ACS Materials Au最新文献

{"title":"Impact of Nickel on Iridium–Ruthenium Structure and Activity for the Oxygen Evolution Reaction under Acidic Conditions","authors":"Erlend Bertheussen,&nbsp;Simon Pitscheider,&nbsp;Susan R. Cooper,&nbsp;Rebecca Pittkowski,&nbsp;Katrine L. Svane,&nbsp;Aline Bornet,&nbsp;Erik M. Wisaeus,&nbsp;Kirsten M. Ø. Jensen,&nbsp;Jan Rossmeisl,&nbsp;Matthias Arenz,&nbsp;Christian Kallesøe and Christoffer M. Pedersen*,&nbsp;","doi":"10.1021/acsmaterialsau.4c0002510.1021/acsmaterialsau.4c00025","DOIUrl":"https://doi.org/10.1021/acsmaterialsau.4c00025https://doi.org/10.1021/acsmaterialsau.4c00025","url":null,"abstract":"<p >Proton exchange membrane water electrolysis (PEMWE) is a promising technology to produce hydrogen directly from renewable electricity sources due to its high power density and potential for dynamic operation. Widespread application of PEMWE is, however, currently limited due to high cost and low efficiency, for which high loading of expensive iridium catalyst and high OER overpotential, respectively, are important reasons. In this study, we synthesize highly dispersed IrRu nanoparticles (NPs) supported on antimony-doped tin oxide (ATO) to maximize catalyst utilization. Furthermore, we study the effect of adding various amounts of Ni to the synthesis, both in terms of catalyst structure and OER activity. Through characterization using various X-ray techniques, we determine that the presence of Ni during synthesis yields significant changes in the structure of the IrRu NPs. With no Ni present, metallic IrRu NPs were synthesized with Ir-like structure, while the presence of Ni leads to the formation of IrRu oxide particles with rutile/hollandite structure. There are also clear indications that the presence of Ni yields smaller particles, which can result in better catalyst dispersion. The effect of these differences on OER activity was also studied through rotating disc electrode measurements. The IrRu-supported catalyst synthesized with Ni exhibited OER activity of up to 360 mA mg_PGM^–1 at 1.5 V vs RHE. This is ∼7 times higher OER activity than the best-performing IrO_<i>x</i> benchmark reported in the literature and more than twice the activity of IrRu-supported catalyst synthesized without Ni. Finally, density functional theory (DFT) calculations were performed to further elucidate the origin of the observed activity enhancement, showing no improvement in intrinsic OER activity for hollandite Ir and Ru compared to the rutile structures. We, therefore, hypothesize that the increased activity measured for the IrRu supported catalyst synthesized with Ni present is instead due to increased electrochemical surface area.</p>","PeriodicalId":29798,"journal":{"name":"ACS Materials Au","volume":"4 5","pages":"512–522 512–522"},"PeriodicalIF":5.7,"publicationDate":"2024-06-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://pubs.acs.org/doi/epdf/10.1021/acsmaterialsau.4c00025","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142161258","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"In Vivo Assessment of a Triple Periodic Minimal Surface Based Biomimmetic Gyroid as an Implant Material in a Rabbit Tibia Model","authors":"Pearlin Amaan Khan,&nbsp;Ansheed Raheem,&nbsp;Cheirmadurai Kalirajan,&nbsp;Konda Gokuldoss Prashanth and Geetha Manivasagam*,&nbsp;","doi":"10.1021/acsmaterialsau.4c0001610.1021/acsmaterialsau.4c00016","DOIUrl":"https://doi.org/10.1021/acsmaterialsau.4c00016https://doi.org/10.1021/acsmaterialsau.4c00016","url":null,"abstract":"<p >Biomimetic approaches to implant construction are a rising frontier in implantology. Triple Periodic Minimal Surface (TPMS)-based additively manufactured gyroid structures offer a mean curvature of zero, rendering this structure an ideal porous architecture. Previous studies have demonstrated the ability of these structures to effectively mimic the mechanical cues required for optimal implant construction. The porous nature of gyroid materials enhances bone ingrowth, thereby improving implant stability within the body. This enhancement is attributed to the increased surface area of the gyroid structure, which is approximately 185% higher than that of a dense material of the same form factor. This larger surface area allows for enhanced cellular attachment and nutrient circulation facilitated by the porous channels. This study aims to evaluate the biological performance of a gyroid-based Ti6Al-4V implant material compared to a dense alloy counterpart. Cellular viability was assessed using the lactate dehydrogenase (LDH) assay, which demonstrated that the gyroid surface allowed marginally higher viability than dense material. The <i>in vivo</i> integration was studied over 6 weeks using a rabbit tibia model and characterized using X-ray, micro-CT, and histopathological examination. With a metal volume of 8.1%, the gyroid exhibited a bone volume/total volume (BV/TV) ratio of 9.6%, which is 11-fold higher than that of dense metal (0.8%). Histological assessments revealed neovascularization, in-bone growth, and the presence of a Haversian system in the gyroid structure, hinting at superior osteointegration.</p>","PeriodicalId":29798,"journal":{"name":"ACS Materials Au","volume":"4 5","pages":"479–488 479–488"},"PeriodicalIF":5.7,"publicationDate":"2024-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://pubs.acs.org/doi/epdf/10.1021/acsmaterialsau.4c00016","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142161257","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Electrocatalytic and Selective Oxidation of Glycerol to Formate on 2D 3d-Metal Phosphate Nanosheets and Carbon-Negative Hydrogen Generation","authors":"Inderjeet Chauhan,&nbsp;Pothoppurathu M. Vijay,&nbsp;Ravi Ranjan,&nbsp;Kshirodra Kumar Patra and Chinnakonda S. Gopinath*,&nbsp;","doi":"10.1021/acsmaterialsau.4c0002410.1021/acsmaterialsau.4c00024","DOIUrl":"https://doi.org/10.1021/acsmaterialsau.4c00024https://doi.org/10.1021/acsmaterialsau.4c00024","url":null,"abstract":"<p >In the landscape of green hydrogen production, alkaline water electrolysis is a well-established, yet not-so-cost-effective, technique due to the high overpotential requirement for the oxygen evolution reaction (OER). A low-voltage approach is proposed to overcome not only the OER challenge by favorably oxidizing abundant feedstock molecules with an earth-abundant catalyst but also to reduce the energy input required for hydrogen production. This alternative process not only generates carbon-negative green H₂ but also yields concurrent value-added products (VAPs), thereby maximizing economic advantages and transforming waste into valuable resources. The essence of this study lies in a novel electrocatalyst material. In the present study, unique and two-dimensional (2D) ultrathin nanosheet phosphates featuring first-row transition metals are synthesized by a one-step solvothermal method, and evaluated for the electrocatalytic glycerol oxidation reaction (GLYOR) in an alkaline medium and simultaneous H₂ production. Co₃(PO₄)₂ (CoP), Cu₃(PO₄)₂ (CuP), and Ni₃(PO₄)₂ (NiP) exhibit 2D sheet morphologies, while FePO₄ (FeP) displays an entirely different snowflake-like morphology. The 2D nanosheet morphology provides a large surface area and a high density of active sites. As a GLYOR catalyst, CoP ultrathin (∼5 nm) nanosheets exhibit remarkably low onset potential at 1.12 V (vs RHE), outperforming that of NiP, FeP, and CuP around 1.25 V (vs RHE). CoP displays 82% selective formate production, indicating a superior capacity for C–C cleavage and concurrent oxidation; this property could be utilized to valorize larger molecules. CoP also exhibits highly sustainable electrochemical stability for a continuous 200 h GLYOR operation, yielding 6.5 L of H₂ production with a 4 cm² electrode and 98 ± 0.5% Faradaic efficiency. The present study advances our understanding of efficient GLYOR catalysts and underscores the potential of sustainable and economically viable green hydrogen production methodologies.</p>","PeriodicalId":29798,"journal":{"name":"ACS Materials Au","volume":"4 5","pages":"500–511 500–511"},"PeriodicalIF":5.7,"publicationDate":"2024-06-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://pubs.acs.org/doi/epdf/10.1021/acsmaterialsau.4c00024","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142161259","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Electrocatalytic and Selective Oxidation of Glycerol to Formate on 2D 3d-Metal Phosphate Nanosheets and Carbon-Negative Hydrogen Generation","authors":"Inderjeet Chauhan, Pothoppurathu M. Vijay, Ravi Ranjan, Kshirodra Kumar Patra, Chinnakonda S. Gopinath","doi":"10.1021/acsmaterialsau.4c00024","DOIUrl":"https://doi.org/10.1021/acsmaterialsau.4c00024","url":null,"abstract":"In the landscape of green hydrogen production, alkaline water electrolysis is a well-established, yet not-so-cost-effective, technique due to the high overpotential requirement for the oxygen evolution reaction (OER). A low-voltage approach is proposed to overcome not only the OER challenge by favorably oxidizing abundant feedstock molecules with an earth-abundant catalyst but also to reduce the energy input required for hydrogen production. This alternative process not only generates carbon-negative green H₂ but also yields concurrent value-added products (VAPs), thereby maximizing economic advantages and transforming waste into valuable resources. The essence of this study lies in a novel electrocatalyst material. In the present study, unique and two-dimensional (2D) ultrathin nanosheet phosphates featuring first-row transition metals are synthesized by a one-step solvothermal method, and evaluated for the electrocatalytic glycerol oxidation reaction (GLYOR) in an alkaline medium and simultaneous H₂ production. Co₃(PO₄)₂ (CoP), Cu₃(PO₄)₂ (CuP), and Ni₃(PO₄)₂ (NiP) exhibit 2D sheet morphologies, while FePO₄ (FeP) displays an entirely different snowflake-like morphology. The 2D nanosheet morphology provides a large surface area and a high density of active sites. As a GLYOR catalyst, CoP ultrathin (∼5 nm) nanosheets exhibit remarkably low onset potential at 1.12 V (vs RHE), outperforming that of NiP, FeP, and CuP around 1.25 V (vs RHE). CoP displays 82% selective formate production, indicating a superior capacity for C–C cleavage and concurrent oxidation; this property could be utilized to valorize larger molecules. CoP also exhibits highly sustainable electrochemical stability for a continuous 200 h GLYOR operation, yielding 6.5 L of H₂ production with a 4 cm² electrode and 98 ± 0.5% Faradaic efficiency. The present study advances our understanding of efficient GLYOR catalysts and underscores the potential of sustainable and economically viable green hydrogen production methodologies.","PeriodicalId":29798,"journal":{"name":"ACS Materials Au","volume":"45 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-06-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"141258181","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Plasmonic Characterization of 3D Printable Metal–Polymer Nanocomposites","authors":"María de la Mata*,&nbsp;Albeto Sanz de León,&nbsp;Luisa M. Valencia-Liñán and Sergio I. Molina,&nbsp;","doi":"10.1021/acsmaterialsau.4c00007","DOIUrl":"10.1021/acsmaterialsau.4c00007","url":null,"abstract":"<p >Plasmonic polymer nanocomposites (i.e., polymer matrices containing plasmonic nanostructures) are appealing candidates for the development of manifold technological devices relying on light–matter interactions, provided that they have inherent properties and processing capabilities. The smart development of plasmonic nanocomposites requires in-depth optical analyses proving the material performance, along with correlative studies guiding the synthesis of tailored materials. Importantly, plasmon resonances emerging from metal nanoparticles affect the macroscopic optical response of the nanocomposite, leading to far- and near-field perturbations useful to address the optical activity of the material. We analyze the plasmonic behavior of two nanocomposites suitable for 3D printing, based on acrylic resin matrices loaded with Au or Ag nanoparticles. We compare experimental and computed UV–vis macroscopic spectra (far-field) with single-particle electron energy loss spectroscopy (EELS) analyses (near-field). We extended the calculations of Au and Ag plasmon-related resonances over different environments and nanoparticle sizes. Discrepancies between UV–vis and EELS are dependent on the interplay between the metal considered, the surrounding media, and the size of the nanoparticles. The study allows comparing in detail the plasmonic performance of Au- and Ag-polymer nanocomposites, whose plasmonic response is better addressed, accounting for their intended applications (i.e., whether they rely on far- or near-field interactions).</p>","PeriodicalId":29798,"journal":{"name":"ACS Materials Au","volume":"4 4","pages":"424–435"},"PeriodicalIF":5.7,"publicationDate":"2024-05-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://pubs.acs.org/doi/epdf/10.1021/acsmaterialsau.4c00007","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140972740","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Neutron Reflectivity in Corrosion Research on Metals","authors":"Maths Karlsson*,&nbsp;Lars-Gunnar Johansson,&nbsp;Laura Mazzei,&nbsp;Jan Froitzheim and Max Wolff,&nbsp;","doi":"10.1021/acsmaterialsau.4c00011","DOIUrl":"10.1021/acsmaterialsau.4c00011","url":null,"abstract":"<p >Neutron reflectivity (NR) is potentially a powerful tool for characterizing chemical and morphological changes in thin films and at buried interfaces in corrosion science. While the scope of NR is limited by its inherent demands for low surface roughness and high sample planarity, these drawbacks are compensated for by the unique ability to detect light elements and distinguish between isotopes. Furthermore, the generally weak absorption of neutrons by matter allows the use of bulky sample environments and <i>in situ</i> experiments. In particular, the layer thickness range of 3–100 nm accessible by NR is appropriate for studying air-formed films and passive films, which are crucial for the ability of metallic materials to resist corrosion, as well as for investigating the interaction of metal surfaces with hydrogen and its compounds, <i>e.g.</i>, water. Also, NR is suitable for studying early stages of oxide growth on metals at high temperature, including the transition from Cabrera–Mott-type films to Wagner-type growth. Here, we outline key characteristics of NR as applied to the study of corrosion of metals, exemplified by earlier work, and discuss perspectives for future work in the field. The aim of our work is to stimulate the application of the unique capabilities of NR to corrosion science.</p>","PeriodicalId":29798,"journal":{"name":"ACS Materials Au","volume":"4 4","pages":"346–353"},"PeriodicalIF":5.7,"publicationDate":"2024-04-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://pubs.acs.org/doi/epdf/10.1021/acsmaterialsau.4c00011","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140595056","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Sensitive, Stable, and Recyclable ZnO/Ag Nanohybrid Substrates for Surface-Enhanced Raman Scattering Metrology","authors":"Samriti,&nbsp;Promod Kumar,&nbsp;A. Yu. Kuznetsov*,&nbsp;H. C. Swart and Jai Prakash*,&nbsp;","doi":"10.1021/acsmaterialsau.4c00002","DOIUrl":"10.1021/acsmaterialsau.4c00002","url":null,"abstract":"<p >Surface-enhanced Raman scattering is a practical, noninvasive spectroscopic technique that measures chemical fingerprints for varieties of molecules in multiple applications. However, synthesizing appropriate substrates for practical, long-term applications of this method has always been a challenging task. In the present study, we show that ZnO/Ag nanohybrid substrates may act as highly stable, sensitive, and recyclable substrates for surface-enhanced Raman scattering, as illustrated by the detection of methylene blue, selected as a test dye molecule with self-cleaning functionalities. Specifically, we demonstrate the detection enhancement factor of 3.7 × 10⁷ along with exceptional long-term stability explained in terms of the localized surface plasmon resonance from the Ag nanocrystals embedded into the chemically inert ZnO nanoparticles, constituting the nanohybrid. Significantly, these substrates can be efficiently cleaned and regenerated while maintaining their high performance upon recycling. As a result, using these substrates, up to 10^–12 M detection sensitivity has been demonstrated, enabling the accuracy required in modern environmental monitoring, bioassays, and analytical chemistry. Thus, ZnO nanoparticles with embedded Ag nanocrystals constitute a novel class of advanced nanohybrid substrates for use in multiple applications of surface-enhanced Raman scattering metrology.</p>","PeriodicalId":29798,"journal":{"name":"ACS Materials Au","volume":"4 4","pages":"413–423"},"PeriodicalIF":5.7,"publicationDate":"2024-04-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://pubs.acs.org/doi/epdf/10.1021/acsmaterialsau.4c00002","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140595302","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Mode III Tear Resistance of Bombyx mori Silk Cocoons","authors":"Ateeq Ur Rehman,&nbsp;Vasileios Koutsos and Parvez Alam*,&nbsp;","doi":"10.1021/acsmaterialsau.4c00001","DOIUrl":"10.1021/acsmaterialsau.4c00001","url":null,"abstract":"<p >This paper concerns the tear properties and behavior of <i>Bombyx mori</i> (<i>B. Mori</i>) silk cocoons. The tear resistance of cocoon layers is found to increase progressively from the innermost layer to the outermost layer. Importantly, the increase in tear strength correlates with increased porosity, which itself affects fiber mobility. We propose a microstructural mechanism for tear failure, which begins with fiber stretching and sliding, leading to fiber piling, and eventuating in fiber fracture. The direction of fracture is then deemed to be a function of the orientation of piled fibers, which is influenced by the presence of junctions where fibers cross at different angles and which may then act as nucleating sites for fiber piling. The interfaces between cocoon wall layers in <i>B. mori</i> cocoon walls account for 38% of the total wall tear strength. When comparing the tear energies and densities of <i>B. mori</i> cocoon walls against other materials, we find that the <i>B. mori</i> cocoon walls exhibit a balanced trade-off between tear resistance and lightweightness.</p>","PeriodicalId":29798,"journal":{"name":"ACS Materials Au","volume":"4 4","pages":"403–412"},"PeriodicalIF":5.7,"publicationDate":"2024-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://pubs.acs.org/doi/epdf/10.1021/acsmaterialsau.4c00001","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140324945","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Multinuclear Tin-Based Macrocyclic Organometallic Resist for EUV Photolithography","authors":"Gayoung Lim,&nbsp;Kangsik Lee,&nbsp;Chawon Koh,&nbsp;Tsunehiro Nishi and Hyo Jae Yoon*,&nbsp;","doi":"10.1021/acsmaterialsau.4c0001010.1021/acsmaterialsau.4c00010","DOIUrl":"https://doi.org/10.1021/acsmaterialsau.4c00010https://doi.org/10.1021/acsmaterialsau.4c00010","url":null,"abstract":"<p >We report a new photoresist based on a multinuclear tin-based macrocyclic complex and its performance for extreme UV (EUV) photolithography. The new photoresist has a trinuclear macrocyclic structure containing three salicylhydroxamic acid ligands and six Sn–CH₃ bonds, which was confirmed by multinuclear nuclear magnetic resonance (NMR) and FT-IR spectroscopies and single-crystal X-ray diffraction study. The resist exhibited good humidity, air, and thermal stabilities, while showing good photochemical reactivity. Photochemical cross-linking of the resist was confirmed by X-ray photoelectron and solid-state NMR spectroscopic analyses. EUV photolithography with the 44 nm-thick film on a silicon wafer revealed a line-edge-roughness (LER) of 1.1 nm in a 20 nm half-pitch pattern. The <i>Z</i>-factor, a metric that gauges the performance of photoresists by considering the tradeoff between resolution, LER, and sensitivity (RLS), was estimated to be 1.28 × 10^–8 mJ·nm³, indicating its great performance compared to the EUV photoresists reported in the literature.</p>","PeriodicalId":29798,"journal":{"name":"ACS Materials Au","volume":"4 5","pages":"468–478 468–478"},"PeriodicalIF":5.7,"publicationDate":"2024-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"https://pubs.acs.org/doi/epdf/10.1021/acsmaterialsau.4c00010","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"142161261","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"OA","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Multinuclear Tin-Based Macrocyclic Organometallic Resist for EUV Photolithography","authors":"Gayoung Lim, Kangsik Lee, Chawon Koh, Tsunehiro Nishi, Hyo Jae Yoon","doi":"10.1021/acsmaterialsau.4c00010","DOIUrl":"https://doi.org/10.1021/acsmaterialsau.4c00010","url":null,"abstract":"We report a new photoresist based on a multinuclear tin-based macrocyclic complex and its performance for extreme UV (EUV) photolithography. The new photoresist has a trinuclear macrocyclic structure containing three salicylhydroxamic acid ligands and six Sn–CH₃ bonds, which was confirmed by multinuclear nuclear magnetic resonance (NMR) and FT-IR spectroscopies and single-crystal X-ray diffraction study. The resist exhibited good humidity, air, and thermal stabilities, while showing good photochemical reactivity. Photochemical cross-linking of the resist was confirmed by X-ray photoelectron and solid-state NMR spectroscopic analyses. EUV photolithography with the 44 nm-thick film on a silicon wafer revealed a line-edge-roughness (LER) of 1.1 nm in a 20 nm half-pitch pattern. The <i>Z</i>-factor, a metric that gauges the performance of photoresists by considering the tradeoff between resolution, LER, and sensitivity (RLS), was estimated to be 1.28 × 10^–8 mJ·nm³, indicating its great performance compared to the EUV photoresists reported in the literature.","PeriodicalId":29798,"journal":{"name":"ACS Materials Au","volume":"33 1","pages":""},"PeriodicalIF":0.0,"publicationDate":"2024-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"140311928","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}