Y. Hirata, H. Okuyama, S. Ogino, T. Numazawa, H. Takada
{"title":"用深蚀刻x射线光刻技术实现微超声换能器用压电复合材料","authors":"Y. Hirata, H. Okuyama, S. Ogino, T. Numazawa, H. Takada","doi":"10.1109/MEMSYS.1995.472581","DOIUrl":null,"url":null,"abstract":"PIEZOELECTRIC COMPOSITES FOR MICRO-ULTRASONIC TRANSDUCERS REALIZED WITH DEEP-ETCH X-RAY LITHOGRAPHY Yoshihiro Hirata, Hiroshi Okuyama, Seiji Ogino* Toshiyuki Numzawa and Hiroshi Takaah Harima Research Laboratories, Sumitomo Electric Industries, Ltd. 1431-12 Harima Science Garden City, Kamigori, Hyogo 678-12, Japan Piezoelectric ceramics/polymer composites have been developed for micro-ultrasonic transducers. These composites are made up of micro rods of lead zirconate titanate (PZT) ceramics with high aspect ratio (diameter: 17pm, height: up to 120pm, density: 1,700 rods/\"*). PZT rods were fabricated using deep-etch X-ray lithography, PZT slurry casting into a resist structure, plasma etching for resist removal, and sintering. Piezoelectric coefficient d , frequency constant N, and electromechanical coupling coefficient k of the composites were measured, and these composites were proven to have good piezoelectricity.","PeriodicalId":273283,"journal":{"name":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","volume":"7 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1995-01-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"20","resultStr":"{\"title\":\"Piezoelectric composites for micro-ultrasonic transducers realized with deep-etch X-ray lithography\",\"authors\":\"Y. Hirata, H. Okuyama, S. Ogino, T. Numazawa, H. Takada\",\"doi\":\"10.1109/MEMSYS.1995.472581\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"PIEZOELECTRIC COMPOSITES FOR MICRO-ULTRASONIC TRANSDUCERS REALIZED WITH DEEP-ETCH X-RAY LITHOGRAPHY Yoshihiro Hirata, Hiroshi Okuyama, Seiji Ogino* Toshiyuki Numzawa and Hiroshi Takaah Harima Research Laboratories, Sumitomo Electric Industries, Ltd. 1431-12 Harima Science Garden City, Kamigori, Hyogo 678-12, Japan Piezoelectric ceramics/polymer composites have been developed for micro-ultrasonic transducers. These composites are made up of micro rods of lead zirconate titanate (PZT) ceramics with high aspect ratio (diameter: 17pm, height: up to 120pm, density: 1,700 rods/\\\"*). PZT rods were fabricated using deep-etch X-ray lithography, PZT slurry casting into a resist structure, plasma etching for resist removal, and sintering. Piezoelectric coefficient d , frequency constant N, and electromechanical coupling coefficient k of the composites were measured, and these composites were proven to have good piezoelectricity.\",\"PeriodicalId\":273283,\"journal\":{\"name\":\"Proceedings IEEE Micro Electro Mechanical Systems. 1995\",\"volume\":\"7 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1995-01-29\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"20\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings IEEE Micro Electro Mechanical Systems. 1995\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.1995.472581\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings IEEE Micro Electro Mechanical Systems. 1995","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.1995.472581","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Piezoelectric composites for micro-ultrasonic transducers realized with deep-etch X-ray lithography
PIEZOELECTRIC COMPOSITES FOR MICRO-ULTRASONIC TRANSDUCERS REALIZED WITH DEEP-ETCH X-RAY LITHOGRAPHY Yoshihiro Hirata, Hiroshi Okuyama, Seiji Ogino* Toshiyuki Numzawa and Hiroshi Takaah Harima Research Laboratories, Sumitomo Electric Industries, Ltd. 1431-12 Harima Science Garden City, Kamigori, Hyogo 678-12, Japan Piezoelectric ceramics/polymer composites have been developed for micro-ultrasonic transducers. These composites are made up of micro rods of lead zirconate titanate (PZT) ceramics with high aspect ratio (diameter: 17pm, height: up to 120pm, density: 1,700 rods/"*). PZT rods were fabricated using deep-etch X-ray lithography, PZT slurry casting into a resist structure, plasma etching for resist removal, and sintering. Piezoelectric coefficient d , frequency constant N, and electromechanical coupling coefficient k of the composites were measured, and these composites were proven to have good piezoelectricity.
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