半导体硅技术的最新进展(综述)

{"title":"半导体硅技术的最新进展(综述)","authors":"A. Naumov, D. Orekhov, N. Kulchitsky","doi":"10.51368/2307-4469-2022-10-1-34-52","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":228648,"journal":{"name":"ADVANCES IN APPLIED PHYSICS","volume":"33 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-03-10","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"The recent progress of the semiconductor silicon technology \\n(a review)\",\"authors\":\"A. Naumov, D. Orekhov, N. Kulchitsky\",\"doi\":\"10.51368/2307-4469-2022-10-1-34-52\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":228648,\"journal\":{\"name\":\"ADVANCES IN APPLIED PHYSICS\",\"volume\":\"33 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2022-03-10\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"ADVANCES IN APPLIED PHYSICS\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.51368/2307-4469-2022-10-1-34-52\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"ADVANCES IN APPLIED PHYSICS","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.51368/2307-4469-2022-10-1-34-52","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}