2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)最新文献_第5页

Towards a Better Understanding of Offset Changes Across Temperature in Mode-Split Open-Loop MEMS Gyroscopes 更好地理解模式分裂开环MEMS陀螺仪在温度上的偏移变化

2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10103945

Miloš Vujadinović, T. Hiller, Lukas Blocher, T. Northemann, B. Choubey

{"title":"Towards a Better Understanding of Offset Changes Across Temperature in Mode-Split Open-Loop MEMS Gyroscopes","authors":"Miloš Vujadinović, T. Hiller, Lukas Blocher, T. Northemann, B. Choubey","doi":"10.1109/INERTIAL56358.2023.10103945","DOIUrl":"https://doi.org/10.1109/INERTIAL56358.2023.10103945","url":null,"abstract":"This paper investigates changes of zero-rate offset of triaxial, consumer-grade MEMS gyroscopes across temperature. Forty LGA mold-packaged prototype devices were measured between -40 and 85°C. Additionally to offset, quadrature values were recorded, as well as the phase error between drive and sense movement. As mode-split MEMS gyroscopes typically have large phase errors in the tens of mrad, their offset is dominated by the amount of quadrature times phase error. Beyond this contribution, we investigate smaller, quadrature-unrelated offsets, which we combine and call direct bias. Theoretical models for the temperature behavior of quadrature and phase are presented, based on changes of frequency split and quality factor. We show that while phase changes are predicted well, quadrature behavior is not - presumably due to additional effects of mechanical stress. Lastly, we discuss possible compensation techniques using combinations of measured or modeled quadrature and phase. If both quadrature and phase are measured, the compensation improves offset changes across the above temperature range by a factor of 11 from $pm 9.5$ dps to $pm 0.81$ dps. The behavior of the remaining direct bias constitutes an open research topic.","PeriodicalId":236326,"journal":{"name":"2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130884759","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

A Centrally-Anchored High-Q Tunable Piezoelectric MEMS Resonators FOR Wide Temperature Range RTC 用于宽温度范围RTC的中心锚定高q可调谐压电MEMS谐振器

2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10103940

Yaoyao Long, Zhenming Liu, Charlotte Wehner, A. Farrokh

引用次数: 2

Efficient Quadrature Suppression for Improved Performance of a MEMS Vibratory Gyroscope 有效正交抑制提高MEMS振动陀螺仪性能

2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10103983

R. Forke, A. Shaporin, S. Weidlich, D. Bülz, K. Hiller, H. Kuhn

引用次数: 0

Dynamic Quality Factor Equalization for Improved Bias Stability in Mode-Matched Gyroscopes 动态品质因子均衡改善模式匹配陀螺仪的偏置稳定性

2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10104012

R. Rudy, Carl Hauser, R. Knight, J. Pulskamp

引用次数: 1

Efficient Online Compression for MEMS based BCG Wearable Sensors on ULP FPGA 基于ULP FPGA的基于MEMS的BCG可穿戴传感器的高效在线压缩

2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10103939

Uif Kulau, Abdelrahman Noshy, Abdelalim Ahmed

引用次数: 0

71 kHz Frequency Modulated PiezoMEMS Gyroscope 71 kHz调频压电陀螺仪

2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10104005

Antti Ontronen, V. Kaajakari, Konsta Wjuga, Akiko Uno, Seiji Umezawa, Y. Aida

引用次数: 1

UMEMS: A Robust Technology Platform For Quality Automotive Inertial Sensor Manufacturing UMEMS:优质汽车惯性传感器制造的强大技术平台

2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10103951

Lianjun Liu, M. Lagouge, Bob Steimle, A. Geisberger, J. McKillop, D. Monk

引用次数: 0

“Sugar-Cube”: Pedestrian Hardware Platform that Fits in the Sole of a Shoe “方糖”:适合鞋底的步行硬件平台

2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10103995

Austin R. Parrish, Chi-Shih Jao, Danmeng Wang, A. Shkel

{"title":"“Sugar-Cube”: Pedestrian Hardware Platform that Fits in the Sole of a Shoe","authors":"Austin R. Parrish, Chi-Shih Jao, Danmeng Wang, A. Shkel","doi":"10.1109/INERTIAL56358.2023.10103995","DOIUrl":"https://doi.org/10.1109/INERTIAL56358.2023.10103995","url":null,"abstract":"We report on the design, implementation, and demonstration of a miniaturized Inertial Navigation platform. The platform, with a total volume of 7.1 $cm^{3}$ (excluding battery and case), includes the Inertial Measurement Unit (IMU), chip-scale barometer, magnetometer, as well as a powerful computational engine for signal processing and execution of the navigation algorithm. The sensors are integrated using separate PCBs with castellated edges forming the connections with the main board allowing some flexibility in sensor selection. The platform is small enough for integration in the sole of a shoe, which is an optimal location for implementation of Zero Velocity Update (ZUPT) algorithms for prolonged self-contained navigation. The navigation solution is performed using an Extended Kalman Filter (EKF) framework with an update rate of 500 Hz. A series of indoor walking experiments were conducted to verify the navigation accuracy of the platform which showed error 0.53% of the trajectory length for a 125 m, 2.75-minute duration walk including flat planes, stairs, and an elevator ride.","PeriodicalId":236326,"journal":{"name":"2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130158779","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Locomotive Syndrome Assessment in Older Adults Using a Single Inertial Measurement Unit 使用单一惯性测量单元评估老年人机车综合征

2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10103944

Iman Hosseini, M. Ghahramani

引用次数: 0

Non-Destructive Characterization of High Aspect-Ratio Structures Using 3D X-Ray Microscopy 使用三维x射线显微镜的高宽高比结构的无损表征

2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2023-03-28 DOI: 10.1109/INERTIAL56358.2023.10103937

E. Bentley, Sahana Prabhu, Sajal Singh, J. Cho, K. Najafi

{"title":"Non-Destructive Characterization of High Aspect-Ratio Structures Using 3D X-Ray Microscopy","authors":"E. Bentley, Sahana Prabhu, Sajal Singh, J. Cho, K. Najafi","doi":"10.1109/INERTIAL56358.2023.10103937","DOIUrl":"https://doi.org/10.1109/INERTIAL56358.2023.10103937","url":null,"abstract":"Hemispherical shell resonators such as the birdbath resonator have demonstrated excellent performance enabling the development of near-navigation grade gyroscopes. Their inherent 3-dimensional nature can make inspecting their geometrical features and abnormalities difficult to do with conventional imaging and characterization methods. This paper demonstrates the capability of 3D X-ray microscopy (XRM) to characterize high aspect-ratio structures in a non-destructive manner with an emphasis on early stages of development. This technique is enormously effective for several reasons. It can be used for failure analysis and characterization of devices before, during, and after field use. It provides detailed 3D images of an entire device, providing the ability to provide 2D views along any given plane. This is a significant capability, especially for millimeter scale 3D devices with sub-micron feature resolution. Because it is non-destructive, it can be used on a variety of samples as they go through manufacturing, and especially after they are packaged and not accessible. Finally, the 3D and 2D profiles can be used to construct models for finite element modeling and device design optimization. X-Ray Microscopy images of fused-silica micro-hemispherical resonators and graphite blowtorch molds are presented to demonstrate the effectiveness of XRM imaging.","PeriodicalId":236326,"journal":{"name":"2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"98 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2023-03-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133997050","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0