Ting-Hsien Chen, Sheng-Yi Lu, Chia-Min Lin, W. Hsu, W. Fang
{"title":"Carbon nanotube arrays on flexible substrate and their field emission characteristics","authors":"Ting-Hsien Chen, Sheng-Yi Lu, Chia-Min Lin, W. Hsu, W. Fang","doi":"10.1109/MEMSYS.2008.4443752","DOIUrl":null,"url":null,"abstract":"This study presents a novel process to batch-fabricated carbon nanotube devices on flexible substrate. In short, the pre-made carbon nanotube (CNT) arrays on Si-wafer are firstly blended with polymer and are then transferred onto a polymer film using chemical-vapor-deposition (CVD) of parylene. This yields CNT arrays on flexible substrates. Electrical measurements reveal that nanotube arrays behave as ohmic conductors and their current-voltage profile is linear. Nanotubes embedded in polymer are then exposed by O2 plasma etching and field emission measurements indicate that exposed nanotube arrays exhibit a low threshold field emission at 0.58 V/mum and field enhancement factor appears to be 5500. Thus, the present devices offer a novel route to flexible FED applcation.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"34 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2008.4443752","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4
Abstract
This study presents a novel process to batch-fabricated carbon nanotube devices on flexible substrate. In short, the pre-made carbon nanotube (CNT) arrays on Si-wafer are firstly blended with polymer and are then transferred onto a polymer film using chemical-vapor-deposition (CVD) of parylene. This yields CNT arrays on flexible substrates. Electrical measurements reveal that nanotube arrays behave as ohmic conductors and their current-voltage profile is linear. Nanotubes embedded in polymer are then exposed by O2 plasma etching and field emission measurements indicate that exposed nanotube arrays exhibit a low threshold field emission at 0.58 V/mum and field enhancement factor appears to be 5500. Thus, the present devices offer a novel route to flexible FED applcation.