Applied Surface Science最新文献_第4页

Addressing phosphate removal issues during peritoneal dialysis using colloidally stable iron oxide nanoclusters coated with tannic acid 使用单宁酸涂层的胶体稳定氧化铁纳米团簇解决腹膜透析期间的磷酸盐去除问题

IF 6.9 2区材料科学

Applied Surface Science Pub Date : 2025-10-09 DOI: 10.1016/j.apsusc.2025.164782

Théo Lucante , Philippe Choquet , Joana Vaz-Ramos , Vincent Ball , Dominique Bégin , Cedric Leuvrey , Vasiliki Papaefthymiou , Spyridon Zafeiratos , Ariane Zaloszyc , Sylvie Bégin-Colin

{"title":"Addressing phosphate removal issues during peritoneal dialysis using colloidally stable iron oxide nanoclusters coated with tannic acid","authors":"Théo Lucante , Philippe Choquet , Joana Vaz-Ramos , Vincent Ball , Dominique Bégin , Cedric Leuvrey , Vasiliki Papaefthymiou , Spyridon Zafeiratos , Ariane Zaloszyc , Sylvie Bégin-Colin","doi":"10.1016/j.apsusc.2025.164782","DOIUrl":"10.1016/j.apsusc.2025.164782","url":null,"abstract":"<div><div>Removal of chronic excess phosphates in blood is critical for patients suffering from end-stage renal disease (ESRD). ESRD patients can be treated with peritoneal dialysis (PD), during which phosphates are transported from the blood to a specific solution, named dialysate, introduced into their peritoneal cavity. However, phosphate removal in PD is currently insufficient but could be improved by introducing in dialysate phosphate adsorbents. Iron oxide nanoparticles are biocompatible and well-known effective phosphate adsorbents, but their colloidal stability at physiological pH and adsorption capacity in high ionic strength aqueous media such as dialysate are significant challenges. Here, we have evaluated the potential of tannic acid-coated iron oxide raspberry-shaped nanoclusters (RSNs@TA) for improving phosphate adsorption in dialysate. We have investigated the influence of the TA coating on phosphate adsorption by performing adsorption experiments with uncoated and TA-coated RSNs. In parallel, we have studied the influence of electrolytes and compounds in dialysate on phosphate adsorption by conducting experiments in pH 7 water and dialysate. The TA coating was shown to provide a high colloidal stability to the nanoclusters and mitigates the inhibitory effect of electrolytes in dialysate on phosphate adsorption. Indeed, electrolytes in dialysate decreased the phosphate adsorption on both nanoclusters but especially on uncoated ones by disturbing phosphate outer-sphere complexes. Thus, RSNs@TA demonstrated enhanced adsorption capacity compared to uncoated RSNs in dialysate (20.7 ± 6.4 mg P.g<sup>−1</sup>) and in pH 7 water (26.4 ± 8.1 mg P.g<sup>−1</sup>). These results established RSNs@TA as promising adsorbents for phosphate removal in dialysate during a PD process<strong>.</strong></div></div>","PeriodicalId":247,"journal":{"name":"Applied Surface Science","volume":"717 ","pages":"Article 164782"},"PeriodicalIF":6.9,"publicationDate":"2025-10-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145255351","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Endurance enhancement of ZnO RRAM through interfacial oxidation control and conduction mechanism analysis 界面氧化控制对ZnO RRAM续航性能的影响及导电机理分析

IF 6.9 2区材料科学

Applied Surface Science Pub Date : 2025-10-09 DOI: 10.1016/j.apsusc.2025.164807

Woon-San Ko , Myeong-Ho Song , Hye-Ri Hong , Do-Yeon Lee , Dong-Hyeuk Choi , Ga-Won Lee

{"title":"Endurance enhancement of ZnO RRAM through interfacial oxidation control and conduction mechanism analysis","authors":"Woon-San Ko , Myeong-Ho Song , Hye-Ri Hong , Do-Yeon Lee , Dong-Hyeuk Choi , Ga-Won Lee","doi":"10.1016/j.apsusc.2025.164807","DOIUrl":"10.1016/j.apsusc.2025.164807","url":null,"abstract":"<div><div>In this study, the reliability of ZnO RRAM with Ti electrodes is investigated, with a focus on the formation of titanium oxide (TiO<sub>X</sub>) at the Ti<img>ZnO interface. Electrical measurements, including DC sweep endurance tests, reveal that the TiO<sub>X</sub> interfacial layer contributes to elevated high-resistance states and overall performance degradation. To directly observe interfacial composition, atom probe tomography (APT) was employed, providing high-resolution three-dimensional chemical mapping. The APT results confirmed that oxygen diffuses from the ZnO layer into the Ti electrode during operation, forming a distinct TiOx layer. To further understand the impact of this interfacial oxide on electrical behavior, we performed current–voltage fitting with Schottky emission models. These analyses indicated that the formation of the TiO<sub>X</sub> layer increased the Schottky barrier height. To mitigate these phenomenon, we introduced a silicon carbon nitride (SiCN) layer between the ZnO and Ti electrodes, deposited via plasma-enhanced atomic layer deposition (PEALD). The SiCN layer acts as an effective oxygen diffusion barrier. Devices incorporating this layer exhibited significantly improved switching uniformity, enhanced endurance, and reduced cycle-to-cycle variability. The structural properties of the ZnO layer were verified using X-ray diffraction (XRD), and secondary ion mass spectrometry (SIMS) confirmed the suppression of oxygen migration. Although the SiCN barrier caused a slight increase in operating voltage, the overall improvement in device stability and reliability highlights the effectiveness of interface engineering. These findings offer valuable insight into interfacial control strategies for high-performance and reliable oxide-based RRAM devices.</div></div>","PeriodicalId":247,"journal":{"name":"Applied Surface Science","volume":"717 ","pages":"Article 164807"},"PeriodicalIF":6.9,"publicationDate":"2025-10-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145255353","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Three-dimensional ZnO/g-C3N4/Ag SERS substrate: A three-in-one synergistic enhancement strategy for trace-level pesticide detection on fruits 三维ZnO/g-C3N4/Ag SERS底物：水果痕量农药检测的三合一协同增强策略

IF 6.7 2区材料科学

Applied Surface Science Pub Date : 2025-10-09 DOI: 10.1016/j.apsusc.2025.164852

Zhengjie Wang, Chunlei Huang, Weiwei Zeng, Yiming Chen, Fengyan Xie, Dongli Meng, Hualiang Yu, Jun Wang

{"title":"Three-dimensional ZnO/g-C3N4/Ag SERS substrate: A three-in-one synergistic enhancement strategy for trace-level pesticide detection on fruits","authors":"Zhengjie Wang, Chunlei Huang, Weiwei Zeng, Yiming Chen, Fengyan Xie, Dongli Meng, Hualiang Yu, Jun Wang","doi":"10.1016/j.apsusc.2025.164852","DOIUrl":"https://doi.org/10.1016/j.apsusc.2025.164852","url":null,"abstract":"Surface-enhanced Raman scattering (SERS) substrates with intense hot spots, superior charge transfer, and exceptional adsorption properties have garnered significant interest in ultrasensitive pesticide detection on fruits. Herein, we developed three-dimensional ZnO nanoflowers coated with ultrathin g-C<sub>3</sub>N<sub>4</sub> layers and decorated with Ag nanoparticles (ZnO/g-C<sub>3</sub>N<sub>4</sub>/Ag) as SERS substrates. Electromagnetic simulations reveal that the ZnO/g-C<sub>3</sub>N<sub>4</sub> nanosheets enhance electromagnetic field localization and generate abundant “hot spots”. The ZnO/g-C<sub>3</sub>N<sub>4</sub> nanosheets also provide extensive heterojunction areas and improve analyte adsorption, facilitating charge separation and transfer. These synergistic effects yield exceptional SERS performance, achieving a picomolar-level detection limit for R6G and exceptional self-cleaning capabilities. This substrate effectively detects multiple pesticides on apple skin, with detection limits as low as a few ng/cm<sup>2</sup>. This research paves the way for developing novel 3D g-C<sub>3</sub>N<sub>4</sub>-based SERS substrates, advancing the highly sensitive detection of pesticide residues on fruits.","PeriodicalId":247,"journal":{"name":"Applied Surface Science","volume":"26 1","pages":""},"PeriodicalIF":6.7,"publicationDate":"2025-10-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145255296","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Atomic-level contact formation between LiNbO3 and Si wafers via surface-activated bonding at room temperature 室温下通过表面活化键合形成的LiNbO3和Si晶圆之间的原子级接触

IF 6.7 2区材料科学

Applied Surface Science Pub Date : 2025-10-09 DOI: 10.1016/j.apsusc.2025.164850

Seigo Murakami, Ryo Takigawa

{"title":"Atomic-level contact formation between LiNbO3 and Si wafers via surface-activated bonding at room temperature","authors":"Seigo Murakami, Ryo Takigawa","doi":"10.1016/j.apsusc.2025.164850","DOIUrl":"https://doi.org/10.1016/j.apsusc.2025.164850","url":null,"abstract":"Fabrication of high-quality LiNbO<sub>3</sub>/Si interfaces is crucial for the heterogeneous wafer-level integration of single crystal LiNbO<sub>3</sub> and Si. Bonded LiNbO<sub>3</sub>/Si wafers are promising for integrated photonics and RF devices owing to their unique electro-optic, nonlinear-optic, and piezoelectric properties. This study focuses on forming a directly bonded interface between LiNbO<sub>3</sub> and Si wafers using the surface-activated bonding (SAB) method, combined with Ar fast atom beam irradiation at room temperature, and on performing atomic-level analyses of the LiNbO<sub>3</sub>/Si bonded interface and debonded surfaces. The surface activation process produces amorphous Li-deficient LiNbO<sub>3</sub> and Si layers. The SAB method enables LiNbO<sub>3</sub> and Si wafers to form a void-free, atomically bonded interface. Atomic-scale observations and elemental analyses of both the bonded interface and debonded surfaces suggest that the bond strength between LiNbO<sub>3</sub> and Si is primarily determined by the Ar irradiation-induced amorphous LiNbO<sub>3</sub> layer. This study lays a foundation for the future development and mechanistic understanding of SAB for fabricating heterogeneously integrated LiNbO<sub>3</sub> wafers, with potential applications in photonic and RF devices.","PeriodicalId":247,"journal":{"name":"Applied Surface Science","volume":"122 1","pages":""},"PeriodicalIF":6.7,"publicationDate":"2025-10-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145255346","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Ag-doped P3S2-I monolayers: selective and robust toxic gas detection in ambient environments ag掺杂P3S2-I单层膜：环境中有毒气体的选择性和鲁棒性检测

IF 6.9 2区材料科学

Applied Surface Science Pub Date : 2025-10-09 DOI: 10.1016/j.apsusc.2025.164844

Li Shao , Xuan Li , Yanli Yang , Yuantao He , Yan Li , Jiehu Cui

{"title":"Ag-doped P3S2-I monolayers: selective and robust toxic gas detection in ambient environments","authors":"Li Shao , Xuan Li , Yanli Yang , Yuantao He , Yan Li , Jiehu Cui","doi":"10.1016/j.apsusc.2025.164844","DOIUrl":"10.1016/j.apsusc.2025.164844","url":null,"abstract":"<div><div>The sensing capabilities of pristine and Ag-doped P<sub>3</sub>S<sub>2</sub>-I (Ag-PS) monolayers toward toxic gases such as SO<sub>2</sub>, CO, HCN, and H<sub>2</sub>S were investigated using DFT simulations. Intrinsic P<sub>3</sub>S<sub>2</sub>-I exhibits semiconductor properties but shows limited gas adsorption capacity due to low adsorption energies (E<sub>ad</sub>). In contrast, Ag-doping induces metallization (bandgap closure) and enhances surface reactivity. Ag-PS demonstrates strong chemisorption of all target gases (E<sub>ad</sub> ranging from −0.682 to −1.149 eV), accompanied by the reopening of a direct bandgap (1.269–1.398 eV). Variations in work function and optical properties further support Ag-PS’s potential for selective gas detection. Notably, Ag-PS maintains selectivity even in humid/ambient conditions (with negligible interference from O<sub>2</sub>, H<sub>2</sub>O, CO<sub>2</sub>, and N<sub>2</sub>), affirming its utility as a robust detector and scavenger for toxic gases. These findings highlight Ag-PS as a promising candidate for environmental monitoring systems, leveraging doping-enhanced electronic and optical responsiveness for gas sensing applications.</div></div>","PeriodicalId":247,"journal":{"name":"Applied Surface Science","volume":"717 ","pages":"Article 164844"},"PeriodicalIF":6.9,"publicationDate":"2025-10-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145254901","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Multiscale separation mechanisms of novel eco-friendly depressants in hematite reverse flotation 新型环保型抑制剂在赤铁矿反浮选中的多尺度分离机理研究

IF 6.7 2区材料科学

Applied Surface Science Pub Date : 2025-10-09 DOI: 10.1016/j.apsusc.2025.164729

Chao Yang, Jinxia Zhang, Fusheng Niu

{"title":"Multiscale separation mechanisms of novel eco-friendly depressants in hematite reverse flotation","authors":"Chao Yang, Jinxia Zhang, Fusheng Niu","doi":"10.1016/j.apsusc.2025.164729","DOIUrl":"https://doi.org/10.1016/j.apsusc.2025.164729","url":null,"abstract":"This study delves into the separation mechanism of hematite from quartz in reverse flotation using quercetin as a novel eco-friendly depressant. Micro-flotation tests were combined with molecular dynamics simulations. The underlying separation mechanisms were then elucidated through multi-scale analyses, including FTIR, XPS, AFM, and optical microscopy. Results show quercetin effectively separates hematite and quartz at pH 10, yielding a TFe grade of 63.44 % and recovery of 89.72 % in the mixed ore concentrate. Compared to neutral conditions, the concentrate grade increased by 1.21 %, with the recovery rate decreasing by only 0.24 %. FT-IR analysis showed that the surface of hematite treated with quercetin, a novel eco-friendly depressant, exhibited hydroxyl group peaks characteristic of quercetin. XPS analysis further indicated that the hydroxyl groups in quercetin chemically adsorbed onto the Fe on the hematite surface. AFM analysis revealed that after treatment with quercetin, the vertical fluctuation range of the cross-sectional height of hematite was relatively large, and the hematite surface exhibited several flaky protuberances. Molecular dynamics calculations show a significant peak near 2 Å for the interaction between the –OH in quercetin and Fe on hematite, and a peak near 3 Å for the interaction between the –NH<sub>2</sub> in DDA and O on quartz. These results are consistent with flotation tests results, indicating the accuracy of the molecular dynamics simulation calculations. This study offers an eco-efficient selective depressant for hematite and gangue mineral separation, with theoretical and practical significance for the sustainable development of clean mines.","PeriodicalId":247,"journal":{"name":"Applied Surface Science","volume":"20 1","pages":""},"PeriodicalIF":6.7,"publicationDate":"2025-10-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145255352","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Influence of laser shaping of the topography of NiCrAlY sinters on the surface oxidation mechanism under high-temperature conditions 高温条件下激光形貌对NiCrAlY烧结矿表面氧化机理的影响

IF 6.9 2区材料科学

Applied Surface Science Pub Date : 2025-10-09 DOI: 10.1016/j.apsusc.2025.164849

Tomasz Kiełczawa , Paweł Sokołowski , Hanna Myalska-Głowacka , Grzegorz Cios , Grzegorz Moskal

{"title":"Influence of laser shaping of the topography of NiCrAlY sinters on the surface oxidation mechanism under high-temperature conditions","authors":"Tomasz Kiełczawa , Paweł Sokołowski , Hanna Myalska-Głowacka , Grzegorz Cios , Grzegorz Moskal","doi":"10.1016/j.apsusc.2025.164849","DOIUrl":"10.1016/j.apsusc.2025.164849","url":null,"abstract":"<div><div>This work presents the idea of functionalization of bond coat surface in thermal barrier coatings technology. The laser surface shaping not only topographically alters the surface but also affects the interfacial behaviors in multilayer coating systems, significantly impacting e.g. high-temperature oxidation mechanisms.</div><div>In this study, NiCrAlY powder was sintered and then laser microtextured. The free-standing sinters with six various topographies were then exposed to isothermal oxidation at 1100 °C and the dwell-time in range of 1 to 168 h. The further microstructural studies were aimed at exploring the correlation between microtexturing parameters, the resulting topography, and high-temperature oxidation mechanisms. The topographical evolution of the laser-treated sinters was analyzed using a scanning electron microscopy and confocal microscopy. Additionally, high-resolution electron microscopy coupled with in-situ focused ion beam etching and energy-dispersive spectroscopy, as well as electron backscatter diffraction were utilized to examine the migration of chemical elements and the final composition of thermally grown oxides, while x-ray diffraction was used to investigate surface oxide formations. The observations revealed that laser surface processing results in fine subsurface microstructure related to rapid free-cooling. Microstructural changes further affected the high-temperature behavior of NiCrAlY powder by altering the oxidation kinetics and oxide formation during isothermal oxidation.</div></div>","PeriodicalId":247,"journal":{"name":"Applied Surface Science","volume":"717 ","pages":"Article 164849"},"PeriodicalIF":6.9,"publicationDate":"2025-10-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145255344","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Enhanced performance of PVDF-based solid electrolytes via PEO-induced α-to-amorphous phase transition enabling stable lithium batteries peo诱导α-非晶相变提高pvdf基固体电解质性能，实现稳定锂电池

IF 6.9 2区材料科学

Applied Surface Science Pub Date : 2025-10-09 DOI: 10.1016/j.apsusc.2025.164812

Huiting Liang , Chengyan Liu , Jie Gao , Kongmei Chen , Peishan Huang , Xiaolin Yue , Yuhua Ren , Shulin Pan , Dong Hu , Lei Miao

{"title":"Enhanced performance of PVDF-based solid electrolytes via PEO-induced α-to-amorphous phase transition enabling stable lithium batteries","authors":"Huiting Liang , Chengyan Liu , Jie Gao , Kongmei Chen , Peishan Huang , Xiaolin Yue , Yuhua Ren , Shulin Pan , Dong Hu , Lei Miao","doi":"10.1016/j.apsusc.2025.164812","DOIUrl":"10.1016/j.apsusc.2025.164812","url":null,"abstract":"<div><div>Solid polymer electrolytes (SPEs) have attracted great interest due to their superior safety. However, in SPEs, high crystallinity reduces the amorphous regions in the polymer and restricts the mobility of polymer segments, thereby lowering ionic conductivity, severely hinder its practical application. In this study, polyvinylidene fluoride (PVDF) and polyethylene oxide (PEO) were crosslinked by stepwise stirring and solution casting to resolve the contradiction: intermolecular interactions induce the transformation of the non-polar α-phase into an amorphous phase, thereby reducing crystallinity. The resulting continuous dipole moments form efficient ion channels, while PEO’s amorphous regions provide transport pathways that promote lithium salt dissociation. Consequently, this process simultaneously reduces crystallinity and enhances conductivity. Crosslinked SPEs with good lithium salt solubility, low interfacial impedance, larger lithium-ion mobility number (0.51), wider electrochemical window (5.0 V (vs. Li<sup>+</sup>/Li)), higher ionic conductivity at room temperature (3.1 × 10<sup>-4</sup> S cm<sup>−1</sup> at 25 °C), and high mechanical strength (4.45 MPa) were formed. After assembling into a battery, the symmetric cell exhibits significantly enhanced cycle life, maintaining 97 % capacity retention after 300 h of cycling. These findings demonstrate the substantial potential of PVDF/PEO crosslinked SPE (PVDF-based SPEs) for applications in lithium batteries.</div></div>","PeriodicalId":247,"journal":{"name":"Applied Surface Science","volume":"717 ","pages":"Article 164812"},"PeriodicalIF":6.9,"publicationDate":"2025-10-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145255347","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Mechanism of atomic layer deposition of Al2O3 on carbene-derived small molecule inhibitors 羰基小分子抑制剂上Al2O3原子层沉积机理研究

IF 6.7 2区材料科学

Applied Surface Science Pub Date : 2025-10-09 DOI: 10.1016/j.apsusc.2025.164841

Zonglun Li, Patrick R. Raffaelle, John R. Mason, Quinn Taylor, Zoe Conomikes, Rongyu Liu, Lewis J. Rothberg, Andrew V. Teplyakov, Alexander A. Shestopalov

{"title":"Mechanism of atomic layer deposition of Al2O3 on carbene-derived small molecule inhibitors","authors":"Zonglun Li, Patrick R. Raffaelle, John R. Mason, Quinn Taylor, Zoe Conomikes, Rongyu Liu, Lewis J. Rothberg, Andrew V. Teplyakov, Alexander A. Shestopalov","doi":"10.1016/j.apsusc.2025.164841","DOIUrl":"https://doi.org/10.1016/j.apsusc.2025.164841","url":null,"abstract":"Area-selective atomic layer deposition (AS-ALD) is a self-aligned thin-film deposition technique that has a potential to address several challenges associated with semiconductor chip miniaturization and energy efficiency in semiconductor manufacturing. A key component of AS-ALD is the deposition growth resist that inhibits ALD. Small molecule inhibitors (SMIs) are a novel class of ALD resists that can potentially achieve higher spatial resolution and better compatibility with a wider variety of substrates and ALD chemistries than traditional polymer and self-assembled monolayers (SAMs) resists. In this study, we introduce a novel carbene-derived SMI and investigate its performance and the growth mechanism of Al<sub>2</sub>O<sub>3</sub> ALD on silicon surfaces modified with this resist. Our results show that the selectivity of Al<sub>2</sub>O<sub>3</sub> growth can be tailored via simple surface reactions of the reactive SMI. The developed monolayers show comparable inhibition efficiency to a standard H-terminated silicon surface and other common types of inhibitors but offer enhanced stability under ambient conditions. Furthermore, we demonstrate that the mechanism of Al<sub>2</sub>O<sub>3</sub> film growth on the SMI differs from that conventional SAMs-based resists reported in literature. These findings provide insights into the design and further development of advanced SMI in AS-ALD applications.","PeriodicalId":247,"journal":{"name":"Applied Surface Science","volume":"109 1","pages":""},"PeriodicalIF":6.7,"publicationDate":"2025-10-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145255350","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

A wafer-scale method for the characterization of 2D MoS2 layers 一种表征二维MoS2层的晶圆尺度方法

IF 6.7 2区材料科学

Applied Surface Science Pub Date : 2025-10-08 DOI: 10.1016/j.apsusc.2025.164785

T. Meyer, S. Cadot, B. Dey, T. Vollaire, P. Brunet, P. Quéméré, N. Gauthier, V.-H. Le, D. Mariolle, H. Okuno, B. Smiri, T. Gouth, M. Pichois, E. Nolot, L. Le Van-Jodin

{"title":"A wafer-scale method for the characterization of 2D MoS2 layers","authors":"T. Meyer, S. Cadot, B. Dey, T. Vollaire, P. Brunet, P. Quéméré, N. Gauthier, V.-H. Le, D. Mariolle, H. Okuno, B. Smiri, T. Gouth, M. Pichois, E. Nolot, L. Le Van-Jodin","doi":"10.1016/j.apsusc.2025.164785","DOIUrl":"https://doi.org/10.1016/j.apsusc.2025.164785","url":null,"abstract":"Wafer-scale deposition of 2D TMDs (Transition Metal Dichalcogenides) is a key point for their integration in future devices. While significant efforts have been dedicated to improving the quality and uniformity of 2D materials, their implementation requires a robust characterization protocol to assess the surface coverage, layer number, stoichiometry, homogeneity, crystallinity and morphology. In this work, we developed a characterization protocol that combined local analyses and large-scale methods. This protocol was applied to MoS<sub>2</sub> films grown on SiO<sub>2</sub> substrate by Atomic Layer Deposition (ALD) using two different precursors, enabling the determination of the number of ALD cycles required to achieve a strict monolayer with full wafer-scale coverage. Atomic Force Microscopy (AFM), X-ray Photoelectron Spectroscopy (XPS), and Scanning Transmission Electron Microscopy (STEM) provided insights into composition, surface coverage and equivalent thickness from sub-monolayer to above-monolayer thickness range at low scale. The combination of Wavelength-Dispersive X-ray Fluorescence (WDXRF), Scanning Electron Microscopy (SEM), Raman spectroscopy and Photoluminescence, enables a rapid and accurate evaluation of the uniformity at wafer scale, the equivalent thickness and composition of TMD films across the wafer.","PeriodicalId":247,"journal":{"name":"Applied Surface Science","volume":"7 1","pages":""},"PeriodicalIF":6.7,"publicationDate":"2025-10-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"145241130","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0