{"title":"Atmospheric Pressure Airmicroplasma Ionization Source for Chemical Analysis Applications","authors":"J. Wright, R.A. Miller, E. Nazarov","doi":"10.1109/MEMSYS.2006.1627815","DOIUrl":null,"url":null,"abstract":"An atmospheric pressure microplasma ionization source operating in ambient air and nitrogen is presented. Utilizing planar dielectric barrier discharge configuration, low power operation (< 250 mW) and long continuous operating lifetime (> 5000 hours) is demonstrated. Fitting of nitrogen rotational spectroscopy measurements indicate the microplasma operates at ambient temperature. Ion intensity and signal-to-noise data generated by the microplasma are compared to those produced from a 5 mCi,63Ni foil, a radioactive source widely used in chemical detection equipment. End of life failure mode is discussed.","PeriodicalId":250831,"journal":{"name":"19th IEEE International Conference on Micro Electro Mechanical Systems","volume":"47 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2006-05-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"19th IEEE International Conference on Micro Electro Mechanical Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2006.1627815","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7
Abstract
An atmospheric pressure microplasma ionization source operating in ambient air and nitrogen is presented. Utilizing planar dielectric barrier discharge configuration, low power operation (< 250 mW) and long continuous operating lifetime (> 5000 hours) is demonstrated. Fitting of nitrogen rotational spectroscopy measurements indicate the microplasma operates at ambient temperature. Ion intensity and signal-to-noise data generated by the microplasma are compared to those produced from a 5 mCi,63Ni foil, a radioactive source widely used in chemical detection equipment. End of life failure mode is discussed.