Applied Surface Science Advances最新文献

Editorial on hot topics in surface science: (Nano) catalysis for energy, environmental, and industrial applications (HTSS-NCEEIA)

IF 7.5

Applied Surface Science Advances Pub Date : 2025-04-06 DOI: 10.1016/j.apsadv.2025.100742

Athanasios Tiliakos , Adriana Marinoiu , Diana Tudorache , Mietek Jaroniec

引用次数: 0

Bimetallic Pd/CuO nanoparticles obtained by laser re-irradiation in liquids for antibacterial applications

IF 7.5

Applied Surface Science Advances Pub Date : 2025-04-03 DOI: 10.1016/j.apsadv.2025.100735

Ana M. Vilas , Mónica Fernández-Arias , Mohamed Boutinguiza , Daniel Rodríguez , Eugenio Solla , Tània Vilella , Jesús del Val , A. Riveiro , Javier Gil , Juan Pou

{"title":"Bimetallic Pd/CuO nanoparticles obtained by laser re-irradiation in liquids for antibacterial applications","authors":"Ana M. Vilas , Mónica Fernández-Arias , Mohamed Boutinguiza , Daniel Rodríguez , Eugenio Solla , Tània Vilella , Jesús del Val , A. Riveiro , Javier Gil , Juan Pou","doi":"10.1016/j.apsadv.2025.100735","DOIUrl":"10.1016/j.apsadv.2025.100735","url":null,"abstract":"<div><div>Antimicrobial resistance (AMR) is considered a major global health problem of the 21st century. Noble metal nanoparticles (NPs) have attracted increasing attention as a promising tool to fight against resistant infections. In this research, we explore bimetallic NPs, as they can give rise to further and improved physicochemical and biological properties. In this work, monometallic Cu/CuO and Pd NPs were synthesized by laser ablation. Afterwards, these NPs were mixed and the resulting colloidal solution was multiply re-irradiated with the aim of producing Pd/CuO bimetallic NPs. All the NPs presented rounded shape and crystalline microstructure. Although the re-irradiated NPs contained both precursor materials, all characterization techniques agreed on the occurrence of an intermetallic alloy of both materials, Cu<sub>3</sub>Pd, that is concluded to be formed as a consequence of the interaction between the laser beam and the mixture of monometallic NPs. With the objective of studying antimicrobial activity against <em>Staphylococcus aureus</em>, the CuO NPs, Pd NPs and Pd/CuO NPs were immobilized on the surface of titanium discs. Ion release was tracked during the first 24 h and cytotoxicity of the immobilized NPs was as well tested with HFF-1 human fibroblast cell line. Bimetallic Pd/CuO NPs showed a significant inhibitory effect on <em>S. aureus</em> and no toxic impact on fibroblasts.</div></div>","PeriodicalId":34303,"journal":{"name":"Applied Surface Science Advances","volume":"27 ","pages":"Article 100735"},"PeriodicalIF":7.5,"publicationDate":"2025-04-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143758951","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Surface properties of nanostructured alginate-based bioprinted patches

IF 7.5

Applied Surface Science Advances Pub Date : 2025-04-03 DOI: 10.1016/j.apsadv.2025.100739

Antonio de Nigris , Giuseppe Quero , Giuseppe Peter Vanoli , Luigi Ambrosone

{"title":"Surface properties of nanostructured alginate-based bioprinted patches","authors":"Antonio de Nigris , Giuseppe Quero , Giuseppe Peter Vanoli , Luigi Ambrosone","doi":"10.1016/j.apsadv.2025.100739","DOIUrl":"10.1016/j.apsadv.2025.100739","url":null,"abstract":"<div><div>Gels of alginate/poly-vinyl alcohol, alginate/poly-vinyl alcohol/indocyanine green freely dispersed and alginate/poly-vinyl alcohol/indocyanine green dispersed liposomes were used to bioprint three different patches. Scanning electron microscope images reveal that the crosslinking with calcium chloride has an effect on surface topography, which causes the formation of aggregates, pores and regular asperities. The atomic force microscopy analysis quantifies the pores distribution and measures surface rugosity. The number and surface area of pores is reduced for systems containing free dye and even more for dye-loaded liposomes. A finer scan on surface allowed for the characterization of liposome aggregations on the surface. Their dimensions are identical to those measured in the aqueous dispersions upstream. Furthermore, surface roughness of samples containing free and/or encapsulated dye is significantly reduced. Intrusive chemical species in the gel interact with the matrix and smooth the cross-linking contraction. Planarized measurement of the nanovesicles dimensions disclose that their shape and diameter are preserved, having a peak at 120 nm. Fibre optics reflectance spectra were performed to investigate the interactions between light and the surfaces of the patches. They reveal that liposomes protect the dye from light degradation and aggregation. Transmittance measurements were renormalized to calculate absorbance spectra and compare them with those in aqueous dispersion. Patches with liposomes containing the dye present classical sharp optical spectra centred at 800 nm, similar to the spectrum of a dye-loaded liposomal dispersion in water. Besides, the patch with dye freely dispersed is attenuated and enlarged, suggesting that the dye is forming less responsive stacks.</div></div>","PeriodicalId":34303,"journal":{"name":"Applied Surface Science Advances","volume":"27 ","pages":"Article 100739"},"PeriodicalIF":7.5,"publicationDate":"2025-04-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143758953","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Minimizing interfacial defects and enhancing hybrid oxidation in HfAlOx MIOS structures via In-Situ plasma treatment for enhancing electrical properties

IF 7.5

Applied Surface Science Advances Pub Date : 2025-03-28 DOI: 10.1016/j.apsadv.2025.100732

Zhao-Cheng Chen , Yu-Chi Chang , Sheng-Po Chang , Shoou-Jinn Chang

{"title":"Minimizing interfacial defects and enhancing hybrid oxidation in HfAlOx MIOS structures via In-Situ plasma treatment for enhancing electrical properties","authors":"Zhao-Cheng Chen , Yu-Chi Chang , Sheng-Po Chang , Shoou-Jinn Chang","doi":"10.1016/j.apsadv.2025.100732","DOIUrl":"10.1016/j.apsadv.2025.100732","url":null,"abstract":"<div><div>Ternary oxides have realized controllable dielectric constant and band gap (E<sub>g</sub>) and are widely applied in electronic devices. Unfortunately, defects in the insulating layer severely affect the electrical performance of the devices. In this research, metal-insulator-oxide semiconductor (MIOS) diodes were developed by introducing <em>in-situ</em> Ar/O<sub>2</sub> plasma treatment in the supercycle atomic layer deposition (ALD) process, for which high on/off ratios (>10<sup>4</sup>), low off-currents (10<sup>–9</sup> A cm<sup>-2</sup>), and breakdown voltages up to 12.4 V were obtained. The correlation of the sequence of <em>in-situ</em> plasma treatment on the oxygen-related bonding in HfAlOx thin films was confirmed by XPS analysis. Introducing <em>in-situ</em> plasma can effectively enhance the formation of metals with oxygen bonding while suppressing the content of defect states generated by oxygen vacancies in the films, to optimize the interfacial properties. Compared with the untreated device (HAO), the plasma treatment has reduced the hysteresis phenomenon, significantly improves the on/off ratio by about 1 order of magnitude, and increases the breakdown voltage by 42.5%. The suitable conduction mechanisms of HfAlOx based MSIM diodes and their corresponding energy band diagrams are schematized from the findings. The effects of <em>in-situ</em> plasma on MIOS structures have been demonstrated and expanded functionality has been provided for the development of microelectronic devices, energy-saving and power device applications.</div></div>","PeriodicalId":34303,"journal":{"name":"Applied Surface Science Advances","volume":"27 ","pages":"Article 100732"},"PeriodicalIF":7.5,"publicationDate":"2025-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143716091","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

The effect of copper additives on hybrid Zr-based chemical conversion coating morphology and chemical compositions

IF 7.5

Applied Surface Science Advances Pub Date : 2025-03-26 DOI: 10.1016/j.apsadv.2025.100726

Ankita Mohanty , Xiaoyang Liu , Cheng-Chu Chung , Donald Vonk , Kim Kisslinger , Xiao Tong , Andrew Kiss , Gary Halada , Stanislas Petrash , Kate Foster , Yu-chen Karen Chen-Wiegart

{"title":"The effect of copper additives on hybrid Zr-based chemical conversion coating morphology and chemical compositions","authors":"Ankita Mohanty , Xiaoyang Liu , Cheng-Chu Chung , Donald Vonk , Kim Kisslinger , Xiao Tong , Andrew Kiss , Gary Halada , Stanislas Petrash , Kate Foster , Yu-chen Karen Chen-Wiegart","doi":"10.1016/j.apsadv.2025.100726","DOIUrl":"10.1016/j.apsadv.2025.100726","url":null,"abstract":"<div><div>In the realm of corrosion protection, Zr-based conversion coatings offer an environmentally friendly, chromate-free alternative to conventional coating. This study uses advanced X-ray, electron microscopy and electrochemical testing techniques to better understand the impact of varying Cu²⁺ ion concentrations on the characteristics of Zr-based coatings on Fe substrates. Our findings demonstrate that within the tested conditions, higher Cu²⁺ additive concentrations at 40 ppm enhance surface characteristics, increasing stability towards anti-corrosion capability, particularly under NaCl treatment. Conversely, at a lower Cu²⁺ concentration of 20 ppm, coatings exhibited more significant dissolution of Cu clusters and increased vulnerability to chloride-induced degradation. X-ray photoelectron spectroscopy and synchrotron X-ray fluorescence (XRF) and X-ray absorption near edge structure (XANES) spectroscopy analyses revealed Cu²⁺ formation in Cu20, while Cu40 retained its metallic state (Cu⁰) with a slower reaction rate. Cu20 offers some protection but lacks durability, whereas in Cu40, lower I<sub>corr</sub>, and enhance corrosion resistance, making it ideal for protective coatings in salt-water environments. This study underscores the importance of balancing Cu²⁺ ions concentration in the coating solution to optimize performance, highlighting the role of Cu in enhancing both surface properties and long-term stability.</div></div>","PeriodicalId":34303,"journal":{"name":"Applied Surface Science Advances","volume":"27 ","pages":"Article 100726"},"PeriodicalIF":7.5,"publicationDate":"2025-03-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143697253","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

The impact of surface cracks and surface roughness in the performance of hard chromium coatings in cold rolling applications

IF 7.5

Applied Surface Science Advances Pub Date : 2025-03-24 DOI: 10.1016/j.apsadv.2025.100738

Zahra Ranjbar-Nouri , David Matthews , Henk Bolt , Matthijn de Rooij

{"title":"The impact of surface cracks and surface roughness in the performance of hard chromium coatings in cold rolling applications","authors":"Zahra Ranjbar-Nouri , David Matthews , Henk Bolt , Matthijn de Rooij","doi":"10.1016/j.apsadv.2025.100738","DOIUrl":"10.1016/j.apsadv.2025.100738","url":null,"abstract":"<div><div>Hard chrome plating is widely utilized in industrial applications due to its high hardness, wear resistance, corrosion resistance, and low friction. However, the mechanisms responsible for its exceptional tribological performance and strip cleanliness in cold rolling remain insufficiently understood, posing a challenge to the development of viable alternatives. To design future effective alternatives, it is crucial to first comprehend why chromium coatings are so effective. This study investigates the effect of hard chromium plating on steel surface topography and its correlation with lubrication performance in cold rolling applications using oil-in-water emulsions. Optical microscopy, scanning electron microscopy (SEM), confocal microscopy, and atomic force microscopy (AFM) are employed to analyze the microstructural and topological characteristics of chrome-plated surfaces. The findings challenge the conventional assumption that surface cracks in hard chrome coatings can serve as oil reservoirs that would significantly enhance lubrication in the roll bite of a cold rolling mill with the help of exact crack width measurement and plate out test. Additionally, Power Spectral Density (PSD) analysis indicates that chrome plating reduces high-frequency roughness while preserving average roughness and larger wavelength features. Dynamic surface wetting experiments using a state-of-the-art droplet analyzer link this reduction in high-frequency roughness to enhanced wettability and faster lubricant spreading on chrome-plated surfaces compared to uncoated steel. These findings highlight the critical role of surface topography in lubrication performance and provide valuable insights to guide the development of future alternatives to hard chrome plating in cold rolling applications.</div></div>","PeriodicalId":34303,"journal":{"name":"Applied Surface Science Advances","volume":"27 ","pages":"Article 100738"},"PeriodicalIF":7.5,"publicationDate":"2025-03-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143681970","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Advanced surface engineering of TZO nanostructures via irradiation technique for enhanced nitric oxide (NO) gas sensitivity

IF 7.5

Applied Surface Science Advances Pub Date : 2025-03-24 DOI: 10.1016/j.apsadv.2025.100736

Gani Yergaliuly , Abylay Tangirbergen , Almagul Mentbayeva , Nurlan Amangeldi , Marat Kaikanov , Selim Acar , Zhumabay Bakenov , Baktiyar Soltabayev

{"title":"Advanced surface engineering of TZO nanostructures via irradiation technique for enhanced nitric oxide (NO) gas sensitivity","authors":"Gani Yergaliuly , Abylay Tangirbergen , Almagul Mentbayeva , Nurlan Amangeldi , Marat Kaikanov , Selim Acar , Zhumabay Bakenov , Baktiyar Soltabayev","doi":"10.1016/j.apsadv.2025.100736","DOIUrl":"10.1016/j.apsadv.2025.100736","url":null,"abstract":"<div><div>This manuscript investigates the enhancement of gas sensing properties of titanium-doped zinc oxide (TZO) nanostructures using intense pulsed ion beam irradiation (IPIB). TZO nanostructures synthesized using the sequential ion-layer adsorption and reaction (SILAR) method were subjected to two different treatments: thermal annealing at 500 °C under nitrogen atmosphere and IPIB. The study investigates the morphological, structural, optical, electrical, and gas-sensing properties of TZO with a focus on the sensitivity and selectivity to nitrogen monoxide (NO) and other gases. The results show that both annealed (<em>a</em>TZO) and irradiated (<em>i</em>TZO) nanofilms exhibit enhanced root-mean-square (RMS) roughness, resulting in improved gas sensing performance. IPIB irradiation induced significant lattice distortions and defects, which played a critical role in the dramatic performance improvement of the <em>i</em>TZO sensors. In particular, <em>i</em>TZO demonstrated a remarkable 1300 % improvement in response to 100 ppm NO at 200 °C. Furthermore, Density Functional Theory (DFT) results revealed that NO gas exhibited a moderate adsorption energy on defective TZO material compared to pristine TZO. This research demonstrates the effectiveness of IPIB irradiation in improving TZO-based gas sensors, suggesting potential for environmental monitoring and industrial applications. Future studies may explore the scalability of this technique and its application to other metal oxide semiconductors to develop advanced gas sensors.</div></div>","PeriodicalId":34303,"journal":{"name":"Applied Surface Science Advances","volume":"27 ","pages":"Article 100736"},"PeriodicalIF":7.5,"publicationDate":"2025-03-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143681971","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Bioactive glass and iron oxide nanoparticle composite coatings for Ti-6Al-4V implants: Microstructure, corrosion behavior, bioactivity and cellular response

IF 7.5

Applied Surface Science Advances Pub Date : 2025-03-24 DOI: 10.1016/j.apsadv.2025.100734

Zahra Sohani, Hamed Jamshidi Aval, Sayed Mahmood Rabiee

{"title":"Bioactive glass and iron oxide nanoparticle composite coatings for Ti-6Al-4V implants: Microstructure, corrosion behavior, bioactivity and cellular response","authors":"Zahra Sohani, Hamed Jamshidi Aval, Sayed Mahmood Rabiee","doi":"10.1016/j.apsadv.2025.100734","DOIUrl":"10.1016/j.apsadv.2025.100734","url":null,"abstract":"<div><div>The Ti-6Al-4V alloy is widely recognized for its excellent properties, such as biocompatibility, corrosion resistance, and high mechanical strength, making it a popular choice for medical implants. This study focuses on the development of a composite coating consisting of bioactive glass (64SiO₂-31CaO-5P₂O₅ mol%) and Fe₃O₄ nanoparticles, with a 5 wt% concentration, applied to the Ti-6Al-4V alloy through electrophoretic deposition. The investigation examined various characteristics, including the morphology, surface roughness, thickness, electrochemical behavior, wettability, and biological properties such as bioactivity, cell adhesion, and cytotoxicity of the samples. Scanning electron microscopy (SEM) analysis revealed that the average size of the bioactive glass particles was 3.06 ± 1.64 µm, which is suitable for the electrophoretic deposition process. The findings show that the addition of iron oxide nanoparticles improves the corrosion resistance of the substrate. To assess bioactivity, the samples were immersed in simulated body fluid (SBF) for 7, 14, and 28 days. SEM images and elemental distribution maps showed the presence of calcium and phosphorus on the surface, which is indicative of bioactive behavior. Moreover, the sample containing Fe₃O₄ nanoparticles exhibited significant increases in surface roughness and hydrophilicity, which enhanced cell adhesion. Interestingly, cell viability decreased within 3 days for the composite sample of bioactive glass with 5 wt% Fe₃O₄ nanoparticles, whereas the sample coated with bioactive glass alone (without iron oxide nanoparticles) showed favorable cell viability.</div></div>","PeriodicalId":34303,"journal":{"name":"Applied Surface Science Advances","volume":"27 ","pages":"Article 100734"},"PeriodicalIF":7.5,"publicationDate":"2025-03-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143681991","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Rapid cooling process-driven enhancement of an orthorhombic phase in ferroelectric HfZrOx of sub-3 nm ultrathin films by atomic layer deposition

IF 7.5

Applied Surface Science Advances Pub Date : 2025-03-23 DOI: 10.1016/j.apsadv.2025.100728

So Yeon Shin , Yeon-Je Yu , Ae Rim Choi , Dohee Kim , Ja-Yong Kim , Seung Wook Ryu , Il-Kwon Oh

{"title":"Rapid cooling process-driven enhancement of an orthorhombic phase in ferroelectric HfZrOx of sub-3 nm ultrathin films by atomic layer deposition","authors":"So Yeon Shin , Yeon-Je Yu , Ae Rim Choi , Dohee Kim , Ja-Yong Kim , Seung Wook Ryu , Il-Kwon Oh","doi":"10.1016/j.apsadv.2025.100728","DOIUrl":"10.1016/j.apsadv.2025.100728","url":null,"abstract":"<div><div>In recent decades, fluorite-structured HfZrO<sub>x</sub> (HZO) has been spotlighted as a promising ferroelectric material for next-generation non-volatile memory devices. On an ultrathin scale, HZO thin films face challenges in the phase transformation to an orthorhombic (111) structure for ferroelectric properties. The thermal energy governs the crystallinity of the ferroelectric HZO thin films during atomic layer deposition (ALD) process and post-annealing. Together with the post-metallization annealing (PMA) process, the most common method for enhancing and transforming ferroelectric properties, we determined that the cooling process after PMA is also crucial. In this study, two different cooling processes with -1.5 and -13.3 °C/s for TiN/HZO/TiN structure were conducted after the PMA process. At higher cooling rates, the crystallinity of the HZO, especially that of the orthorhombic (111) phase, dramatically improved. To further improve the crystallinity of the HZO films, the choice of precursors (Hf and Zr) and oxidants was studied. These results suggest that the cooling rate is an additional significant factor in controlling the crystallinity of HZO thin films and that rapid cooling could play a key role in ultrathin (< 5 nm) HZO thin films.</div></div>","PeriodicalId":34303,"journal":{"name":"Applied Surface Science Advances","volume":"27 ","pages":"Article 100728"},"PeriodicalIF":7.5,"publicationDate":"2025-03-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143681972","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Enhancement of electrical properties of morphotropic phase boundary in Hf1-xZrxO2 films by integrating Mo electrode and TiN interlayer for DRAM capacitors

IF 7.5

Applied Surface Science Advances Pub Date : 2025-03-19 DOI: 10.1016/j.apsadv.2025.100733

Ju Yong Park , Hyojun Choi , Jaewook Lee , Kun Yang , Sun Young Lee , Dong In Han , Intak Jeon , Chang Hwa Jung , Hanjin Lim , Woongkyu Lee , Min Hyuk Park

{"title":"Enhancement of electrical properties of morphotropic phase boundary in Hf1-xZrxO2 films by integrating Mo electrode and TiN interlayer for DRAM capacitors","authors":"Ju Yong Park , Hyojun Choi , Jaewook Lee , Kun Yang , Sun Young Lee , Dong In Han , Intak Jeon , Chang Hwa Jung , Hanjin Lim , Woongkyu Lee , Min Hyuk Park","doi":"10.1016/j.apsadv.2025.100733","DOIUrl":"10.1016/j.apsadv.2025.100733","url":null,"abstract":"<div><div>Molybdenum is considered a promising electrode material for Hf<sub>1-x</sub>Zr<sub>x</sub>O<sub>2</sub> films owing to its enhancing impact on ferroelectricity and dielectric constant. However, it poses significant limitations, such as high leakage current density and low endurance, which must be addressed to ensure its applicability in Hf<sub>1-x</sub>Zr<sub>x</sub>O<sub>2</sub>-based memories. The insertion of a TiN interlayer has been proven to effectively reduce the oxidation of a Mo electrode and suppress the formation of oxygen vacancies in Hf<sub>1-x</sub>Zr<sub>x</sub>O<sub>2</sub> films, as confirmed by transmission electron microscopy (TEM) and X-ray photoelectron spectroscopy (XPS) studies. An optimized 6 nm-thick Hf<sub>0.3</sub>Zr<sub>0.7</sub>O<sub>2</sub> film with a TiN interlayer exhibited a leakage current density below 10<sup>–7</sup> A/cm² at 0.8 V and an equivalent oxide thickness of 0.49 nm, demonstrating its suitability for cell capacitors in dynamic random-access-memories (DRAM).</div></div>","PeriodicalId":34303,"journal":{"name":"Applied Surface Science Advances","volume":"27 ","pages":"Article 100733"},"PeriodicalIF":7.5,"publicationDate":"2025-03-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"143682074","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0