A Centrally-Anchored High-Q Tunable Piezoelectric MEMS Resonators FOR Wide Temperature Range RTC

Abstract

This paper reports on the design, simulation and characterization of a high-Q centrally-anchored piezoelectrical AlN-on-silicon MEMS resonator for real-time clock (RTC) application in a wide temperature range. Using electrostatic tuning for temperature compensation decoupled from resonator transduction, this work introduces a new robust structural resonator design at 496kHz with a stable motional resistance and a substantially large tuning range of 12,000ppm to compensate for frequency variations due to process non-idealities and operation in a wide temperature range of up to 500°C.