction by notable fluorescence intensity and a blue shift with the maximum emission wavelength at 418 nm. This study highlights the potential of microplasma technology as an efficient, green synthesis method for producing CQDs with tunable properties for various applications.</div></div>","PeriodicalId":34303,"journal":{"name":"Applied Surface Science Advances","volume":"29 ","pages":"Article 100830"},"PeriodicalIF":8.7,"publicationDate":"2025-08-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144911993","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Rationally designed ternary TiO2/ZnO/SrFe2O4 heterojunction photocatalyst towards efficient visible-light-induced degradation of binary mixture of basic yellow 28 and basic blue 41 dyes","authors":"Abbas Sadeghzadeh-Attar","doi":"10.1016/j.apsadv.2025.100829","DOIUrl":"10.1016/j.apsadv.2025.100829","url":null,"abstract":"<div><div>The design and fabrication of hybrid nanostructures featuring enhanced photocatalytic properties have long been of interest to scientists in attempts to eliminate environmental pollution, particularly those emanating from degraded dyes of industrial wastewater. However, research has often strived to remove dyes in single solutions, while there are a few reports to remove them in binary mixture. This research assesses a ternary TiO<sub>2</sub>/ZnO/SrFe<sub>2</sub>O<sub>4</sub> nanocomposite for its visible-light-driven photocatalytic activity in degrading basic blue 41 (BB41) and basic yellow 28 (BY28) dyes in the single and binary systems. ZnO and SrFe<sub>2</sub>O<sub>4</sub> nanoparticles (NPs) synthesized via the sol-gel method were loaded onto the surface of TiO<sub>2</sub> nanorods to form a heterojunction composite. The degradation efficiency was optimized by adjusting initial dye concentration, catalyst dosage, initial pH, and duration of irradiation as key process parameters. Optimally (20 mg/L initial dye concentration; 0.5 mg/L catalyst dosage; and pH: 6.5), the degradation rate of BY28 and BB41 dyes was 0.0423 and 0.0405 min<sup>−1</sup> in the single solutions and 0.0388 and 0.0348 min<sup>−1</sup> in their respective binary solutions, respectively.</div></div>","PeriodicalId":34303,"journal":{"name":"Applied Surface Science Advances","volume":"29 ","pages":"Article 100829"},"PeriodicalIF":8.7,"publicationDate":"2025-08-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144908655","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Ha Eun Kang , Seong-Do Kim , Young Soo Yoon , Sang-Jin Lee
{"title":"Recent progress in tailoring Ni-rich layered oxides via coating and doping strategies for enhanced lithium-ion battery performance","authors":"Ha Eun Kang , Seong-Do Kim , Young Soo Yoon , Sang-Jin Lee","doi":"10.1016/j.apsadv.2025.100826","DOIUrl":"10.1016/j.apsadv.2025.100826","url":null,"abstract":"<div><div>Nickel-rich layered oxide cathodes, typified by compositions such as LiNi₁₋ₓ₋ᵧCoₓMnᵧO₂ (NCM) have garnered significant attention as high-energy-density candidates for next-generation lithium-ion batteries. However, their widespread deployment is hindered by a confluence of structural degradation, surface instability, and poor interfacial compatibility under high voltage cycling. To address these multifaceted limitations, this review comprehensively examines recent advances in surface coating and bulk doping strategies, which have emerged as pivotal approaches for enhancing the electrochemical stability and longevity of Ni-rich cathodes. Surface coatings including oxides, phosphates, and fluorides have been shown to effectively mitigate electrolyte-induced parasitic reactions and reinforce cathode–electrolyte interfaces. Simultaneously, elemental doping at transition-metal, lithium, and oxygen sites offer promising pathways to suppress cation disorder, stabilize layered frameworks, and facilitate Li⁺ transport. Emphasis is placed on site-specific doping mechanisms, the role of multi-site (co-)doping, and their synergistic interplay with surface modification layers. By synthesizing recent findings, this review delineates how the judicious integration of coating and doping techniques can enable the rational design of Ni-rich cathodes with enhanced structural integrity, rate capability, and cycle life.</div></div>","PeriodicalId":34303,"journal":{"name":"Applied Surface Science Advances","volume":"29 ","pages":"Article 100826"},"PeriodicalIF":8.7,"publicationDate":"2025-08-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144902811","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Mu-Ju Wu , Ting-Zhong Yan , Yu-Heng Hung , Chun-Hung Lin , Hsin-Ying Lee , Ching-Ting Lee
{"title":"Investigation of In2O3: Zn NO2 gas sensors with nanoimprinted nanorod array and gold-black nanoparticles","authors":"Mu-Ju Wu , Ting-Zhong Yan , Yu-Heng Hung , Chun-Hung Lin , Hsin-Ying Lee , Ching-Ting Lee","doi":"10.1016/j.apsadv.2025.100833","DOIUrl":"10.1016/j.apsadv.2025.100833","url":null,"abstract":"<div><div>In this study, to develop nitrogen dioxide (NO<sub>2</sub>) gas sensors with high response, high selectivity, and low operating temperature, indium oxide (In<sub>2</sub>O<sub>3</sub>) sensing membranes prepared using a magnetron radio frequency (RF) sputtering system and annealed in a hydrogen atmosphere at various temperatures were initially investigated. X-ray photoelectron spectroscopy analysis revealed that more oxygen vacancies were found in the In<sub>2</sub>O<sub>3</sub> films annealed at 400 °C for 10 min, indicating more gas adsorption sites were in the sensing membranes. Zn-doped In<sub>2</sub>O<sub>3</sub> (In<sub>2</sub>O<sub>3</sub>:Zn) sensing membranes were created using a magnetron RF co-sputtering system with various RF powers for the ZnO target. The NO<sub>2</sub> gas sensors using In<sub>2</sub>O<sub>3</sub>:Zn sensing membranes with a Zn content of 5.4 at.% exhibited a response of 66.0 under 10-ppm NO<sub>2</sub> concentration. Additionally, the In<sub>2</sub>O<sub>3</sub>:Zn sensing membranes were deposited on various periodic nanoimprinted nanorod array patterns. The response of NO<sub>2</sub> gas sensors using In<sub>2</sub>O<sub>3</sub>:Zn sensing membranes with a Zn content of 5.4 at.% deposited on a 400-nm-periodic nanoimprinted nanorod array was 94.4 under 10-ppm NO<sub>2</sub> concentration. Finally, p-type gold-black nanoparticles (NPs) were decorated on the In<sub>2</sub>O<sub>3</sub>:Zn sensing membranes to form p-n heterojunctions. The NO<sub>2</sub> gas sensors using gold-black NPs/In<sub>2</sub>O<sub>3</sub>:Zn sensing membranes with Zn content of 5.4 at.% and gold content of 1.1 at.% demonstrated optimal sensing performance. Under a NO<sub>2</sub> concentration of 10 ppm, the gas sensors achieved a maximum response of 141.5 at an operating temperature of 115 °C. Moreover, the NO<sub>2</sub> gas sensor could detect concentrations as low as 0.1 ppm and exhibited high selectivity towards NO<sub>2</sub> gas.</div></div>","PeriodicalId":34303,"journal":{"name":"Applied Surface Science Advances","volume":"29 ","pages":"Article 100833"},"PeriodicalIF":8.7,"publicationDate":"2025-08-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144908654","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Ting-Chun Chang , Lu-Hao Lien , Hsin-Ying Lee , Ching-Ting Lee
{"title":"Investigation performance of NO gas sensors using WO3 nanorod sensing membranes","authors":"Ting-Chun Chang , Lu-Hao Lien , Hsin-Ying Lee , Ching-Ting Lee","doi":"10.1016/j.apsadv.2025.100834","DOIUrl":"10.1016/j.apsadv.2025.100834","url":null,"abstract":"<div><div>Tungsten oxide (WO<sub>3</sub>) nanorods were grown on WO<sub>3</sub> seed layers using hydrothermal synthesis method as the sensing membranes of nitrogen oxide (NO) gas sensors. To obtain optimal crystalline structure, various sputtering parameters were controlled to deposit 100-nm-thick WO<sub>3</sub> seed layers and then annealed in an oxygen ambience for 1 h at various temperatures. The WO<sub>3</sub> nanorods were grown on the optimal WO<sub>3</sub> seed layers using the hydrothermal synthesis method with various precursor solutions at various temperatures. To obtain the optimal amount of gas adsorption sites provided by the oxygen vacancies on the surface of the WO<sub>3</sub> nanorods, the grown WO<sub>3</sub> nanorods were annealed in a hydrogen atmosphere at various temperatures and for various times. To form p-n heterojunction and catalytic spillover effect, p-type gold-black nanoparticles were deposited on the n-type WO<sub>3</sub> nanorods at approximately 80 K using a vapor cooling condensation system. The gold-black nanoparticles and the associated Au contents were observed and estimated using a high resolution transmission electron microscopy and energy dispersive spectroscopy, respectively. Under the 1-ppm NO concentration and operating temperature of 127.5 °C, the response of 33.25, response time of 52 s, and recovery time of 94 s were obtained. The activation energy of the NO gas sensors was lowered by generating oxygen vacancy and decorating gold-black nanoparticles onto the WO<sub>3</sub> nanorods. Therefore, in addition to improving the response characteristics, both the response time and recovery time were also shortened due to the enhanced adsorption capability and desorption capability of NO molecules.</div></div>","PeriodicalId":34303,"journal":{"name":"Applied Surface Science Advances","volume":"29 ","pages":"Article 100834"},"PeriodicalIF":8.7,"publicationDate":"2025-08-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144902812","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Preparation and characterization of silver-doped, zinc-doped, and silver-zinc co-doped β-tricalcium phosphate/barium titanate/collagen composite scaffolds","authors":"Dwi Fortuna Anjusa Putra , Tzu-Jui Peng , Meng-Huang Wu , Shao-Ju Shih","doi":"10.1016/j.apsadv.2025.100832","DOIUrl":"10.1016/j.apsadv.2025.100832","url":null,"abstract":"<div><div>To overcome the disadvantage of lacking antibacterial properties for beta-tricalcium phosphate (β-TCP), the Ag, Zn, or Ag/Zn-doped powders were synthesized using spray pyrolysis. Afterward, by adding barium titanate (BT) and collagen (COL), a freeze-drying method was applied to prepare pure β-TCP/BT/COL and metal (Ag, Zn, or Ag/Zn)-doped β-TCP/BT/COL composite scaffolds. In this study, the morphologies, phase compositions, porosities, mechanical properties, antibacterial properties, and cell viabilities of composite scaffolds were characterized by X-ray diffraction, scanning electron microscopy, mercury porosimeter, universal testing machine, antibacterial test, and 3-(4,5-dimethylthiazol-2-yl)-2,5-diphenyltetrazolium bromide assay, respectively. Among these scaffolds, unlike the single metal-doped β-TCP scaffolds (e.g., Ag-doped β-TCP/BT/COL scaffolds or Zn-doped β-TCP/BT/COL scaffolds), the Ag/Zn co-doped β-TCP/BT/COL scaffolds offer the excellent antibacterial properties of ∼99.65 % against <em>Escherichia coli</em> and exhibit the superior cell viability of ∼94.59 % against MC3T3-E1 cells. Additionally, the Ag/Zn co-doped scaffolds showed enhanced compressive strength and maintained an interconnected porous architecture favorable for osteointegration. These results suggest that co-doping with Ag and Zn not only imparts strong antibacterial activity but also improves the biological and mechanical performance of the scaffolds. Therefore, the Ag/Zn co-doped β-TCP/BT/COL scaffold presents a promising multi-functional material for future applications in bone tissue engineering.</div></div>","PeriodicalId":34303,"journal":{"name":"Applied Surface Science Advances","volume":"29 ","pages":"Article 100832"},"PeriodicalIF":8.7,"publicationDate":"2025-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144896212","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
JinKyu Lee , Sunyeol Bae , Seungyoon Shin, Soo-Yeon Lee
{"title":"Mitigating electrical degradation in ultra-thin IGZO TFTs through contact engineering with Al2O3 interlayer","authors":"JinKyu Lee , Sunyeol Bae , Seungyoon Shin, Soo-Yeon Lee","doi":"10.1016/j.apsadv.2025.100827","DOIUrl":"10.1016/j.apsadv.2025.100827","url":null,"abstract":"<div><div>This study proposes an effective solution to mitigate performance degradation in ultra-thin devices after systematically investigating how the channel thickness affects the electrical characteristics of amorphous indium gallium zinc oxide (a-IGZO) thin-film transistors (TFTs). When the channel thickness is reduced below 5 nm, a significant decrease in mobility and current crowding are observed. This degradation primarily stems from Ti-induced oxidation and trap formation, which are not confined to the interface but extend into the IGZO channel bulk, physically damaging the electron conduction path and ultimately reducing the field-effect mobility to approximately 0.2 cm²/V·s. To address this issue, an atomic-layer-deposited (ALD) Al₂O₃ interlayer (IL) was introduced at the Ti/IGZO interface. Although the TMA precursor used in ALD has strong reactivity with IGZO components, the self-limiting surface reaction characteristic of ALD confines chemical interactions to the IGZO surface, thereby forming a uniform and dense dielectric film without damaging the underlying channel. Additionally, the resulting Al₂O₃ layer acts as a thermodynamically stable diffusion barrier that prevents spontaneous redox reactions with Ti, effectively suppressing the formation of interfacial oxides. As a result, the Al₂O₃ IL preserves the chemical and structural integrity of the IGZO channel and enables robust electron injection at the contact interface. Notably, with a 3 nm-thick IL, the field-effect mobility of ultra-thin 3 nm IGZO TFTs was significantly enhanced from ∼0.2 to ∼2.4 cm²/V·s. This study highlights the importance of interfacial engineering in addressing contact resistance issues in ultra-thin oxide semiconductors and provides a scalable and effective strategy for developing high-performance IGZO-based TFTs for next-generation electronic applications.</div></div>","PeriodicalId":34303,"journal":{"name":"Applied Surface Science Advances","volume":"29 ","pages":"Article 100827"},"PeriodicalIF":8.7,"publicationDate":"2025-08-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"144896213","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}