{"title":"The recent progress of the semiconductor silicon technology \n(a review)","authors":"A. Naumov, D. Orekhov, N. Kulchitsky","doi":"10.51368/2307-4469-2022-10-1-34-52","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":228648,"journal":{"name":"ADVANCES IN APPLIED PHYSICS","volume":"33 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-03-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ADVANCES IN APPLIED PHYSICS","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.51368/2307-4469-2022-10-1-34-52","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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