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2008 IEEE 21st International Conference on Micro Electro Mechanical Systems最新文献

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Porous nylon with electro-active dopants as flexible sensors and actuators 含电活性掺杂剂的多孔尼龙用作柔性传感器和致动器
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443804
S. Yu, D. Chang, L. Tsao, W. Shih, P. Chang
{"title":"Porous nylon with electro-active dopants as flexible sensors and actuators","authors":"S. Yu, D. Chang, L. Tsao, W. Shih, P. Chang","doi":"10.1109/MEMSYS.2008.4443804","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443804","url":null,"abstract":"This paper presents rapid fabrication process and characterization of porous nylon with electro-active dopants for the applications of flexible tactile sensor array, moisture sensor, and actuator. Porous nylon was used as the matrix integrated on a flexible copper-PI film, which provided flexible mechanical properties. Inside the matrix, polypyrrole was electrochemically deposited on the pre-defined interdigitated copper electrodes and acted as conductive dopant. The electro-mechanical characteristics of the fabricated sensors for different applications were measured. The deformation of the electro-active actuator was simulated.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"12 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122211661","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
Single DNA molecule manipulation by a self-assembled motor protein system 单DNA分子操纵的自组装运动蛋白系统
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443747
J. Miwa, M. Tarhan, H. Fujita, M. Kasahara, R. Yokokawa
{"title":"Single DNA molecule manipulation by a self-assembled motor protein system","authors":"J. Miwa, M. Tarhan, H. Fujita, M. Kasahara, R. Yokokawa","doi":"10.1109/MEMSYS.2008.4443747","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443747","url":null,"abstract":"A lambdaDNA manipulation by motor proteins has been demonstrated by designing a fully self-assembled molecular system. Each end of lambdaDNA was modified by biotin and digoxin, respectively, based on fragment labeling and ligation methods. Digoxin-functionalized end was immobilized on a glass surface coated with anti-digoxigenin antibody. Biotinylated end was freely suspended and experienced Brownian motion in a buffer solution. Streptavidin was introduced to the biotinylated end for the binding with motile biotinylated microtubules. Infusing kinesin and biotinylated microtubules into the system cause microtubule gliding assay on the kinesin-coated surface. During the assay microtubules picked up the streptavidin-labeled end of DNA by biotin and streptavidin binding. It brought the DNA stretching and the phenomena were finally terminated by a release of molecular binding or DNA breakage. The total length achieved over 20 mum, which is the same as DNA contour length.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"51 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129650794","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Microfluidic formation of lipid bilayer array for membrane transport analysis 用于膜运输分析的脂质双层阵列的微流体形成
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443582
S. Ota, Wei-heong Tan, H. Suzuki, S. Takeuchi
{"title":"Microfluidic formation of lipid bilayer array for membrane transport analysis","authors":"S. Ota, Wei-heong Tan, H. Suzuki, S. Takeuchi","doi":"10.1109/MEMSYS.2008.4443582","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443582","url":null,"abstract":"We present a highly parallel and reproducible method for reconstituting an array of lipid bilayers to analyze membrane transport. We infuse buffer/lipid/buffer solutions sequentially into a microchannel with numerous microchambers in its walls and seal each chamber by a lipid bilayer containing membrane proteins. Due to the small volume of the chamber (2 pL), membrane transport of confined fluorescent molecules across the bilayer through the proteins is readily observed as changes in fluorescent intensity. We successfully perform quantitative measurement of the transport flux of fluorescent molecules (calcein) through alpha-hemolysin antibiotic pores.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"45 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126803611","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
High-Q, tunable-gap MEMS variable capacitor actuated with an electrically floating plate 由电浮板驱动的高q、可调间隙MEMS可变电容器
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443622
Hyung SukLee, Y. Yoon, Dong-Hoon Choi, Jun‐Bo Yoon
{"title":"High-Q, tunable-gap MEMS variable capacitor actuated with an electrically floating plate","authors":"Hyung SukLee, Y. Yoon, Dong-Hoon Choi, Jun‐Bo Yoon","doi":"10.1109/MEMSYS.2008.4443622","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443622","url":null,"abstract":"We proposed and developed a new MEMS variable capacitor that resembles the tunable-gap capacitor at first glance, but provides much better Q-factor thanks to reducing series resistance by the elimination of mechanical spring in the RF signal pathway using a new actuation method of moving electrically floating plate. The fabricated variable capacitor showed almost 200 % increment of Q- factor from the conventional tunable-gap capacitor. In addition, a variable capacitor array connected in parallel with four capacitors for larger capacitance was fabricated and measured. We achieved a tuning ratio of 41 % and (Q -factor of 34.9 at 5 GHz for the single capacitor and the tuning ratio of 29 % and (Q -factor of 39.8 at 1 GHz for the capacitor array.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116190259","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 29
A low-loss 1.8GHz monolithic thin-film piezoelectric-on-substrate filter 低损耗1.8GHz单片薄膜压电基板滤波器
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443621
W. Pan, R. Abdolvand, F. Ayazi
{"title":"A low-loss 1.8GHz monolithic thin-film piezoelectric-on-substrate filter","authors":"W. Pan, R. Abdolvand, F. Ayazi","doi":"10.1109/MEMSYS.2008.4443621","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443621","url":null,"abstract":"A 1.8 GHz thin-film piezoelectric-on-substrate (TPoS) filter with insertion loss of less than 4 dB and bandwidth of 18 MHz (50Omega termination) is presented in this paper. Such filters are alternatives to conventional ladder-type filters working in the frequency range of up to a few GHz. A monolithic TPoS filter is a coupled mode system based on a single composite resonant structure, with a thin piezoelectric layer deposited on a high acoustic velocity, low loss substrate layer. An interdigitated top electrode structure is used that eliminates the spurious modes and provides a mechanism for adjusting the bandwidth.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"176 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126000473","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 35
A Knudsen pump using nanoporous zeolite for atmospheric pressure operation 利用纳米多孔沸石进行常压操作的克努森泵
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443587
N. Gupta, Y. Gianchandani
{"title":"A Knudsen pump using nanoporous zeolite for atmospheric pressure operation","authors":"N. Gupta, Y. Gianchandani","doi":"10.1109/MEMSYS.2008.4443587","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443587","url":null,"abstract":"This paper describes the use of naturally occurring nanoporous zeolite (clinoptilolite) for a miniature Knudsen pump. Based on the principle of thermal transpiration, these pumps have no moving parts, and are attractive for applications ranging from gas analyzers to cooling systems. The Knudsen pump requires flow channels that are in the free molecular or transitional flow regimes. Consequently, at atmospheric pressure, the pore diameters should be les100 nm, and large numbers of pores are necessary to permit meaningful flow. The initial prototype, operating at ap50 K above room temperature, achieves a flow rate of ap0.12 seem with a small pressure load at the output, or a maximum pressure of ap2.5 kPa when the flow is blocked. Its packaged volume is 55times55times12 mm .","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"16 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130479630","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
A novel self-heating paraffin membrane micro-actuator 一种新型自热石蜡膜微致动器
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443710
F. Goldschmidtboing, P. Katus, A. Geipel, P. Woias
{"title":"A novel self-heating paraffin membrane micro-actuator","authors":"F. Goldschmidtboing, P. Katus, A. Geipel, P. Woias","doi":"10.1109/MEMSYS.2008.4443710","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443710","url":null,"abstract":"We present for the first time a thermal phase-change micro-actuator that is based on a \"conductive\" paraffin. The conductive paraffin approach addresses the key challenges in the design of thermal phase-change actuators: The efficiency is increased, the reaction time is reduced and the heating of the surrounding structures is also reduced compared to the standard paraffin actuator design with metal heating resistors. A novel fabrication process for diaphragm actuators has been established and sample actuators have been characterized. It turns out that the conductive paraffin actuator is slightly more efficient than actuators with buried heaters, while the fabrication process is much simpler.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132934526","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 17
Enhanced toxic gas detection using a MEMS preconcentrator coated with the metal organic framework absorber 利用包覆金属有机框架吸收剂的MEMS预富集器增强有毒气体检测
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443635
J. Yeom, I. Oh, C. Field, A. Radadia, Z. Ni, B. Bae, J. Han, R. Masel, M. Shannon
{"title":"Enhanced toxic gas detection using a MEMS preconcentrator coated with the metal organic framework absorber","authors":"J. Yeom, I. Oh, C. Field, A. Radadia, Z. Ni, B. Bae, J. Han, R. Masel, M. Shannon","doi":"10.1109/MEMSYS.2008.4443635","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443635","url":null,"abstract":"Widespread and timely sensing of explosives, toxic chemicals and industrial compounds needs fast, sensitive detection technology that is affordable and portable. Many gas detectors developed for portable applications are based on sensing a change in resistivity or other non-selective material properties, often leading to low sensitivity and selectivity. In this paper, we report a new generation of the UIUC MEMS gas preconcentrator (muGPC) and its integration into a microfluidic M-8 (muM8) detector to demonstrate an enhanced overall detection limit and selectivity in detecting a toxic gas simulant. The integration creates a portable sensor to sniff an analyte of interest at concentration of 10 ppb or below.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"2011 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133572468","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 14
A multistage in-plane micro-thermoelectric cooler 一种多级平面内微热电冷却器
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443787
A. Gross, Baoling Huang, G. Hwang, C. Lawrence, N. Ghafouri, Sang Woo Lee, Hanseup Kim, C. Uher, M. Kaviany, K. Najafi
{"title":"A multistage in-plane micro-thermoelectric cooler","authors":"A. Gross, Baoling Huang, G. Hwang, C. Lawrence, N. Ghafouri, Sang Woo Lee, Hanseup Kim, C. Uher, M. Kaviany, K. Najafi","doi":"10.1109/MEMSYS.2008.4443787","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443787","url":null,"abstract":"This paper presents a mutli-stage thermoelectric micro cooler designed for integration with a wide variety of MEMS devices, including MEMS resonators, which benefit from decreased phase noise at low temperatures. The cooler is fabricated using a multilayer process that allows the device to achieve thermal isolation greater than 10,000 K/W while still maintaining mechanical robustness for practical applications. Co-evaporated thin film bismuth telluride and antimony telluride are used as the thermoelectric materials. The cooler is 9 x 9 mm2 and a preliminary prototype has achieved cooling of 3.8 K, comparable to values predicted using a one-dimensional mathematical model.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"4 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132626928","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Application of vorticella’s feeding mechanism as a micromixer vorticella进料机构在微混合器中的应用
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443716
M. Nagai, M. Oishi, N. Sakaki, O. Ducloux, M. Oshima, H. Asai, H. Fujita
{"title":"Application of vorticella’s feeding mechanism as a micromixer","authors":"M. Nagai, M. Oishi, N. Sakaki, O. Ducloux, M. Oshima, H. Asai, H. Fujita","doi":"10.1109/MEMSYS.2008.4443716","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443716","url":null,"abstract":"The microorganism, vorticella, of about 50 mum in diameter was found to be capable of mixing beads in microfluidic channel by energizing vortex with its cilia. Vortex generation and flow velocity around the cell body of a vorticella was experimentally studied using both fluorescents and non-fluorescents microbeads of different size (from 0.5 to 20 mum in diameter). Two vortices in two-dimensional flow (single vortex in three-dimensional space) with a diameter of around 400 mum were observed. An average flow rate of 200 mum/s was measured between the centers of the vortex. The induced flow was also found to be powerful enough to move 20-mum beads. We integrated vorticella and microchannel successfully.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127845084","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
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