G. William Burg, B. Fallahazad, K. Kim, N. Prasad, T. Taniguchi, Kenji Watanabe, L. F. Register, E. Tutuc
{"title":"Double bilayer graphene-WSe2 resonant tunneling heterostructures with high interlayer current densities and peak-to-valley ratios","authors":"G. William Burg, B. Fallahazad, K. Kim, N. Prasad, T. Taniguchi, Kenji Watanabe, L. F. Register, E. Tutuc","doi":"10.1109/DRC.2017.7999393","DOIUrl":"https://doi.org/10.1109/DRC.2017.7999393","url":null,"abstract":"Van der Waals heterostructures consisting of two dimensional (2D) materials have been a topic of great interest recently due to their diverse electrical characteristics and device applications. One property that has attracted attention because of potential device applications is tunneling between two 2D atomic layers separated by a barrier, which may possess gate tunable negative differential resistance (NDR) [1, 2]. This can be achieved experimentally if the tunneling between the 2D layers conserves both energy and momentum [2]. We present here resonant tunneling between two bilayer graphene crystals separated by a WSe2 tunnel barrier, which shows gate-tunable NDR in the interlayer current-voltage characteristics, with large interlayer peak current densities and peak-to-valley ratios.","PeriodicalId":248087,"journal":{"name":"2017 75th Annual Device Research Conference (DRC)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121457828","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
A. Baca, A. Armstrong, A. Allerman, B. Klein, E. Douglas, C. Sanchez, T. Fortune
{"title":"Al0.45Ga0.55N/Al0.30Ga0.70N high electron mobility transistors with Schottky gates and small subthreshold slope factor","authors":"A. Baca, A. Armstrong, A. Allerman, B. Klein, E. Douglas, C. Sanchez, T. Fortune","doi":"10.1109/DRC.2017.7999448","DOIUrl":"https://doi.org/10.1109/DRC.2017.7999448","url":null,"abstract":"Emerging ultrawide bandgap semiconductor materials are logical candidates for applications that exploit the large critical electric field (E<inf>C</inf>) associated with these devices. For semiconductor devices, E<inf>C</inf> scales approximately as E<inf>g</inf><sup>2 5</sup> [1]. With a 25% larger bandgap and an approximately 73% larger E<inf>C</inf> than GaN, Al<inf>0.3</inf>Ga<inf>0.7</inf>N-channel high election mobility transistors (HEMTs) might be viable candidates for harsh environment electronics or short wavelength photo-transistors. In either case, transistor quality factors such as minimal off-state leakage currents and subthreshold slope factor are important metrics.","PeriodicalId":248087,"journal":{"name":"2017 75th Annual Device Research Conference (DRC)","volume":"188 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116645152","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Novel fabrication method and structure of single crystal thin film In0.53Ga0.47As Schottky diodes for potential IR applications","authors":"R. Hussin, Yi Luo","doi":"10.1109/DRC.2017.7999441","DOIUrl":"https://doi.org/10.1109/DRC.2017.7999441","url":null,"abstract":"Due to their favorable properties, extensive efforts have been done to extend the applications of Schottky diodes into infrared (IR) nonlinear applications. Primarily, efforts have been concentrated in reducing their series resistances and their capacitances in order to increase their cutoff frequencies [1]. Here, we introduce novel single crystal thin film Au-In0.53Ga0.47As Schottky diodes, in which the thickness of the semiconductor is less than the depletion width in the diodes. This leads to a significantly reduced series resistance, which leads to a cutoff frequency of 25 THz. This value is among the highest values reported for Schottky diodes [2]. The diode structure is achieved using a novel film transfer method introduced by our group.","PeriodicalId":248087,"journal":{"name":"2017 75th Annual Device Research Conference (DRC)","volume":"108 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115667491","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Yoni Mehlman, Y. Afsar, Naveen Yerma, S. Wagner, J. Sturm
{"title":"Self-aligned ZnO thin-film transistors with 860 MHz fT and 2 GHz fmax for large-area applications","authors":"Yoni Mehlman, Y. Afsar, Naveen Yerma, S. Wagner, J. Sturm","doi":"10.1109/DRC.2017.7999510","DOIUrl":"https://doi.org/10.1109/DRC.2017.7999510","url":null,"abstract":"High-frequency thin film transistors (TFTs) enable many important thin film circuits used in flexible large-area systems such as large bandwidth instrumentation amplifiers (related to f<inf>T</inf>) and high-frequency oscillators (related to f<inf>max</inf>) [1,2]. In [3] f<inf>max</inf>=10GHz and f<inf>T</inf>=2.9GHz were reported but using Si substrates and pulsed laser deposition for ZnO growth, which are incompatible with low-cost large-area processing on a meter scale. More modest reports of f<inf>max-</inf>=1GHz with sputtered IGZO on glass have relied on a very sensitive alignment process, impractical for fabrication over large substrates [4]. In this work we present a ZnO-channel TFT process fully compatible with flexible large-area substrates. We achieve an f<inf>max</inf>=2GHz and f<inf>T</inf>=860MHz by reducing source/drain (S/D) to gate overlaps (X<inf>ov</inf>) and scaling channel lengths down to 500nm via a self-aligned process.","PeriodicalId":248087,"journal":{"name":"2017 75th Annual Device Research Conference (DRC)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122871549","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Bablu Mukherjee, Kartikey Thakar, Naveen Kaushik, S. Lodha
{"title":"Suspended ReSi FET for improved photocurrent-time response","authors":"Bablu Mukherjee, Kartikey Thakar, Naveen Kaushik, S. Lodha","doi":"10.1109/DRC.2017.7999439","DOIUrl":"https://doi.org/10.1109/DRC.2017.7999439","url":null,"abstract":"Strong light-matter interaction in 2D transition metal dichalcogenides (TMDs) presents a significant opportunity for many optoelectronic applications [1-7]. In photodetector devices, the transit time of photogenerated carriers is limited by their mobility, which affects the photoconductive gain and response time of the device. In this work, we report significant improvement in photocurrent-time response of few layer suspended ReS2-based FETs under broad laser beam illumination. High carrier life time in ReS2 results from the presence of traps [1, 2]. Suspended ReS2 devices have less interface defects [5] as compared to supported (on SiO2) transistors, which helps reduce the life time of the photogenerated carriers [1] and hence improve the photocurrent-time response of the device. Further, improved mobility in the suspended devices due to fewer interface traps also helps to enhance the photocurrent-time response.","PeriodicalId":248087,"journal":{"name":"2017 75th Annual Device Research Conference (DRC)","volume":"332 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116358219","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Derek W. Johnson, M. Babb, Pradhyumna Ravikirthi, J. Suh, H. Harris
{"title":"Self-aligned contact metallization to AlGaN/GaN heterostructures","authors":"Derek W. Johnson, M. Babb, Pradhyumna Ravikirthi, J. Suh, H. Harris","doi":"10.1109/DRC.2017.7999449","DOIUrl":"https://doi.org/10.1109/DRC.2017.7999449","url":null,"abstract":"Nitride device scaling and large scale integration requires the increased manufacturability of self-aligned processes. To date, excellent contacts to GaN heterostructures with 2DEG are achieved through lithographically-defined metallization [1], despite the so-called self-aligned regrowth processes used [2,3]. We have developed a novel self-aligned contact metallization process using Titanium to make ohmic contacts (RC = 0.36 Ω-mm) to AlGaN/GaN hetero-structures. After metal selection experiments, the field dielectric, selective wet etch chemistry, surface pre-treatment and ohmic anneal are engineered to realize the salicide-like process. A CHF3+O2 surface pre-treatment is found to be vital to implementation of the self-aligned contact. Gate-last transistor devices demonstrate the feasibility of the unique process module. These results demonstrate the first truly self-aligned contact module for AlGaN/GaN 2DEG devices.","PeriodicalId":248087,"journal":{"name":"2017 75th Annual Device Research Conference (DRC)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126117280","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
H. Hahn, M. Seifried, G. Villares, Y. Baumgartner, M. Halter, C. Caër, D. Caimi, M. Sousa, R. Dangel, N. Meier, F. Horst, L. Czornomaz, B. Offrein
{"title":"Towards electro-optical integration of hybrid III-V on Si lasers into the BEOL of a CMOS technology","authors":"H. Hahn, M. Seifried, G. Villares, Y. Baumgartner, M. Halter, C. Caër, D. Caimi, M. Sousa, R. Dangel, N. Meier, F. Horst, L. Czornomaz, B. Offrein","doi":"10.1109/DRC.2017.7999518","DOIUrl":"https://doi.org/10.1109/DRC.2017.7999518","url":null,"abstract":"Interconnects have become a severe bottleneck in today's computing hardware [1]. For large-scale data centers in particular, the interconnect situation is even more severe [2]. The interconnect bandwidth and bandwidth density have to be increased on all system-levels. The ideal technology to increase the density is Si photonics (SiPh). While the integration of most of the SiPh components has been mastered already on a 90 nm CMOS platform [3], the integration of III-V materials to yield directly-modulated lasers still poses a major challenge. This integration is considered as the cornerstone for reaching a complete, yet cost-competitive, SiPh-CMOS marriage. Most concepts shown so far [4, 5] either lack CMOS-compatibility or have device dimensions that hinder the integration of the laser into a standard BEOL. To allow for a common BEOL between SiPh and CMOS, we integrate the III-V material between the FEOL and BEOL, within the first interlayer dielectric ILD0' (Fig. 1). Such integration imposes tight requirements on device dimensions as well as several technological challenges that have to be mastered. We report here on decisive aspects of such integration. This represents a major step towards a full integration of III-V, SiPh and CMOS.","PeriodicalId":248087,"journal":{"name":"2017 75th Annual Device Research Conference (DRC)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125708521","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
P. Long, M. Povolotskyi, Jun Z. Huang, J. Charles, T. Kubis, Gerhard Klimeck, M. Rodwell
{"title":"A high-current InP-channel triple heterojunction tunnel transistor design","authors":"P. Long, M. Povolotskyi, Jun Z. Huang, J. Charles, T. Kubis, Gerhard Klimeck, M. Rodwell","doi":"10.1109/DRC.2017.7999437","DOIUrl":"https://doi.org/10.1109/DRC.2017.7999437","url":null,"abstract":"VLSI devices are constrained by CF<inf>dd</inf><sup>2</sup>/2 power dissipation. Low power dissipation requires low V<inf>dd</inf>, yet reducing V<inf>dd</inf> increases I<inf>off</inf>. Tunnel FETs (TFETs) have steep subthreshold swings (S.S.) and can operate at low V<inf>dd</inf>, yet their I<inf>on</inf> is limited by low tunneling probability. This low I<inf>on</inf> results in large CV<inf>dd</inf>/I delay and slow logic operation. For greatly increased Ion, we had proposed a triple-heterojunction (3HJ) TFET design incorporating source and channel heterojunctions (HJ) [1, 2]. The designs of [1, 2] have an InAlAsSb channel, yet no low-trap-density dielectric interfaces to InAlAsSb have been reported. In contrast, low-trap-density dielectric interfaces have been demonstrated to InAs, InGaAs, and InP [3, 4, 5]. Here we propose an InGaAs/GaAsSb/InAs/InP 3HJ TFET design, with growth lattice-matched to InP. The gated channel surface is InAs and InP, and thus can have low trap density. The p-type side of the tunnel junction is GaAsSb, instead of strained GaSb [6], as compressive strain increases the hole transport effective mass, reducing the tunneling probability. In ballistic simulations, with I<inf>off</inf>= 10 <sup>3</sup> μA/μm and V<inf>dd</inf>=0.3V, I<inf>on</inf> is an extremely high 540μA/μm. Even when simulated assuming incoherent quantum transport, with acoustic and optical phonon scattering modelled, I<inf>on</inf> remains very high at 250μA/μm.","PeriodicalId":248087,"journal":{"name":"2017 75th Annual Device Research Conference (DRC)","volume":"83 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128418962","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
{"title":"Flash memory TFT based on fully solution processed oxide","authors":"Sandip Mondai, V. Venkataraman","doi":"10.1109/DRC.2017.7999508","DOIUrl":"https://doi.org/10.1109/DRC.2017.7999508","url":null,"abstract":"Charge trapping based non-volatile capacitive flash memory has taken a significant share of today's semiconductor electronics[1]-[3]. As of now, there is no alternative to Silicon Nitride (Sis N4) dielectric for memory technology in terms of low-leakage and intrinsic charge storage properties. However the fabrication process of Si3N4 memory device is very complicated and requires sophisticated ultra-high vacuum system, which is incompatible towards building system on panel (SOP), system on glass (SOG) or ‘see through’ display technologies for large area and cost effective electronics applications[4]. Therefore it is necessary to develop fully spin-coated, sol-gel processed, cost effective flash memory TFT. Recently we reported a fully solution processed two terminal capacitive memory device [3]. However such devices are not suitable for large arrays since flash memory technology today relies on three terminal memory TFTs which are more superior in terms of readout and integration. Here we demonstrate all inorganic, completely oxide based, robust, cost-effective, fully solution processed spin-coated Silicon-Oxide-Hafnia-oxide-Semiconductor (SOHOS) flash memory devices. The performance of fully sol-gel processed memory TFT is equivalent or better than similar devices fabricated by other techniques. We also demonstrate the memory operation mechanism of the device using the experimentally determined complete band structure.","PeriodicalId":248087,"journal":{"name":"2017 75th Annual Device Research Conference (DRC)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130630415","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Yexin Deng, Prabhu K. Venuthurumilli, Zhe Luo, N. Conrad, Xianfan Xu, P. Ye
{"title":"Plasmonic enhanced polarization sensitive black phosphorus photodetection device","authors":"Yexin Deng, Prabhu K. Venuthurumilli, Zhe Luo, N. Conrad, Xianfan Xu, P. Ye","doi":"10.1109/DRC.2017.7999440","DOIUrl":"https://doi.org/10.1109/DRC.2017.7999440","url":null,"abstract":"2D black phosphorus is good for use in photodetection devices due to its direct bandgap [1]. However, light absorptions in these 2D materials are often very low due to its ultra-thin nature. Numerical simulations were used to design and optimize the plasmonic structures. The optimized bowtie structure devices were fabricated on black phosphorus on transparent substrate. Photocurrent measurements showed strong light polarization dependence in our device (2 times difference), as well as stronger responsivity (6 times higher) compared with our previous work thanks to the enhanced light absorption by the plasmonic structure [2].","PeriodicalId":248087,"journal":{"name":"2017 75th Annual Device Research Conference (DRC)","volume":"219 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115786112","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}