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2008 IEEE 21st International Conference on Micro Electro Mechanical Systems最新文献

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Injection and cutting methods of animal cells using a microfluidic chip 使用微流控芯片的动物细胞注射和切割方法
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-05-19 DOI: 10.1109/ROBOT.2008.4543314
A. Ichikawa, Seiya Takahashi, K. Matsukawa, T. Tanikawa, K. Ohba
{"title":"Injection and cutting methods of animal cells using a microfluidic chip","authors":"A. Ichikawa, Seiya Takahashi, K. Matsukawa, T. Tanikawa, K. Ohba","doi":"10.1109/ROBOT.2008.4543314","DOIUrl":"https://doi.org/10.1109/ROBOT.2008.4543314","url":null,"abstract":"We have developed a novel technique for cutting animal cells for an automatic cloning system. Animal cells that have been chemically softened are aspirated into a narrow Teflon tube, which is then inserted into a microfluidic chip containing two orthogonal channels. One of the microchannels aspirates and fixes a cell, while the other cuts the cell with a high velocity fluid flow. The thickness of the aspiration channel is adjustable. Half the volume of the cell is aspirated into the narrow microchannel and high-speed flow is then generated to cut the cell in two. In this report, we describe the cutting and injection methods.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-05-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125110323","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Optical driven master-slave controllable nano-manipulator with real-time force sensing 具有实时力传感的光驱动主从可控纳米机械臂
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443712
K. lkuta, F. Sato, K. Kadoguchi, S. Itoh
{"title":"Optical driven master-slave controllable nano-manipulator with real-time force sensing","authors":"K. lkuta, F. Sato, K. Kadoguchi, S. Itoh","doi":"10.1109/MEMSYS.2008.4443712","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443712","url":null,"abstract":"We have been developing optical driven nano machine to establish innovative research tool for micro biology. Remote manipulation of single cell in liquid with simultaneous reaction force sensing was realized using optically trapped multi-degrees of freedom nano-robots. \"Nano-mover\" was specially designed and fabricated for cell compression, and the reaction force was calculated simultaneously using video image analysis. Real time elasticity measurement of living cell in liquid was successfully demonstrated for the first time.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"57 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115707565","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 19
Determination of the piezoresistivity of microcrystalline silicon-germanium and application to a pressure sensor 微晶硅锗的压阻性测定及其在压力传感器上的应用
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443684
S. Lenci, P. Gonzalez, K. De Meyer, R. Van Hoof, D. Frederickx, A. Witvrouw
{"title":"Determination of the piezoresistivity of microcrystalline silicon-germanium and application to a pressure sensor","authors":"S. Lenci, P. Gonzalez, K. De Meyer, R. Van Hoof, D. Frederickx, A. Witvrouw","doi":"10.1109/MEMSYS.2008.4443684","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443684","url":null,"abstract":"This paper reports for the first time the experimentally obtained piezoresistive coefficients of microcrystalline silicon-germanium (mucSiGe), which is proposed as a new structural material for piezoresistive micro-electromechanical systems (MEMS). We measure the resistance variation of several piezoresistors under a uniform and uniaxial stress provided by a four point bending (4 PB) fixture. The stress values are determined both by theory and from finite elements (FE) simulations. FE simulations are done as well to investigate the potential of using mucSiGe for a piezoresistive pressure sensor application.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"438 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127544255","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
Droplet and particle manipulation in emulsions and suspensions using 3D electro-osmotic micropumps 使用三维电渗透微泵在乳剂和悬浮液中操纵液滴和粒子
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443715
W. Hilber, B. Weiss, M. Mikolasek, R. Holly, K. Hingerl, B. Jakoby
{"title":"Droplet and particle manipulation in emulsions and suspensions using 3D electro-osmotic micropumps","authors":"W. Hilber, B. Weiss, M. Mikolasek, R. Holly, K. Hingerl, B. Jakoby","doi":"10.1109/MEMSYS.2008.4443715","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443715","url":null,"abstract":"This paper presents investigations on droplet and particle manipulation in microfiuidic channels realized in SU-8/glass technology, which is based on a competitive interplay of viscous drag, gravitational, buoyancy and dielectrophoretic forces. The latter are induced by alternating current (AC) driven three-dimensional (3D) stepped electrode arrays in the channel, enabling so called 3D AC electro-osmotic pumping, as it has been proposed recently. Due to size- and density-dependent differences in polarizability, targeted particles resp. droplets in the fluid stream can be slowed down or even pinned above the electrode structures by adjusting the operation parameters of the pump. Hence the presented device can be utilized for simultaneous pumping and manipulation of droplets and particles in emulsions and suspensions.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124928100","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Fabrication and testing of a novel all-diamond neural probe for chemical detection and electrical sensing applications 用于化学检测和电传感应用的新型全金刚石神经探针的制造和测试
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443638
H. Chan, D.M. Aslant, S.H. Wang, G. M. Swain, K. Wise
{"title":"Fabrication and testing of a novel all-diamond neural probe for chemical detection and electrical sensing applications","authors":"H. Chan, D.M. Aslant, S.H. Wang, G. M. Swain, K. Wise","doi":"10.1109/MEMSYS.2008.4443638","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443638","url":null,"abstract":"Fabrication and testing of all-diamond probes for neural applications is reported for the first time. Instead of commonly used silicon, undoped polycrystalline diamond (poly-C) with resistivity of ~105 Omegacm was chosen as the structural material of the probe. In addition, highly boron-doped (resistivity of ~10-3 Omegacm) poly-C film was used as the electrode material due to its excellent electrochemical properties and resistance to chemical attack. The diamond probe consists of 8 electrode sites with diameters ranging from 20 to 150 mum. The measured electrochemical potential window of the poly-C electrode was approximately -0.8 to 1.4 V in 1 M KCl. Initial measurements of electrochemical detection of a neurotransmitter called norepinephrine (NE) are very encouraging.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"75 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126191061","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 13
Parallel electron beam micro-column with self-aligned carbon nanotube emitters 带有自对准碳纳米管发射器的平行电子束微柱
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443666
C. Tsai, J. Ho, T. Ono, M. Esashi
{"title":"Parallel electron beam micro-column with self-aligned carbon nanotube emitters","authors":"C. Tsai, J. Ho, T. Ono, M. Esashi","doi":"10.1109/MEMSYS.2008.4443666","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443666","url":null,"abstract":"In this paper, we have proposed, fabricated and characterized a parallel electron beam micro-column with single-stranded carbon nanotube (CNT) filed emitters. The integrated micro-column consists of a self-aligned CNT field emitter array (FEA), and a multi-layered electrostatic Si focusing lens array. In our design, the emitters, gate and electrostatic lens array are electrically isolated, and each source can be controlled individually. Electron emission performance of the fabricated CNT/Si emitter was characterized. The best turn-on fields, defined as the field required to generate an emission current of 1 nA, were approximately 6 V. When applying a gate voltage of 100 V, a 110 nA anode current is measured. It is seen that CNT/Si emitter showed low threshold voltage; however, the emission current fluctuation was high during high voltage operation.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125435305","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Linear tuning of the resonant frequency in tilting oscillators by an axially loaded suspension flexure 通过轴向加载的悬架挠曲对倾斜振荡器的谐振频率进行线性调谐
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443742
T. Shmilovich, S. Krylov
{"title":"Linear tuning of the resonant frequency in tilting oscillators by an axially loaded suspension flexure","authors":"T. Shmilovich, S. Krylov","doi":"10.1109/MEMSYS.2008.4443742","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443742","url":null,"abstract":"In this work we present a novel approach for fine linear tuning of resonant frequency in tilting oscillators and investigate, both theoretically and experimentally, the main features and functionality of the tuning mechanism. The operation principle of the tuning mechanism is based on the application of an axial force to a cantilever-like suspension flexure, built in such a way that the real pivot is replaced by a virtual one, which provides a center of rotation. The axial force is provided by an electrostatic transducer realized in the framework of the single layer multiple close-gap electrodes actuation concept. Devices with three different types of suspensions were fabricated and characterized. Experimental and theoretical results collectively show that the suggested approach can be efficiently implemented for resonant frequency tuning in tilting devices.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"66 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116014789","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Cascaded mechanical alignment for assembling 3D MEMS 级联机械对准装配3D MEMS
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443843
N. Shaar, G. Barbastathis, C. Livermore
{"title":"Cascaded mechanical alignment for assembling 3D MEMS","authors":"N. Shaar, G. Barbastathis, C. Livermore","doi":"10.1109/MEMSYS.2008.4443843","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443843","url":null,"abstract":"We have designed, modeled, and demonstrated a mechanically-driven alignment method that enables the precise positioning of planar (2D) structures at arbitrary orientations to form 3D structures for microelectromechanical systems (MEMS). The method is based on a cascaded set of alignment features patterned on the actuated segments. The technique was demonstrated by assembling a corner-cube retro reflector. The bottom and sides of the corner-cube were initially patterned flat, as three adjacent square plates. The side plates were then actuated simultaneously until the first pair of alignment features engaged. Further actuation of only one of the plates brought both of them to their desired final positions. Starting with an initial misalignment of +/-11deg, the plates were aligned to accuracy within 1deg.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114505064","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator 基于体声模微谐振器两种振动模式的温度测量与补偿
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443597
M. Koskenvuori, V. Kaajakari, T. Mattila, I. Tittonen
{"title":"Temperature measurement and compensation based on two vibrating modes of a bulk acoustic mode microresonator","authors":"M. Koskenvuori, V. Kaajakari, T. Mattila, I. Tittonen","doi":"10.1109/MEMSYS.2008.4443597","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443597","url":null,"abstract":"A method to detect the temperature of a micromechanical resonator by measuring the frequency- shifts of two different eigenmodes is presented. The resonator is a square-extensional bulk-acoustic-resonator with two fundamental modes of vibration. The modes feature different temperature coefficients of the frequency and therefore by measuring the frequency change of both modes of vibration the temperature information can be deduced. The measured temperature is used to mathematically compensate for the temperature induced drift of the second eigenmode. The advantage of the demonstrated in-situ temperature measurement is that as no external temperature sensor is needed, the resonator temperature is accurately measured and hysteresis arising from different temperature time constants for heating and cooling of the sensor and resonator is eliminated.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"291 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114569265","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 23
A charge conversion nanoparticle enhanced microGeiger for alpha, beta, gamma, and neutron detection 电荷转换纳米粒子增强的微盖革用于α， β， γ和中子探测
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443815
C. Whitney, S. Pellegrin, C. Wilson
{"title":"A charge conversion nanoparticle enhanced microGeiger for alpha, beta, gamma, and neutron detection","authors":"C. Whitney, S. Pellegrin, C. Wilson","doi":"10.1109/MEMSYS.2008.4443815","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443815","url":null,"abstract":"This paper reports on a radiation detection platform that uses charge conversion nanoparticles to detect and discriminate all types of radiation. Previous microGeigers only detect beta particles. The microGeiger reported here detects beta particles, along with gammas, alphas and neutrons. The multi-species detecting microGeiger counter contains a biased fill gas that becomes ionized when impinging radiation interacts with tailored nanoparticles to release secondary charged particles. The ionized particles then collect on respectively biased electrodes to register characteristic pulse heights which are analyzed with pulse height spectroscopy techniques. The microGeiger counter uses ceramic injection molding processes to batch fabricate inexpensive devices that are essentially disposable.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"21 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121877851","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
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