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2008 IEEE 21st International Conference on Micro Electro Mechanical Systems最新文献

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Low phase-noise UHF thin-film piezoelectric-on-substrate LBAR oscillators 低相位噪声超高频薄膜压电基板LBAR振荡器
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443830
H. M. Lavasani, Reza Abdolvand, Farrokh Ayazi
{"title":"Low phase-noise UHF thin-film piezoelectric-on-substrate LBAR oscillators","authors":"H. M. Lavasani, Reza Abdolvand, Farrokh Ayazi","doi":"10.1109/MEMSYS.2008.4443830","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443830","url":null,"abstract":"This paper reports on the first demonstration of a low phase-noise 467 MHz temperature-compensated oscillator based on a ZnO-on-nanocrystalline diamond lateral bulk acoustic resonator (LBAR). The temperature compensation is achieved by using a thin silicon-dioxide buffer layer on the surface of the diamond film. The oscillator performance is compared with an uncompensated 496 MHz AIN-on-silicon oscillator. The sustaining circuitry is comprised of a 9.4 mW tunable transimpedance amplifier (TIA) in 0.18 mum CMOS. The phase-noise is measured below -80dBc/Hz at 1kHz offset with temperature drift of < -4ppm/degC from -5degC to 90degC.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"195 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128196850","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 14
A micromechanical electrometer approaching single-electron charge resolution at room temperature 一种在室温下接近单电子电荷分辨的微机械静电计
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443814
J.E.-Y. Lee, Y. Zhu, A. Seshia
{"title":"A micromechanical electrometer approaching single-electron charge resolution at room temperature","authors":"J.E.-Y. Lee, Y. Zhu, A. Seshia","doi":"10.1109/MEMSYS.2008.4443814","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443814","url":null,"abstract":"We report a MEMS electrometer with a measured charge noise floor approaching the single-electron threshold (4 e/radicHz) in air at room temperature. The electrometer is based on a modulated capacitor constructed from a micromechanical resonator, which converts DC charge at the input to an output AC voltage with primary frequency components at twice the modulation frequency. The result presented herein confirms earlier results obtained through analytical modeling and provides a path towards achieving sub-electron charge resolution at room temperature.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128933134","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
A compact microfluidic continuous flow separator for particle and cell sorting 一种用于颗粒和细胞分选的紧凑型微流控连续流分离器
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443650
P. Lillehoj, Nan Li, H. Tsutsui, Chih-Ming Ho
{"title":"A compact microfluidic continuous flow separator for particle and cell sorting","authors":"P. Lillehoj, Nan Li, H. Tsutsui, Chih-Ming Ho","doi":"10.1109/MEMSYS.2008.4443650","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443650","url":null,"abstract":"This paper presents the development of a microfluidic device capable of continuous particle and cell separation. Pillars are placed within the microchannel to alter the fluid flow pathway, allowing particles of a certain size to be diverted toward a specified route. Polystyrene beads, 45 mum and 90 mum in diameter, were used to characterize the device; 100 % of the larger particles and 94 % of the smaller particles went to their respective bins at a rate of 5 beads/sec. Experiments were also performed with mouse embryoid bodies (EBs), which could also be separated into two groups according to their size.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125899339","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Active plasmonic devices based on ordered Au nanodisk arrays 基于有序金纳米盘阵列的有源等离子体器件
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443754
Yuebing Zheng, V. Hsiao, T. Huang
{"title":"Active plasmonic devices based on ordered Au nanodisk arrays","authors":"Yuebing Zheng, V. Hsiao, T. Huang","doi":"10.1109/MEMSYS.2008.4443754","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443754","url":null,"abstract":"This paper demonstrates an active plasmonic device that is based on an ordered array of Au nanodisks embedded in photoresponsive liquid crystals (LCs). The switch utilizes the photo-induced phase transition of azobenzene-doped LCs, a transition that results in different refractive indices of the LCs experienced by incident light. The localized surface plasmon resonance (LSPR) of the Au nanodisks depends on the refractive index of the disks' surroundings. Because of this dependence, a change in refractive index of the LCs causes the LSPR to shift and thereby generates the switching effects. Discrete dipole approximation (DDA) calculations of the LSPR shifts are also presented.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"68 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127265445","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Design and characterization of a biomedical device capable of pico-CI level beta detection for the study of cell metabolism 一种生物医学装置的设计和特性，能够进行pico-CI水平的β检测，用于细胞代谢的研究
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443647
Z. Yu, N. Vu, C. Shu, K. Kamei, R. Silverman, O. Witte, C. Radu, A. Chatziioannou, H. Tseng
{"title":"Design and characterization of a biomedical device capable of pico-CI level beta detection for the study of cell metabolism","authors":"Z. Yu, N. Vu, C. Shu, K. Kamei, R. Silverman, O. Witte, C. Radu, A. Chatziioannou, H. Tseng","doi":"10.1109/MEMSYS.2008.4443647","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443647","url":null,"abstract":"A new system is being developed to allow imaging of charged particles in microfluidic chip using position sensitive avalanche photodiodes (PSAPD). The new imaging system was created by placing the PSAPD detector with close proximity to the PDMS microchip. The new system therefore is capable of quantifying tiny amounts of these radiolabeled probes over time. The PSAPD can be used for the direct detection of positrons and other charged particles. In our studies, the performance of the system has been carried out. A gradient of solution containing radioactive positron emitting fluorodeoxyglucose (FDG) was imaged from a microchip. Results have shown that sensitivities as low as 56 plusmn 0.1 pCi in a 4 mm2 region of interest (ROI) (14 pCi/mm2) and line pair spatial resolution of 0.5 mm can be achieved. Moreover, the application to cell biology was successfully performed in which currently radioactive signal from less than one hundred cells can be detected and resolved clearly in the system.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127407728","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
An implantable wireless microdosimeter for radiation oncology 一种用于放射肿瘤学的可植入无线微剂量计
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443641
C. Son, B. Ziaie
{"title":"An implantable wireless microdosimeter for radiation oncology","authors":"C. Son, B. Ziaie","doi":"10.1109/MEMSYS.2008.4443641","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443641","url":null,"abstract":"Wireless measurement of ionizing radiation in close proximity or within an irradiated solid tumor is extremely valuable for dose verification and quality control in radiation oncology. For such applications, it is preferable to manufacture such sensors using passive components since high levels of ionizing radiation can damage active electronics. This paper reports on the development of an implantable micromachined passive LC transponder (2.5 mm in diameter and 2.8 cm in length.) Dose measurement is performed by monitoring the resonance frequency change associated with the decay of surface change of an electret upon exposure to radiation. The test results show that a dose of 30 Gy can produce 1.46 MHz frequency shift resulting in a sensitivity of 49 kHz/Gy.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"123 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126705188","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Organic semiconductor based strain sensors for input system on flexible oleds 基于有机半导体的柔性oled输入系统应变传感器
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443803
M. Muraki, S. Takamatsu, K. Matsumoto, I. Shimoyama
{"title":"Organic semiconductor based strain sensors for input system on flexible oleds","authors":"M. Muraki, S. Takamatsu, K. Matsumoto, I. Shimoyama","doi":"10.1109/MEMSYS.2008.4443803","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443803","url":null,"abstract":"We developed an organic semiconductor based strain sensor sheet for an input system on flexible OLEDs. As resistors for strain gauges, we used a conductive polymer of poly (3, 4 - ethylenedioxythiophene) (PEDOT):polystyrenesulfonate (PSS) which is useful for touch input devices. This is because PEDOT: PSS has the advantages of flexibility and transparency. The strain sensor array was fabricated with the Parylene peel-off process. The resistance change of the fabricated PEDOT-based sensor was measured on diverse radii of curved surfaces. Finally, we demonstrated the capability to accept input by touching the sensor sheet both on flat and curved surfaces.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114342384","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Microneedle arrays for intracellular recording applications 细胞内记录应用的微针阵列
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443644
J. Held, J. Gaspar, P. Koester, C. Tautorat, A. Cismak, A. Heilmann, W. Baumann, A. Trautmann, P. Ruther, O. Paul
{"title":"Microneedle arrays for intracellular recording applications","authors":"J. Held, J. Gaspar, P. Koester, C. Tautorat, A. Cismak, A. Heilmann, W. Baumann, A. Trautmann, P. Ruther, O. Paul","doi":"10.1109/MEMSYS.2008.4443644","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443644","url":null,"abstract":"This paper reports on the fabrication and application of microneedles for the electroporation of adherently growing cells and intracellular recording with focus on the influence on external factors on the cell behavior. Patch-on-chip methods such as patch-clamp have been applied mostly to individual cells in suspension. However, in the human body most of cells are adherently growing cells, which motivated the development of a new chip design. The chip contains an array of 64 microneedles occupying a total area of approximately 1 mm2. The microneedles are fabricated using dry etching of silicon, followed by an insulation, metallization and passivation. The passivation layer is opened at the tip of the needles in order to expose the metal for cell positioning via dielectrophoresis, cell electroporation, as well as intracellular recording. Various needles with diameters in the sub-micron range and heights below 10 mum have been fabricated. Heart muscle cells, fibroblasts, and primary neuronal cells of mice were grown on these microneedle arrays. To electrically access the intracellular space, the cells were electroporated with a voltage of plusmn2 V. Preliminary tests show that more than 80% of the cells could successfully be porated.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114501656","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 24
Nano/micro lipid monodispersed droplets formation based on flow instability 基于流动不稳定性的纳米/微脂质单分散液滴形成
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443731
Y. Wen, I. Yang, Ching-Chang Cheing, F. Tseng
{"title":"Nano/micro lipid monodispersed droplets formation based on flow instability","authors":"Y. Wen, I. Yang, Ching-Chang Cheing, F. Tseng","doi":"10.1109/MEMSYS.2008.4443731","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443731","url":null,"abstract":"In this paper, we report a novel method to generate sub-micron size droplet. By suitably designing the micro-channel device and controlling the fluids, we can induce the occurs of Kelvin-Helmholtz instability to make a lot of droplet forming with a sub-micron diameter. The size is much smaller than droplet generated by most physical or mechanical method. Further, we observe the process of sub-micron droplet formation with high speed camera and high magnification optical microscope.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122269455","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Identifying degradation mechanisms in RF MEMS capacitive switches 识别射频MEMS电容开关的退化机制
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443619
R. Herfst, P. Steeneken, J. Schmitz
{"title":"Identifying degradation mechanisms in RF MEMS capacitive switches","authors":"R. Herfst, P. Steeneken, J. Schmitz","doi":"10.1109/MEMSYS.2008.4443619","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443619","url":null,"abstract":"In this paper we demonstrate how different degradation mechanisms of RF MEMS capacitive switches can be identified by carefully examining changes in key aspects of the measured C-V curves. We show that C-V curve narrowing can occur either due to mechanical deformation or to laterally inhomogeneous dielectric charging. We also show how these two degradation mechanisms can be distinguished by monitoring the change in the pull-in and pull-out voltages. Our measurements indicate that both degradation mechanisms do indeed occur in practice, depending on the stress conditions.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126619804","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 19
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