Proceedings IEEE Micro Electro Mechanical Systems. 1995最新文献

{"title":"Fabrication of giant magnetostrictive thin film actuators","authors":"E. Quandt, K. Seemann","doi":"10.1109/MEMSYS.1995.472535","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472535","url":null,"abstract":"Sputterdeposited magnetostrictive films present an interesting opportunity to realize actuators in microsystems as they offer features like contactless, high frequency operation, simple actuator designs and a cost-effective manufacturing technique. Amorphous magnetostrictive films of the binary compound SmFe as well as of the ternary compound TbDyFe were prepared by d.c. magnetron sputtering using either a multitarget arrangement with pure element targets or cast composite-type targets. Depending upon the composition and the sputtering conditions, particulary upon the BIAS voltage, amorphous films with a giant magnetostriction of about 250 ppm (-220 ppm) at 0.1 T and 400 ppm (-300 ppm) at 0.5 T for the TbDyFe (SmFe) and an adjustable magnetic easy axis could be prepared. In view of applications in microsystem technologies (e.g. pumps, valves, positioning elements) these films have been tested in cantilever or membrane arrangements. The design of the actuators, such as the lateral patterning of the magnetostrictive films, have been modulated by means of fmite element calculations. For double clamped beams or clamped membranes, these calculations revealed that lateral patteming of the magnetostrictive films is essential in order to obtain large deflections.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114794265","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Novel functionality using micro-gaseous devices","authors":"H. Nathanson, I. Liberman, C. Freidhoff","doi":"10.1109/MEMSYS.1995.472551","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472551","url":null,"abstract":"Over the last twenty or so years, Westinghouse has sought to capitalize on the attractively-low cost of batch-fabricated micromechanical devices to achieve both military and commercial function that is small, light-weight and performs its intended application repeatedly and to specification. For example, micromechanical electron beam-addressed mirror cantilever matrixes have been explored as high resolution storage TV projection devices’; additionally, small cantilevers and airgaps were batch-fabricated and inserted into 10 GHz microstrip where they have served as one-time programmable switches for Microwave ASICS’, greatly increasing the RF yield of complex “wafer scale” GaAs transmitter arrays. Finally, the mechanical movement which can be achieved by electrostatic forces such as was key to the operation of the Resonant Gate Transistor3 and the Si/SiOz Mirror Matrix Display in reference 1 has fostered a variety of interesting electrostatic motors, electrostatic actuators and optical devices, including optical electrostatic deflectors and gratings.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128868366","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Piezoelectric composites for micro-ultrasonic transducers realized with deep-etch X-ray lithography","authors":"Y. Hirata, H. Okuyama, S. Ogino, T. Numazawa, H. Takada","doi":"10.1109/MEMSYS.1995.472581","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472581","url":null,"abstract":"PIEZOELECTRIC COMPOSITES FOR MICRO-ULTRASONIC TRANSDUCERS REALIZED WITH DEEP-ETCH X-RAY LITHOGRAPHY Yoshihiro Hirata, Hiroshi Okuyama, Seiji Ogino* Toshiyuki Numzawa and Hiroshi Takaah Harima Research Laboratories, Sumitomo Electric Industries, Ltd. 1431-12 Harima Science Garden City, Kamigori, Hyogo 678-12, Japan Piezoelectric ceramics/polymer composites have been developed for micro-ultrasonic transducers. These composites are made up of micro rods of lead zirconate titanate (PZT) ceramics with high aspect ratio (diameter: 17pm, height: up to 120pm, density: 1,700 rods/\"*). PZT rods were fabricated using deep-etch X-ray lithography, PZT slurry casting into a resist structure, plasma etching for resist removal, and sintering. Piezoelectric coefficient d , frequency constant N, and electromechanical coupling coefficient k of the composites were measured, and these composites were proven to have good piezoelectricity.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126273232","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"A micromachined vibrating gyroscope","authors":"Tanaka Katsuhiko, Y. Mochida, M. Sugimoto, Kazufumi Moriya, Tomoyasu Hasegawa, Ken-Ichi Atsuchi, Kuniki Ohwada","doi":"10.1109/MEMSYS.1995.472534","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472534","url":null,"abstract":"Abstract A vibrating microgyroscope with a thin polysilicon resonator fabricated by silicon surface micromachining is described. The 400 μm × 800 μm resonator is driven in a lateral direction by electrostatic force, and the angular rate is detected as the capacitance change between the resonator and its substrate. Mechanical Q -factors for the driving mode and the detecting mode of the polysilicon resonator are 2800 and 16 000, respectively, at pressures below 0.1 Pa. Methods are presented for modifying the difference between the resonance frequencies of the driving and detecting modes. The test device shows a noise-equivalent rate of 2° s −1 .","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114169096","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Microfiltration membrane sieve with silicon micromachining for industrial and biomedical applications","authors":"C. V. van Rijn, M. Elwenspoek","doi":"10.1109/MEMSYS.1995.472549","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472549","url":null,"abstract":"With the use of silicon micromachining an inorganic membrane sieve for microfiltration is constructed, having a siliconnitride membrane layer with thickness typically 1 pm and perforations typically between 0.5 pm and 10 pm in diameter. As a support a -silicon wafer with openings of loo0 pm in diameter is used. The thin siliconnitride layer is deposited on an initial dense support by means of a suitable Chemical Vapour Deposition method (LPCVD). Perforations in the membrane layer are obtained through the use of standard microlithography and reactive ion etching (RIE). The flow rate behaviour and the pressure strength of the membrane sieve are calculated in a first approximation. A process for manufacturing is presented and some industrial and biomedical applications are discussed. Introduction Sieve Filters Sieve filters are characterized by thin membrane layers with uniformly sized pores and for most applications the membrane layer is sustained by a support. Until now lithographic techniques have not been used for the construction of micro filtration membrane layers made of inorganic materials as siliconnitride and silicon1. Inorganic membrane and in particular ceramic membranes* have a number of advantages above polymeric membranes like high temperature stability, relative inert to chemicals, applicable at high pressures, easy to sterilize and recyclable. However they have not been used extensively because of their high costs and relatively poor control in pore size distribution. Also the effective membrane layer is very thick in comparison to the mean pore size (typically 50 -loo0 times), which resiluts in a reduced flow rate. A composite filtrationmembrane having a relatively thin filtration or sieving layer with a high pore density and a narrow pore size distribution on a macroporous support will show good separation behaviour and a high flow rate. The support contributes to the mechanical strength of the total composite membrane. The openings in the support should be made as large and numerous as possible in Handbook of Industrial Membrane Technology, LPorter, C.Mark and H.Strathmann, 1990 Ceramic Membranes Growth Prospects and Opportunities, K.K. Chan and A.M. Brownstein, Ceramic Bulletin, vol70, 703-707, 1991 order to maintain the flow rate of the membrane layer and to reduce the interaction of the support with the fluid. An established use of inorganic membranes with very thin membrane layers, in particular microsieves with high flow rates, will result in an energyand cost-saving separation technology for present and future innovative applications, like micro liquid handling, modular fluidic systems or micro total analysis systems3. 'Track etched' membrane t 1 0 'Tortuous path' membrane .. .:. . Pore size Density Log scale 1.0 2.0 5.0 10 2 0 . Pore size in micrometer Figure I , Pore size distribution of various membrane f i l t ers . New Membrane Materials and Processes: A Survey of Work in The Netherlands, C.A. Smolders in 'Membranes' O","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"98 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115934885","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Fluid micropumps based on rotary magnetic actuators","authors":"C. Ahn, M. Allen","doi":"10.1109/MEMSYS.1995.472590","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472590","url":null,"abstract":"A jet-type magnetically driven fluid micropump to drive conductive fluids has been designed, fabricated, and tested. The pump actuation is based on a rotary magnetic micromotor with fully integrated stator and coils operating with the rotor immersed in the fluid to be pumped, thereby driving the fluid from a inlet flow reservoir through integrated flow channels to an outlet flow reservoir. The micropump has been successfully driven using standard diabetic-prescription insulin in saline buffer (Novo Nordisk, Regular Insulin) as a working fluid, demonstrating the feasibility of a rotary micropump for pumping and injecting fluids in drug delivery or chemical flow systems. The attained flow rate varies monotonically with motor speed. In the realized micropump, the fluid flow rate achieved is up to 24 p!/min at a rotor speed of 5000 rpm. The operating voltage is less than 3 V and the power consbmption is approximately 0.5 W. The differential pressure is expected to be approximately 100 hPa.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127243328","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Trial production of medical micro-tool by metal deformation processes using moulds","authors":"I. Aoki, T. Takahashi, S. Mihara, Y. Yamagata, T. Higuchi","doi":"10.1109/MEMSYS.1995.472597","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472597","url":null,"abstract":"The medical field is a major area for the micro mechanical system. Research in the medical field has made remarkable progress, and one important requisite in order for people to reap the m a n y benefits of this is a stable and l o w cost supply of high precision medical device. The authors are attempting t o make a contribution toward addressing this issue by the development of new technology. Here, the targeted device is a pair of forceps f o r an endoscope. This is a micro-tool made of metal. Currently, a great deal of expense and long period of time are required t o manufacture these because complicated mechanical processing and manual operations are involved. The purpose of this research are: 1)to utilize moulds to a l l o w the stable manufacturing of high precision parts: and 2)to utilize moulds to make it easy t o assemble complicated parts. In particular, the assembly of micro-tool poses complicated problems, and overcoming them in a major issue.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127536686","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Diffraction grating scanners using polysilicon micromotors","authors":"A. A. Yasseen, S.W. Smith, M. Mehregany, F. Merat","doi":"10.1109/MEMSYS.1995.472584","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472584","url":null,"abstract":"This paper describes polysilicon micromotors with single and pyramidal diffraction grating elements fabricated on the polished surface of large-area rotors for optical scanning applications. While taking full advantage of planar processing, such scanners have high-quality scan profiles, good efficiency, meter working distances, and multiple out of plane beam diffraction orders. Chemical-mechanical polishing was used to reduce the 5-/spl mu/m-thick polysilicon rotors' average surface roughness from 420 /spl Aring/ to below 17 /spl Aring/, with less than 1500-/spl Aring/ film removal, improving the optical performance of the gratings as well as the definition, delineation, and side wall quality of the device features. Self-assembled monolayers (SAM) were found to improve the overall micromotor's dynamic performance. SAM-coated scanners could operate at voltages as low as 15 V and maximum operational speeds of 5200 rpm. The gratings were tested optically at 633-nm wavelength and were verified to have spatial periods of 1.80 and 3.86 /spl mu/m, closely matching their design values. Stepping and continuous mode dynamic operation of the scanners was demonstrated with visible diffraction orders at meter distances away.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"C-19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126771266","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Bulk silicon micro electro mechanical devices fabricated from commercial BESOI substrates","authors":"A. Benitez, J. Esteve, J. Bausells","doi":"10.1109/MEMSYS.1995.472591","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472591","url":null,"abstract":"A great number of micro electro mechanical (MEM) devices have been developed during the last decade. The fabrication of such devices is usually based in some kuid of surface micromachining technology, in which supporting sacrificial layers are removed to free the niicromechanical structures. Due to its technological compatibility with standard IC processing, polycrystalline silicon has been used as the device material for MEM devices such as beams [ 11, pin joints, cranks and sliders (21, gears [3], electrostatic micromotors [4] and electrostatic combdriven structures [SI. The standard chemical vapor deposition method for polysilicon limits the thickness of the microstructures to a few microns. However, for many kinds of microstructures a greater thickness is beneficial. These would include devices with its motion constrained to the plane parallel to the substrate. In that case the increased thickness increases the stiffness of the device in the direction perpendicular to the plane of motion. Also, for devices that use electrostatic attraction between sidewalls as the driving force, such as comb actuators aid micromotors, the increased thickness allows a greater driving power for a given voltage.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"76 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"117193280","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

{"title":"Effective methods to prevent stiction during post-release-etch processing","authors":"T. Abe, W. Messner, M. L. Reed","doi":"10.1109/MEMSYS.1995.472547","DOIUrl":"https://doi.org/10.1109/MEMSYS.1995.472547","url":null,"abstract":"The drying of rinse liquids after release-etch processing is analyzed and modeled. The model includes both Laplace pressure forces and surface tension forces. A full three dimensional Laplace equation is considered in the analysis. This model explains two distinct drying modes observed in silicon micromachining. According to the model, the shape of the microstructure periphery plays an important role in the drying process. A simple modification of the device design, which does involve any process changes, significantly improves release yields. We also found that stiction could be reduced significantly by rinsing and drying at elevated temperatures. Instability of trapped liquids under tension at high temperature may be a factor in reducing the stiction. Experimental results for both bulk micromachined cantilevered beams, and surface micromachined doubly clamped beams are presented.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127692498","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}