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Serially-Connected Weight-Balanced Digital Actuators for Wide-Range, High-Precision, Low-Voltage Displacement Control 串行连接的重量平衡数字执行器，用于宽范围，高精度，低压位移控制
19th IEEE International Conference on Micro Electro Mechanical Systems Pub Date : 2006-05-08 DOI: 10.1109/MEMSYS.2006.1627923
Jae Yong Lee, W. Lee, Y. Choz
{"title":"Serially-Connected Weight-Balanced Digital Actuators for Wide-Range, High-Precision, Low-Voltage Displacement Control","authors":"Jae Yong Lee, W. Lee, Y. Choz","doi":"10.1109/MEMSYS.2006.1627923","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627923","url":null,"abstract":"This paper presents the design, fabrication, and characterization of new serial digital actuators, achieving the improvement of the range-to-precision and range-to-voltage performance. We propose a weight-balanced design for the serial actuators with serpentine springs with serial arrangement of digital actuators. We have measured the displacement range, precision, and drive voltage at unit and serial actuation of 1Hz. The serial digital actuators produce a full range displacement of 28.44± 0.02μm, accumulating the unit displacement of 2.8±0.5μm at the operating voltage of 4.47±0.07V. In addition, the serial digital actuators having the displacement precision of 37.94±6.26nm do not accumulate the precision of the unit actuators, 36.0±17.7nm. We experimentally verify that the serial digital actuators achieve the range-to-squared-voltage ratio of 1.423μm/V2and the range-to-precision ratio of 749.6.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128733630","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Atmospheric Pressure Airmicroplasma Ionization Source for Chemical Analysis Applications 大气压空气微等离子体电离源在化学分析中的应用
19th IEEE International Conference on Micro Electro Mechanical Systems Pub Date : 2006-05-08 DOI: 10.1109/MEMSYS.2006.1627815
J. Wright, R.A. Miller, E. Nazarov
{"title":"Atmospheric Pressure Airmicroplasma Ionization Source for Chemical Analysis Applications","authors":"J. Wright, R.A. Miller, E. Nazarov","doi":"10.1109/MEMSYS.2006.1627815","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627815","url":null,"abstract":"An atmospheric pressure microplasma ionization source operating in ambient air and nitrogen is presented. Utilizing planar dielectric barrier discharge configuration, low power operation (< 250 mW) and long continuous operating lifetime (> 5000 hours) is demonstrated. Fitting of nitrogen rotational spectroscopy measurements indicate the microplasma operates at ambient temperature. Ion intensity and signal-to-noise data generated by the microplasma are compared to those produced from a 5 mCi,63Ni foil, a radioactive source widely used in chemical detection equipment. End of life failure mode is discussed.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"47 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129927245","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
3-D Magnetic Tweezers for Investigation of Mechanical Properties of Single DNA Molecules 三维磁镊子用于研究单个DNA分子的力学性质
19th IEEE International Conference on Micro Electro Mechanical Systems Pub Date : 2006-05-08 DOI: 10.1109/MEMSYS.2006.1627756
C. Chiou, Yu-yen Huang, Meng-Han Chiang, Huei-Huang Lee, Gwo-Bin Lee
{"title":"3-D Magnetic Tweezers for Investigation of Mechanical Properties of Single DNA Molecules","authors":"C. Chiou, Yu-yen Huang, Meng-Han Chiang, Huei-Huang Lee, Gwo-Bin Lee","doi":"10.1109/MEMSYS.2006.1627756","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627756","url":null,"abstract":"This study reports a new three-dimensional (3-D) micromachined magnetic tweezers, fabricated using MEMS (micro-electro-mechanical systems) technology, for manipulating a single 2-nm diameter DNA molecule. The new apparatus uses magnetic forces to exert over 20-pN, with less heating compared to other methods, allowing the extension of the DNA molecule over its whole contour length to investigate its entropic and elastic regions. The important elastic modulus of DNA has been explored to be 453 pN at a low ionic strength. The force-extension curve for DNA molecules is found to be consistent with theoretical models. In addition to a single DNA stretching, this study also successfully demonstrated the stretching of two parallel DNA molecules, which was never reported previously in the literature.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130502654","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Measurement of Light Intensity Field with a Fluorescent Bead Cantilever 用荧光珠悬臂梁测量光强场
19th IEEE International Conference on Micro Electro Mechanical Systems Pub Date : 2006-05-08 DOI: 10.1109/MEMSYS.2006.1627926
T. Kan, K. Hoshino, K. Matsumoto, I. Shimoyama
{"title":"Measurement of Light Intensity Field with a Fluorescent Bead Cantilever","authors":"T. Kan, K. Hoshino, K. Matsumoto, I. Shimoyama","doi":"10.1109/MEMSYS.2006.1627926","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627926","url":null,"abstract":"We propose a light intensity measuring method applicable to near-field measurement as well as far-field measurement. We fabricated a scanning probe composed of a piezoresistive cantilever and a fluorescent bead. The fluorescent bead works as a probe for the light intensity. The bead was attached to the tip of the piezoresistive cantilever, which detected cantilever contact by monitoring strain of the cantilever. Scanning position determination was carried out with accuracy of 100 nm by detecting a contact between the bead and the substrate. The cantilever probe scanned a sub-micron sized aperture to measure intensity distribution in the vicinity of the aperture. This contact detection allowed the probe to scan in near-field region, where distance between the probe and the aperture was within a wavelength.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129106648","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A Microfabricated Direct Methanol Fuel Cell with Integrated Electroosmotic Pump 集成电渗透泵的微型直接甲醇燃料电池
19th IEEE International Conference on Micro Electro Mechanical Systems Pub Date : 2006-05-08 DOI: 10.1109/MEMSYS.2006.1627955
C. Buie, Y. Banin, C. Tang, J. Santiago, F. Prinz, B. Pruitt
{"title":"A Microfabricated Direct Methanol Fuel Cell with Integrated Electroosmotic Pump","authors":"C. Buie, Y. Banin, C. Tang, J. Santiago, F. Prinz, B. Pruitt","doi":"10.1109/MEMSYS.2006.1627955","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627955","url":null,"abstract":"This paper reports a novel design, and subsequent performance results, for a direct methanol fuel cell (DMFC) with a planar silicon electroosmotic (EO) pump for methanol fuel delivery. EO pumps possess no moving parts, produce flow rates on the order of several ml/min, and can be microfabricated from silicon substrates. Maximum flow rates from the EO pumps ranged from 0.25 ml/min to 10 ml/min at applied voltages ranging from 40 V – 100 V with deionized water as the working fluid. The maximum power density of the DMFC is 17.8 mW/cm2at room temperature.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129216727","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Integrating Optoelectronic Tweezers for Individual Particle Manipulation with Digital Microfluidics Using Electrowetting-On-Dielectric (EWOD) 利用介电润湿技术(EWOD)集成用于单个粒子操作的光电镊子与数字微流体
19th IEEE International Conference on Micro Electro Mechanical Systems Pub Date : 2006-05-08 DOI: 10.1109/MEMSYS.2006.1627753
G. J. Shah, P. Chiou, J. Gong, A. Ohta, J. B. Chou, Ming C. Wu, C. Kim
{"title":"Integrating Optoelectronic Tweezers for Individual Particle Manipulation with Digital Microfluidics Using Electrowetting-On-Dielectric (EWOD)","authors":"G. J. Shah, P. Chiou, J. Gong, A. Ohta, J. B. Chou, Ming C. Wu, C. Kim","doi":"10.1109/MEMSYS.2006.1627753","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627753","url":null,"abstract":"This paper presents the integration of two powerful technologies: manipulation of droplets (i.e., digital microfluidics) using electrowettingon-dielectric (EWOD) and manipulation of individual particle inside the droplets using optoelectronic tweezers (OET). A novel platform for maintaining a viable cell culture environment is proposed as an application example, in which EWOD operations bring droplets containing cells, medium and waste into and out of the cell environment and OET operations address and manipulate the individual cells in coordination with the fluidic operations. Functions of EWOD and OET required to realize the concept are demonstrated.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123979084","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 13
Wafer-Level Transfer of Thermo-Piezoelectric Si3N4Cantilever Array on a CMOS Circuit for High Density Probe-Based Data Storage 用于高密度探针数据存储的热压电si3n4悬臂阵列在CMOS电路上的片级转移
19th IEEE International Conference on Micro Electro Mechanical Systems Pub Date : 2006-05-08 DOI: 10.1109/MEMSYS.2006.1627951
Young-Sik Kim, H. Nam, Seong-Soo Jang, C. S. Lee, W. Jin, Il-Joo Cho, J. Bu, Sun-Il Chang, E. Yoon
{"title":"Wafer-Level Transfer of Thermo-Piezoelectric Si3N4Cantilever Array on a CMOS Circuit for High Density Probe-Based Data Storage","authors":"Young-Sik Kim, H. Nam, Seong-Soo Jang, C. S. Lee, W. Jin, Il-Joo Cho, J. Bu, Sun-Il Chang, E. Yoon","doi":"10.1109/MEMSYS.2006.1627951","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627951","url":null,"abstract":"In this research, a wafer-level transfer method of cantilever array on a conventional CMOS circuit has been developed for high density probe-based data storage. The transferred cantilevers were silicon nitride (Si<inf>3</inf>N<inf>4</inf>) cantilevers integrated with poly silicon heaters and piezoelectric sensors, called thermo-piezoelectric Si<inf>3</inf>N<inf>4</inf>cantilevers. The thermo-piezoelectric Si<inf>3</inf>N<inf>4</inf>cantilever arrays were fabricated with a conventional p-type silicon wafer instead of a SOI wafer. Furthermore, we have developed a wafer-level cantilever transfer process, which requires only one step of cantilever transfer process to integrate the CMOS circuit with the cantilevers. Using this process, we have fabricated a single thermo-piezoelectric Si<inf>3</inf>N<inf>4</inf>cantilever, and recorded 65nm data bits on a PMMA film. And we have successfully applied this method to transfer 34X34 thermo-piezoelectric Si<inf>3</inf>N<inf>4</inf>cantilever arrays on a CMOS wafer. Finally, We obtained reading signals from one of the cantilevers.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124023691","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Muscle Proteins as High Speed Nano Transporters on Micro Patterns 肌肉蛋白作为微模式上的高速纳米转运体
19th IEEE International Conference on Micro Electro Mechanical Systems Pub Date : 2006-05-08 DOI: 10.1109/MEMSYS.2006.1627754
Y. Yoshida, T. Shimozawa, T. Nishizaka, S. Ishiwata, S. Takeuchi
{"title":"Muscle Proteins as High Speed Nano Transporters on Micro Patterns","authors":"Y. Yoshida, T. Shimozawa, T. Nishizaka, S. Ishiwata, S. Takeuchi","doi":"10.1109/MEMSYS.2006.1627754","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627754","url":null,"abstract":"This paper describes a biohybrid nano transporting device using muscle proteins of actin and myosin. These proteins are patterned on a glass substrate by a Parylene lift off process. A nano fluorescent particle was attached onto an actin filament by biotin-avidin interactions. We found that the actin filament is sufficiently flexible, so it can turn back at the edge of the pattern and is confined moving upon the micro patterns. The velocity of the transportation was around 4 µ m/s, which was about 40 times faster than that of kinesin and microtubule we used in MEMS2005 [ 1a]. This technique is useful for high speed transportation or actuation of MEMS/NEMS devices.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114342649","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Biodegradable Polymer Needle Having a Trench for Collecting Blood by Capillary Force 可生物降解的聚合物针头，具有毛细管力收集血液的沟槽
19th IEEE International Conference on Micro Electro Mechanical Systems Pub Date : 2006-05-08 DOI: 10.1109/MEMSYS.2006.1627833
S. Aoyagi, H. Izumi, Y. Isono, K. Makihira, M. Fukuda
{"title":"Biodegradable Polymer Needle Having a Trench for Collecting Blood by Capillary Force","authors":"S. Aoyagi, H. Izumi, Y. Isono, K. Makihira, M. Fukuda","doi":"10.1109/MEMSYS.2006.1627833","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627833","url":null,"abstract":"This paper proposes a biodegradable polymer (Poly Lactic Acid, called as PLA) needle having a trench for collecting blood. A solid micro needle of polymer can be fabricated by micromolding method. However, a hollow needle is difficult to be fabricated by this method. It is also difficult to fabricate a long hole with ultra high aspect ratio along the centerline of a micromolded needle. On the other hand, it is comparatively easy to fabricate a trench on a needle surface. Blood runs up along this trench by capillary force, which realizes simple and easy blood collection without pumping mechanism. A needle with straight shank is fabricated by contriving wet etching method of a groove on a silicon die. A trench is fabricated on the top surface of the needle by laser micromachining. The performance of collecting blood of this needle is experimentally evaluated.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"236 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116329330","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Pyrolyzed Polymer as Absorbent of Nitrogen Dioxide Sensor 热解聚合物作为二氧化氮传感器的吸收剂
19th IEEE International Conference on Micro Electro Mechanical Systems Pub Date : 2006-05-08 DOI: 10.1109/MEMSYS.2006.1627850
K. Naka, T. Hashishin, J. Tamaki, S. Konishi
{"title":"Pyrolyzed Polymer as Absorbent of Nitrogen Dioxide Sensor","authors":"K. Naka, T. Hashishin, J. Tamaki, S. Konishi","doi":"10.1109/MEMSYS.2006.1627850","DOIUrl":"https://doi.org/10.1109/MEMSYS.2006.1627850","url":null,"abstract":"This paper deals with a pyrolyzed polymer as a kind of carbon materials obtained by pyrolysis of polymers. Through the combination of micromachining of polymers and following pyrolysis process, we can obtain pyrolyzed polymer MEMS structures for various applications. This work focuses on pyrolyzed polymer as an absorbent of nitrogen dioxide sensor. The resistance of the developed sensor was dramatically decreased when the sensor was exposed to the NO2mixture gas. Through evaluations of dependence on pyrolysis temperature and operating temperature, it is found that higher pyrolysis temperature and higher operating temperature contribute to higher sensitivity against gas mixture of NO2.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121493047","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
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