Carbon nanotube arrays on flexible substrate and their field emission characteristics

Ting-Hsien Chen, Sheng-Yi Lu, Chia-Min Lin, W. Hsu, W. Fang
{"title":"Carbon nanotube arrays on flexible substrate and their field emission characteristics","authors":"Ting-Hsien Chen, Sheng-Yi Lu, Chia-Min Lin, W. Hsu, W. Fang","doi":"10.1109/MEMSYS.2008.4443752","DOIUrl":null,"url":null,"abstract":"This study presents a novel process to batch-fabricated carbon nanotube devices on flexible substrate. In short, the pre-made carbon nanotube (CNT) arrays on Si-wafer are firstly blended with polymer and are then transferred onto a polymer film using chemical-vapor-deposition (CVD) of parylene. This yields CNT arrays on flexible substrates. Electrical measurements reveal that nanotube arrays behave as ohmic conductors and their current-voltage profile is linear. Nanotubes embedded in polymer are then exposed by O2 plasma etching and field emission measurements indicate that exposed nanotube arrays exhibit a low threshold field emission at 0.58 V/mum and field enhancement factor appears to be 5500. Thus, the present devices offer a novel route to flexible FED applcation.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"34 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2008.4443752","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 4

Abstract

This study presents a novel process to batch-fabricated carbon nanotube devices on flexible substrate. In short, the pre-made carbon nanotube (CNT) arrays on Si-wafer are firstly blended with polymer and are then transferred onto a polymer film using chemical-vapor-deposition (CVD) of parylene. This yields CNT arrays on flexible substrates. Electrical measurements reveal that nanotube arrays behave as ohmic conductors and their current-voltage profile is linear. Nanotubes embedded in polymer are then exposed by O2 plasma etching and field emission measurements indicate that exposed nanotube arrays exhibit a low threshold field emission at 0.58 V/mum and field enhancement factor appears to be 5500. Thus, the present devices offer a novel route to flexible FED applcation.
柔性衬底上的碳纳米管阵列及其场发射特性
提出了一种在柔性衬底上批量制备碳纳米管器件的新工艺。简而言之,硅晶片上预制的碳纳米管(CNT)阵列首先与聚合物混合,然后使用聚对二甲苯的化学气相沉积(CVD)转移到聚合物薄膜上。这就产生了柔性衬底上的碳纳米管阵列。电学测量表明,纳米管阵列表现为欧姆导体,其电流-电压分布是线性的。然后通过O2等离子体刻蚀暴露嵌入聚合物中的纳米管,场发射测量表明,暴露的纳米管阵列表现出0.58 V/mum的低阈值场发射,场增强因子为5500。因此,本装置为灵活的FED应用提供了一条新的途径。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 求助全文
来源期刊
自引率
0.00%
发文量
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信
小红书