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2008 IEEE 21st International Conference on Micro Electro Mechanical Systems最新文献

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Wristband-like droplet platform by digital microfluidic modularizations 数字微流控模块化的腕带式液滴平台
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443729
H. Yang, W. Hsu, S. Fan
{"title":"Wristband-like droplet platform by digital microfluidic modularizations","authors":"H. Yang, W. Hsu, S. Fan","doi":"10.1109/MEMSYS.2008.4443729","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443729","url":null,"abstract":"Here a wristband-like platform is successfully demonstrated by the modularization technique of digital microfluidics. With proposed \"plug-and-play\" interfaces, various digital microfluidic modules can be easily assembled and disassembled, which is beneficial for module replacements and complex system integrations. Droplets are manipulated by electrowetting in a wristband-like platform consisting two flexible modules, a basic connecting module, and an I/O connecting module. Droplets can be smoothly driven on the platform by electrowetting at the speed up to 105.7 mm/s when the supplying voltage is 120 VAC and the switching frequency is 70 Hz.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123999702","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Coupling evaporation-based, microfluidic concentration and confocal fluorescence spectroscopy 基于蒸发的耦合、微流控浓度和共聚焦荧光光谱
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443627
C. Puleo, H. Yeh, K. Liu, T. Rane, T. Wang
{"title":"Coupling evaporation-based, microfluidic concentration and confocal fluorescence spectroscopy","authors":"C. Puleo, H. Yeh, K. Liu, T. Rane, T. Wang","doi":"10.1109/MEMSYS.2008.4443627","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443627","url":null,"abstract":"Detection limits in confocal fluorescence spectroscopy (CFS) have traditionally been restrained by the low molecular detection efficiencies associated with femtoliter probe volumes. In this report, we address this issue by designing a microfluidic evaporator capable of accepting large sample volumes and concentrating biomolecules to a nanoliter-sized, interrogation chamber. Single molecule fluorescence detection within this chamber is enhanced through microfluidic recirculation, enabling single molecule analysis comparable to traditional capillary-based platforms. Proof of concept is demonstrated using a 10X sample concentrator upstream to a 5 nanoliter CFS detection chamber and recording the subsequent increase in single molecule fluorescent bursts. This marriage of active microfluidics and sample processing, and CFS technology offers a novel means of overcoming the limits of single molecule detection in solution.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"128 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125777142","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Air flow senser for an insect-like flapping wing 昆虫状扑翼的气流传感器
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443806
H. Takahashi, E. Iwase, K. Matsumoto, L. Shimoyama
{"title":"Air flow senser for an insect-like flapping wing","authors":"H. Takahashi, E. Iwase, K. Matsumoto, L. Shimoyama","doi":"10.1109/MEMSYS.2008.4443806","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443806","url":null,"abstract":"This paper reports on a thin piezoresistive cantilever for measuring air flow velocity around flapping wings. To measure the air flow velocity at a point of the wing directly, our sensor was attached to the leading edge of the wing. The sensor was designed to be 1 mum thick. Because of the scale effect, the influence of the inertial force was small during flow measurement. The sensor had the sensitivity of 0.56 - 0.96 times 10-3 (m/s)-2 as well as the directivity. By using the micro flow sensor, we measured the perpendicular air flow velocity at the point of the leading edge of the wing.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"43 6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126171312","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Modeling and validation of electrostatic actuation in aqueous ionic media 水离子介质中静电驱动的建模与验证
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443694
V. Mukundan, P. Ponce, H. Butterfield, B. Pruitt
{"title":"Modeling and validation of electrostatic actuation in aqueous ionic media","authors":"V. Mukundan, P. Ponce, H. Butterfield, B. Pruitt","doi":"10.1109/MEMSYS.2008.4443694","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443694","url":null,"abstract":"Operation of electrostatic actuators in liquid media has various proposed applications, especially in biological environments. We present circuit models based on electric double layer theories to estimate the frequency-dependent force response of electrostatic actuators in ionic media. This model is particularly useful for predicting the characteristic frequency required to operate the devices. Further, the impedance characteristics of test structures are measured and matched to determine the relevant circuit components. The values obtained from impedance and actuation experiments are compared with the predictions from theory to validate the models.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"174 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124767272","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Reconfigurable filters using mems resonators and integrated optical microcavities 使用mems谐振器和集成光学微腔的可重构滤波器
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443769
M. Pruessner, T. Stievater, W. Rabinovich
{"title":"Reconfigurable filters using mems resonators and integrated optical microcavities","authors":"M. Pruessner, T. Stievater, W. Rabinovich","doi":"10.1109/MEMSYS.2008.4443769","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443769","url":null,"abstract":"An in-plane silicon-on-insulator (SOI) MEMS-tunable Fabry-Perot microcavity filter is presented, in which one distributed Bragg reflector (DBR) mirror is attached to a doubly-clamped suspended beam resonator. We improve upon previous designs by utilizing a silicon waveguide cavity instead of an air cavity. The design eliminates a significant source of optical loss (beam divergence) leading to improved mirror bandwidth (>150nm) and Q-factor QOptical ap4,200). By keeping one DBR mirror fixed and displacing the second mirror, we change the effective cavity length and modify the Fabry-Perot resonances. Tuning over Deltalambdaap10 nm is measured using in-plane electrostatic actuation to displace the DBR. The application of the device as a sensor is also discussed.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128305710","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 9
Fabrication method of sub-micrometer size planar gap for the micro fabry-perot interferometer 微法布里-珀罗干涉仪亚微米尺寸平面间隙的制备方法
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443661
T. Dohi, H. Hayashi, H. Onoe, K. Matsumoto, I. Shimoyama
{"title":"Fabrication method of sub-micrometer size planar gap for the micro fabry-perot interferometer","authors":"T. Dohi, H. Hayashi, H. Onoe, K. Matsumoto, I. Shimoyama","doi":"10.1109/MEMSYS.2008.4443661","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443661","url":null,"abstract":"This paper reports on a fabrication method of sub-micrometer size tunable planar gaps for micro Fabry-Perot interferometers. We made an upper unit with a movable sub-micrometer step and a lower unit, separately. The upper unit was picked up and transferred to the lower unit by the stamping apparatus, and bonded to the lower unit by fusion bonding. Since the force during fusion bonding acts within a few nanometers only, the sub-micrometer size planar gap can be built. By using this fabrication method, we fabricated the 850 nm gap with a movable planar mirror of 500 mum in diameter. The gap was changed from 825 nm to 1020 nm by applying the voltage of 24 V.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129673072","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Highly sensitive micro coriolis mass flow sensor 高灵敏度微科氏质量流量传感器
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443807
J. Haneveld, T. Lammerink, Marcel Dijkstra, H. Droogendijk, M. D. de Boer, R. Wiegerink
{"title":"Highly sensitive micro coriolis mass flow sensor","authors":"J. Haneveld, T. Lammerink, Marcel Dijkstra, H. Droogendijk, M. D. de Boer, R. Wiegerink","doi":"10.1109/MEMSYS.2008.4443807","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443807","url":null,"abstract":"We have realized a micromachined micro Coriolis mass flow sensor consisting of a silicon nitride resonant tube of 40 mum diameter and 1.2 mum wall thickness. Actuation of the sensor in resonance mode is achieved by Lorentz forces. First measurements with both gas and liquid flow have demonstrated a resolution in the order of 10 milligram per hour. The sensor can simultaneously be used as a density sensor.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128954218","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 33
Internal electrical phase inversion for FF-beam resonator arrays and tuning fork filters 高频光束谐振器阵列和音叉滤波器的内部电相位反转
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443834
Jize Yan, A. Seshia, K. L. Phan, J. V. van Beek
{"title":"Internal electrical phase inversion for FF-beam resonator arrays and tuning fork filters","authors":"Jize Yan, A. Seshia, K. L. Phan, J. V. van Beek","doi":"10.1109/MEMSYS.2008.4443834","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443834","url":null,"abstract":"This paper reports on a novel MEMS electrical phase inverter resonator filter driving using differential DC bias. The internal electrical phase inverter mechanism is demonstrated by a clamped-clamped (CC) beam resonator and wire coupled free-free (FF) beam resonator arrays with in-phase or differential DC-bias. The filter performance is then demonstrated by an anchor coupled double-ended tuning fork (DETF) resonator and is realized in a silicon microfabrication process. The filter bandwidth is voltage tunable employing the electrical spring softening effect and the minimum tunable bandwidth is set by the energy coupling between neighbouring modes.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132037225","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 15
Limits of quality factor in bulk-mode micromechanical resonators 体模微机械谐振器质量因子的限制
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443596
S. Chandorkar, M. Agarwal, R. Melamud, R. Candler, K. Goodson, T. Kenny
{"title":"Limits of quality factor in bulk-mode micromechanical resonators","authors":"S. Chandorkar, M. Agarwal, R. Melamud, R. Candler, K. Goodson, T. Kenny","doi":"10.1109/MEMSYS.2008.4443596","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443596","url":null,"abstract":"In this paper we present the dominant energy loss mechanisms and quality factor (Q) limits in bulk mode micromechanical resonators. We demonstrate that in resonators with an appropriately designed stem connection to anchor the maximum achievable Q limit is set by either Thermoelastic dissipation (TED) or the Akhieser effect (AKE). Furthermore, we suggest a choice of materials for achieving maximum Q's in micromechanical resonators. It is established here that silicon resonators can theoretically achieve higher Q's than quartz and we predict that by using alternative materials, such as silicon carbide, it is possible to surpass the Q of quartz by more than an order of magnitude.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"19 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126211310","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 154
Implantable RF-coiled chip packaging 可植入射频线圈芯片封装
2008 IEEE 21st International Conference on Micro Electro Mechanical Systems Pub Date : 2008-01-28 DOI: 10.1109/MEMSYS.2008.4443604
W. Li, D. Rodger, Y. Tai
{"title":"Implantable RF-coiled chip packaging","authors":"W. Li, D. Rodger, Y. Tai","doi":"10.1109/MEMSYS.2008.4443604","DOIUrl":"https://doi.org/10.1109/MEMSYS.2008.4443604","url":null,"abstract":"In this paper, we present an embedded chip integration technology that utilizes silicon housings and flexible parylene radio frequency (RF) coils. As a demonstration of this technology, a flexible parylene RF coil has been integrated with an RF identification (RFID) chip. The coil has an inductance of 16 muH, with two layers of metal completely encapsulated in parylene-C. The functionality of the embedded chip is verified using an RFID reader module. Accelerated-lifetime soak testing has been performed in saline, and the results show that the silicon chip is well protected and the lifetime of our parylene-encapsulated RF coil at 37degC is more than 20 years.","PeriodicalId":233133,"journal":{"name":"2008 IEEE 21st International Conference on Micro Electro Mechanical Systems","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-01-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126234413","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 17
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