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2008 IEEE 21st International Conference on Micro Electro Mechanical Systems最新文献

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Mechanical rectifier for micro electric generators 微型发电机用机械整流器
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443825
S. Nagasawa, T. Suzuki, Y. Takayama, K. Tsuji, H. Kuwano
{"title":"Mechanical rectifier for micro electric generators","authors":"S. Nagasawa, T. Suzuki, Y. Takayama, K. Tsuji, H. Kuwano","doi":"10.1109/MEMSYS.2008.4443825","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443825","url":null,"abstract":"In this paper we propose a mechanical rectifier for micro electric generators. Since micro electric generators usually produce alternating-current power, innovation ideas for DC outputs are strongly demanded. Electric rectifiers are one of solutions; however, electric rectifier circuits using semiconductor elements have a threshold voltage. It means that the electric generator has to generate higher voltage than the threshold or needs initial external energy for correct operations. Our idea is to use a mechanical rectifier fabricated by MEMS techniques. In this paper a seismic generator with an electret are employed as a micro electric generator. A micro cantilever doubles as a counter electrode for the electret and a mechanical switch in an electric rectifier circuit, we discuss the feasibility for the mechanical rectifier using the micro cantilever and confirm the validity of the whole system by a basic experiment.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125724838","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
A new method to determine the mechanical resonance frequency, quality factor and charging in electrostatically actuated MEMS 提出了一种确定静电驱动MEMS中机械谐振频率、质量因数和充电的新方法
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443741
S. Kalicinski, H. Tilmans, M. Wevers, I. De Wolf
{"title":"A new method to determine the mechanical resonance frequency, quality factor and charging in electrostatically actuated MEMS","authors":"S. Kalicinski, H. Tilmans, M. Wevers, I. De Wolf","doi":"10.1109/MEMSYS.2008.4443741","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443741","url":null,"abstract":"In this paper, a novel technique to characterize MEMS is described. The technique is based on electric admittance measurements of electrostatically actuated MEMS. Characteristic parameters such as the unbiased (or true mechanical) resonance frequency, quality factor and charge dependent built-in voltage, are extracted from the measured admittance in a two-step computation procedure. The obtained parameters may serve as monitors of both mechanical and electrical changes in tested devices, what makes this technique suitable for reliability assessment of various types of electrostatically driven MEMS.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"374 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120886121","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Fuel and CO2 self-exchange system with micro fluid channels for a micro direct methanol fuel cell 用于微型直接甲醇燃料电池的带有微流体通道的燃料和二氧化碳自交换系统
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443816
H. Uehara, S. Morishita, A. Kamitani, H. Onishi, H. Kotaki
{"title":"Fuel and CO2 self-exchange system with micro fluid channels for a micro direct methanol fuel cell","authors":"H. Uehara, S. Morishita, A. Kamitani, H. Onishi, H. Kotaki","doi":"10.1109/MEMSYS.2008.4443816","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443816","url":null,"abstract":"This paper shows a self-exchange system to supply liquid fuel and to exhaust CO2 spontaneously for micro direct methanol fuel cell (muDMFC). The system performs effectively and continuously without any circulation loops and external pumps. The fuel is carried to the anode due to capillary force. The system is consisted of a hydrophobic porous membrane and two comb-shape channels. It was confirmed that the muDMFC works with a less differential pressure than1 kPa between a fuel inlet and a CO2 outlet. The fuel supply rate of only several mul/min/cm2 was needed for the DMFC to work. Furthermore, the fuel supply rate was spontaneously varied along the electric current with constant pressure.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121230062","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Cell manipulation in microsystems for clinical and biological applications 用于临床和生物学应用的微系统细胞操作
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443591
M. Toner, D. Irimia
{"title":"Cell manipulation in microsystems for clinical and biological applications","authors":"M. Toner, D. Irimia","doi":"10.1109/MEMSYS.2008.4443591","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443591","url":null,"abstract":"The mission of the center is to develop and promote living-cell-based microdevices as key technologies in medicine and biological sciences. By integrating engineering methods and biological research into novel microsystem technologies, we aim to provide unique capabilities to biomedical investigators to probe, manipulate, engineer, and analyze biological cells for diagnostic, prognostic and therapeutic advances and basic biology discovery. This brief review describes our recent work in microchips for blood analysis, microfabricated living cell arrays, and microfluidic gradient generators for studies of cellular chemotaxis.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"117 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124912598","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Non-equilibrium electrokinetic nanofluidic mixers 非平衡电动纳米流体混合器
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443735
D. Kim, A. Raj, L. Zhu, R. Masel, M. Shannon
{"title":"Non-equilibrium electrokinetic nanofluidic mixers","authors":"D. Kim, A. Raj, L. Zhu, R. Masel, M. Shannon","doi":"10.1109/MEMSYS.2008.4443735","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443735","url":null,"abstract":"We propose a new type of micro/nano fluidic mixer based on non-equilibrium electrokinetics and demonstrate its mixing capacity. We fabricate the device with two-step reactive ion etching, one for a nanochannel and one for a microchannel. Mixing is achieved by strong vortex structures formed near the micro/nano channel interface. We expect the proposed device to be beneficial in the development of micro total analysis systems, since it is simple in its design yet with minimal fabrication complications.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121509914","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Packaged MEMS micromirrors for cryogenic environment 用于低温环境的封装MEMS微镜
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443767
S. Waldis, F. Zamkotsian, P. Lanzoni, W. Noell, N. D. de Rooij
{"title":"Packaged MEMS micromirrors for cryogenic environment","authors":"S. Waldis, F. Zamkotsian, P. Lanzoni, W. Noell, N. D. de Rooij","doi":"10.1109/MEMSYS.2008.4443767","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443767","url":null,"abstract":"We are developing single-crystalline silicon micromirror arrays (MMA) for future generation infrared multiobject spectroscopy (IRMOS). Arrays of 5times5 gold-coated micromirrors were packaged and tested at below 100 K. The gold-coating and the cryogenic compatibility are crucial for the application in an IR MOS. The micromirrors could be actuated before, during and after cryogenic testing. The surface deformation of the uncoated 100 mum times 200 mum micromirrors is below 10 nm peak-to-valley (PTV), 35 nm for single-side gold coated mirrors and 17 nm for double-side gold coating. In cryogenic environment the PTV of the gold coated mirrors increased from 35 nm to 50 nm, thus still remaining in the requirements of < lambda/20 for lambda > 1 mum.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"44 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125162853","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Post-CMOS integration technology of thick-film SOI MEMS devices using micro bridge interconnections 利用微桥互连的厚膜SOI MEMS器件的后cmos集成技术
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443667
H. Takao, T. Ichikawa, T. Nakata, K. Sawada, M. Ishida
{"title":"Post-CMOS integration technology of thick-film SOI MEMS devices using micro bridge interconnections","authors":"H. Takao, T. Ichikawa, T. Nakata, K. Sawada, M. Ishida","doi":"10.1109/MEMSYS.2008.4443667","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443667","url":null,"abstract":"This paper reports a new post-CMOS process to integrate thick (>10 mum) SOI MEMS devices after standard CMOS process, which requires only three additional photomask steps. The additional MEMS processes are not severe and critical for the integrated CMOS devices. In this technology, high aspect ratio SOI MEMS devices and CMOS integrated circuits are electrically connected with 'micro bridge interconnection' fabricated by batch processing. Metal interconnections are placed on oxide bridge structures that are connecting between electrically isolated CMOS areas and MEMS areas in active layer of thick SOI wafer in order to connect the MEMS electrodes to terminals in CMOS circuits. This fabrication technology can be applicable widely to high-dense integration of monolithic CMOS/MEMS on thick-SOI wafers.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122504088","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Experimental study on the dielectric-deformation behavior of SIO2 in a sandwich structure 夹层结构中SIO2介电变形行为的实验研究
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443691
Jian Wang, Lidong Liu, Youhua Gao, Xiaoming Liu, Erzhi Wang
{"title":"Experimental study on the dielectric-deformation behavior of SIO2 in a sandwich structure","authors":"Jian Wang, Lidong Liu, Youhua Gao, Xiaoming Liu, Erzhi Wang","doi":"10.1109/MEMSYS.2008.4443691","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443691","url":null,"abstract":"The ANSOFT software and its applation to electrical fields simulation were briefly introduced. In combination with forced-air cooling isolated-phase bus (IPB), the numerical simulation of electrical fields inside IPB was given. The simulation results indicate that the structure inside IPB mainly influence on the electrical field distribution. Based on numerical simulation analysis of ANSOFT, it is helpful for insulation design and optimization design of IPB.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131122981","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Monolithically fabricated polymermems 3-axis thermal accelerometers designed for automated wirebonder assembly 单片制造的聚合物mems三轴热加速度计设计用于自动线焊机组装
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443797
S. Tsang, A. Ma, K. Karim, A. Parameswaran, A. Leung
{"title":"Monolithically fabricated polymermems 3-axis thermal accelerometers designed for automated wirebonder assembly","authors":"S. Tsang, A. Ma, K. Karim, A. Parameswaran, A. Leung","doi":"10.1109/MEMSYS.2008.4443797","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443797","url":null,"abstract":"This paper reports on two novel 3-axis thermal accelerometers based on different mechanical structures that are fabricated using polyimide PI-2611, and assembled using a standard wire-bonder. One accelerometer design has an un-amplified linear DC sensitivity of plusmn45 muV/g, plusmn60 muV/g, and plusmn35 muV/g on the X, Y, and Z axes respectively. The second design has a sensitivity of plusmn17 muV/g, plusmn8.5 muV/g, and plusmn14 muV/g respectively. Both accelerometers are assembled by applying a lateral push to each of the out-of-plane parts using an unmodified wire-bonder. This paper will detail the fabrication, design, assembly, and functional results of the two 3-axis thermal accelerometer designs.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"25 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127814567","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 37
Rubidium vapor cellwith integrated nonmetallic multilayer reflectors 集成非金属多层反射器的铷蒸汽电池
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443775
M. A. Perez, U. Nguyen, S. Knappe, E. Donley, J. Kitching, A. Shkel
{"title":"Rubidium vapor cellwith integrated nonmetallic multilayer reflectors","authors":"M. A. Perez, U. Nguyen, S. Knappe, E. Donley, J. Kitching, A. Shkel","doi":"10.1109/MEMSYS.2008.4443775","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443775","url":null,"abstract":"This paper reports on a method for improving the optical efficiency of micromachined reflectors integrated in rubidium vapor cells. A hybrid bulk micromachining and multilayer thin film process is used to form the reflectors on angled sidewalls, which redirect laser light through the vapor cell and back toward the plane of the source with reduced optical power loss. The optical return efficiency of two paired dielectric reflectors is shown to be improved by as much as eight times over silicon reflectors alone. The D1 absorption line in a one cubic millimeter miniature alkali 87 Kb vapor cell by use of two integrated thin film reflectors is experimentally demonstrated.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"76 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127996484","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
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