D. Denisov, M. Ustyugova, V. Frolova, Denis Mashoshin, Ismail Gafarov
{"title":"The analysis of the errors of the dynamic interferometry method \u0000in the control of local surface inhomogeneities of the nanometer level of the profiles of optical parts","authors":"D. Denisov, M. Ustyugova, V. Frolova, Denis Mashoshin, Ismail Gafarov","doi":"10.51368/2307-4469-2022-10-1-71-89","DOIUrl":"https://doi.org/10.51368/2307-4469-2022-10-1-71-89","url":null,"abstract":"","PeriodicalId":228648,"journal":{"name":"ADVANCES IN APPLIED PHYSICS","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2022-03-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129732752","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}