2008 IEEE 21st International Conference on Micro Electro Mechanical Systems最新文献_第9页

Speed performance and control of a micromachined linear brownian motor 微机械直线布朗电机的速度性能与控制

2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443746

E. Altintas, E. Sarajlic, K. Bohringer, H. Fujita

{"title":"Speed performance and control of a micromachined linear brownian motor","authors":"E. Altintas, E. Sarajlic, K. Bohringer, H. Fujita","doi":"10.1109/MEMSYS.2008.4443746","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443746","url":null,"abstract":"We report on fabrication and experimental characterization of a linear Brownian motor with a periodic 3-phase electrostatic rectification for unidirectional transport of nanobeads in microfluidic channels. The transport of the beads is performed in 1 mum deep, 2 mum wide PDMS microchannels, which constrain three-dimensional random motion of nanobeads into ID fluctuation, so-called tamed Brownian motion. 2 mum wide and 4 mum separated ITO electrodes are fabricated by lift-off process on a 24x36 mm2 coverglass. After planarization of the surface, a previously fabricated PDMS sheet with microchannels is aligned and sealed with the electrodes. Diluted fluorescent nanobead suspension, 1:1000 and 500 nm in diameter, is introduced and equilibrium of the flow is awaited. Experimental results reveal the influence of electrode spacing, switching sequence (excitation time and Brownian time or diffusion time) and viscosity on the transportation and speed performance of the motor. Average speed is dependent on the switching sequence and it peaks around the expected diffusion time of the particles between electrodes.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126662661","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 1

CMOS-MEMS probes for reconfigurable IC’s 用于可重构集成电路的CMOS-MEMS探头

2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443706

J. Liu, M. Noman, J. Bain, T. E. Schlesinger, G. Fedder

引用次数: 8

Magnetic comb drive actuator 磁梳式驱动器

2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443697

S. Schonhardt, J. Korvink, J. Mohr, U. Hollenbach, U. Wallrabe

引用次数: 7

Flexure-based nanomagnetic actuators and their ultimate scaling limits 基于柔性的纳米磁致动器及其最终缩放极限

2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443762

D.J. Vasquez, J. Judy

引用次数: 3

A novel optical lamellar grating out-of-plane microgyroscope 一种新型光学片层光栅面外微陀螺仪

2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443793

Guangya Zhou, K. Cheo, Y. Du, Siong Fook Chau

引用次数: 2

A piezoelectrically-driven high flow rate axial polymer microvalve with solid hydraulic amplification 一种具有固体液压放大的压电驱动大流量轴向聚合物微阀

2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443708

Xiaosong Wu, Seong-Hyok Kim, C. Ji, M. Allen

{"title":"A piezoelectrically-driven high flow rate axial polymer microvalve with solid hydraulic amplification","authors":"Xiaosong Wu, Seong-Hyok Kim, C. Ji, M. Allen","doi":"10.1109/MEMSYS.2008.4443708","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443708","url":null,"abstract":"We report a piezoelectrically-driven and hydraulically-amplified axial polymer microvalve. The microvalve is normally open, and is fabricated and assembled primarily with stereolithographically fabricated polymer components. An incompressible elastomer is used as a solid hydraulic medium to convert the small axial displacement of a piezoelectric actuator into a large valve head stroke while maintaining a large blocking force. Also, the axial design of the microvalve enables densely-packed valve arrays. One application of this microvalve is in pneumatic tactile displays, some of which require operation against gas pressures up to approximately 90 kPa and switching speeds between 1-200 Hz. The current valve design has a maximum static hydraulic amplification ratio of 5 at 30 V driving voltage and a maximum valve head stroke of 37 mum at 150 V. Under a 94.4 kPa differential pressure, the flow rate of the valve and the closing voltage measure 785 mL/min and 150 V, respectively. In addition, the function of the microvalve as an on-off switch for a pneumatic microbubble tactile actuator is demonstrated.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"50 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127943144","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 15

Catalyst enhanced micro scale batch assembly 催化剂增强了微规模批量组装

2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443844

R. Baskaran, J. Hoo, B. Cheng, K. Bohringer

引用次数: 11

Measurement and evaluation for interface thermal resistance of metal-dielectric layers 金属-介电层界面热阻的测量与评价

2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443690

H. Chien, D. Yao

引用次数: 2

Carbon nanotube arrays on flexible substrate and their field emission characteristics 柔性衬底上的碳纳米管阵列及其场发射特性

2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443752

Ting-Hsien Chen, Sheng-Yi Lu, Chia-Min Lin, W. Hsu, W. Fang

引用次数: 4

Large deformation balloon micro-actuator based on pyrotechnics on chip 基于片上烟火技术的大变形气球微致动器

2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443711

D. Briand, P. Dubois, Leslie Bonjour, L. Guillot, U. Bley

{"title":"Large deformation balloon micro-actuator based on pyrotechnics on chip","authors":"D. Briand, P. Dubois, Leslie Bonjour, L. Guillot, U. Bley","doi":"10.1109/MEMSYS.2008.4443711","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443711","url":null,"abstract":"This communication presents the modeling and the first demonstration of very large deformation balloon actuators based on pyrotechnics on chip. The gas and pressure generated by the combustion of a solid propellant stored in a micromachined cavity lead to the large deformation of the elastic membrane closing the cavity, forming a balloon with a radius of few millimeters. By combining the experimental data obtained on the mechanical properties of the elastic membrane and volume of gas generated per unit of mass of the propellant, design rules were defined for the realization of balloon actuators based on pyrotechnics. The dimensions of the system linked to the volume of propellant allow tuning the amplitude of the deformation of the membrane obtained during its combustion. The pyrotechnic balloon actuator fabricated is capable of large out of plane deflection (up to 6 mm) in few milliseconds. The work performed has generated a strong base for the further development of this actuating technology, especially in space exploration where the use of a combustible in a solid form brings many advantages.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115576505","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 11