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The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.最新文献

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Parallelization of chip-based fluorescence immuno-assays with quantum-dot labeled beads 量子点标记珠的芯片荧光免疫分析并行化
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1497271
M. Grumann, L. Riegger, L. Pastewka, T. Brenner, R. Zengerle, J. Ducrée, T. Nann, J. Riegler, O. Ehlert, K. Mittenbuhler, G. Urban
{"title":"Parallelization of chip-based fluorescence immuno-assays with quantum-dot labeled beads","authors":"M. Grumann, L. Riegger, L. Pastewka, T. Brenner, R. Zengerle, J. Ducrée, T. Nann, J. Riegler, O. Ehlert, K. Mittenbuhler, G. Urban","doi":"10.1109/SENSOR.2005.1497271","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497271","url":null,"abstract":"This paper presents an optical concept for the read-out of a parallel, bead-based fluorescence immunoassay conducted on a lab-on-a-disk platform. The reusable part of the modular setup comprises a detection unit featuring a single LED as light source, two emission-filters, and a color CCD-camera as standard components together with a spinning drive as actuation unit. The miniaturized lab-on-a-disk is devised as a disposable. In the read-out process of the parallel assay, beads are first identified by the color of incorporated quantum dots (QDs). Next, the reaction-specific fluorescence signal is quantified with FluoSpheres-labeled detection anti-bodies. To enable a fast and automated read-out, suitable algorithms have been implemented in this work. Based on this concept, we successfully demonstrated a Hepatitis-A assay on our disk-based lab-on-a-chip.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"16 1","pages":"1114-1117 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"73422692","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Micro-mirror arrays for adaptive optics fabricated in polymer technology 聚合物技术制备自适应光学微镜阵列
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1497329
Christoph Friese, Hans Zappe
{"title":"Micro-mirror arrays for adaptive optics fabricated in polymer technology","authors":"Christoph Friese, Hans Zappe","doi":"10.1109/SENSOR.2005.1497329","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497329","url":null,"abstract":"The combination of full-wafer bonding with a polymer technology for the fabrication of deformable micro-mirrors is presented. A self-supporting membrane mirror fabricated using SU-8 can be used for adaptive optical systems. Electrostatic actuation is used in combination with an electrode array beneath the membrane to deform the mirror. The mechanical properties of the SU-8 polymer are such that the forces required for deflection are reduced, thus increasing mirror flexibility and sensitivity, but the fabrication process is simple and potentially low cost. The described technology can also be used to produce other types of membrane devices such as pressure sensors, pumps or valves.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"67 1","pages":"1342-1345 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"79844286","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Low loss K-band tunable bandpass filter using micromachined variable capacitors 采用微机械可变电容的低损耗k波段可调谐带通滤波器
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1496641
Jong-Man Kim, Sanghyo Lee, Jaehyoung Park, Jung-Mu Kim, C. Baek, Y. Kwon, Yong-Kweon Kim
{"title":"Low loss K-band tunable bandpass filter using micromachined variable capacitors","authors":"Jong-Man Kim, Sanghyo Lee, Jaehyoung Park, Jung-Mu Kim, C. Baek, Y. Kwon, Yong-Kweon Kim","doi":"10.1109/SENSOR.2005.1496641","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496641","url":null,"abstract":"In this paper, a low loss K-band tunable bandpass filter with micromachined variable capacitors has been designed and fabricated, and its electrical performance has been measured. All elements of the tunable filter were fabricated using a surface micromachining technology and subsequent releasing process. The fabricated chip size was 2.75 mm/spl times/1 mm. The measured initial center frequency was 20.7 GHz with a low insertion loss of 2.2 dB. In the analog operating region of the capacitor, the center frequency could be tuned from 20.7 to 18 GHz, which means a tuning-ratio of 13%. The maximum analog-mode capacitance ratio is 1.31 with an actuation voltage of 35 V. With a bias voltage of 60 V, the membrane collapsed to the bottom electrode and the center frequency was changed to 15.5 GHz, thus the tuning ratio is 25%. In this case, the capacitance ratio was calculated to be 1.9.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"42 1","pages":"1071-1074 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"82466175","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 16
Simplified circuit modeling and fabrication of intrabody communication devices 体内通信装置的简化电路建模与制作
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1496454
Keisuke Hachisuka, Yusuke Terauchi, Yoshinori Kishi, T. Hirota, Ken Sasaki, H. Hosaka, K. Ito
{"title":"Simplified circuit modeling and fabrication of intrabody communication devices","authors":"Keisuke Hachisuka, Yusuke Terauchi, Yoshinori Kishi, T. Hirota, Ken Sasaki, H. Hosaka, K. Ito","doi":"10.1109/SENSOR.2005.1496454","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496454","url":null,"abstract":"Intrabody communication using the human body as the transmission medium enables wireless communication without emitting radio waves into the air. Empirical results on signal transmission gain in the frequency range from 1 to 1000 kHz have shown that the two-electrode model, in which only one of the two electrodes of the transmitter and receiver are attached to the human body, has greater gain than the four-electrode model, in which all four electrodes are attached to the human body. Calculated gains based on four-terminal circuit models of two different electrode arrangements agree with experimental results. The validity of the four-terminal circuit models in the MHz frequency band was investigated using a 10.7-MHz intrabody sine-wave transmitter and receiver fabricated for this purpose. The results also indicate that the two-electrode model is more suitable for high-speed intrabody communication devices than the four-electrode model.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"106 1","pages":"461-464 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"76091272","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 103
Temperature-dependent fracture toughness of single-crystal-silicon film 单晶硅薄膜的温度相关断裂韧性
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1496546
S. Nakao, T. Ando, M. Shikida, Kazuo Sato
{"title":"Temperature-dependent fracture toughness of single-crystal-silicon film","authors":"S. Nakao, T. Ando, M. Shikida, Kazuo Sato","doi":"10.1109/SENSOR.2005.1496546","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496546","url":null,"abstract":"We evaluated the fracture toughness of micron-sized single-crystal-silicon film at temperatures ranging from 293 K to 773 K by using an \"on-chip\" tensile testing method. We made a 1-/spl mu/m-long notch on one side of a thin film specimen using a focused ion beam (FIB) process. The fracture toughness was 1.29 MPam/sup 1/2/ at room temperature. It rapidly increased at 353 K, reaching almost double that at room temperature and then saturated at higher temperatures. A few specimens tested at 423 K and 573 K showed a non-linear relationship between stress and strain due to plastic deformation around the notch.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"58 1","pages":"832-835 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87484976","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
A micromachined gyroscope with piezoresistance for both high performance Coriolis-effect detection and torsional vibration monitoring 一种用于高性能科里奥利效应检测和扭振监测的微机械压阻陀螺仪
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1496373
Xuemeng Chen, Xinxin Li, Zhaohui Song, Shusen Huang, Yuelin Wang, J. Jiao, Heng Yang, Ying Zhang
{"title":"A micromachined gyroscope with piezoresistance for both high performance Coriolis-effect detection and torsional vibration monitoring","authors":"Xuemeng Chen, Xinxin Li, Zhaohui Song, Shusen Huang, Yuelin Wang, J. Jiao, Heng Yang, Ying Zhang","doi":"10.1109/SENSOR.2005.1496373","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496373","url":null,"abstract":"A micromachined vibrating gyroscope with a novel piezoresistive scheme is designed, fabricated and tested. A piezoresistive sensing method for Coriolis-acceleration detection is used with both high sensitivity and high resonant frequency. A four-terminal piezoresistive element is used to monitor and stabilize the vibration amplitude of the driving mode through a feedback loop. With the same loop, temperature drift of the gyro's piezoresistive output can be on-chip compensated effectively. The gyro performance is measured, with the following results: resonance frequency in detection mode is 989 Hz; angular rate measurement range is /spl plusmn/ 300/spl deg//s; noise-limited angular rate resolution is 0.33/spl deg//s.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"63 1","pages":"117-120 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"87017600","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Polysilicon packaging and a new anchoring technology for thick SOI MEMS /sub y/namic response model and application to over-damped inertial sensors 厚SOI MEMS /sub /动力学响应模型及其在过阻尼惯性传感器上的应用多晶硅封装和锚定新技术
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1496470
B. Diem, J. Barbe, F. de Crécy, S. Giroud, D. Renaud, H. Grange, J. Hammond, J. Vandemeer, R. Roop, B. Gogoi
{"title":"Polysilicon packaging and a new anchoring technology for thick SOI MEMS /sub y/namic response model and application to over-damped inertial sensors","authors":"B. Diem, J. Barbe, F. de Crécy, S. Giroud, D. Renaud, H. Grange, J. Hammond, J. Vandemeer, R. Roop, B. Gogoi","doi":"10.1109/SENSOR.2005.1496470","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496470","url":null,"abstract":"A new technology has been developed that combines high aspect ratio SOI surface micromachining with polysilicon packaging and a new nitride anchor process with robust release etch manufacturing margin. Based on an accurate damping model, the thickness of the SOI layer was defined to achieve an overdamped mechanical response and high performance on a low g accelerometer. Over-damping is required to filter the noise from parasitic vibration in automotive applications. This technology was designed for low cost and high performance inertial sensors.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"40 1","pages":"527-530 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"86234585","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Particle cytometer utilizing rotating flexural plate modes and capacitive sensing 利用旋转弯曲板模式和电容传感的颗粒细胞仪
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1496490
A. Sathaye, A. Lal
{"title":"Particle cytometer utilizing rotating flexural plate modes and capacitive sensing","authors":"A. Sathaye, A. Lal","doi":"10.1109/SENSOR.2005.1496490","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496490","url":null,"abstract":"We report on capacitive detection and single particle cytometry using rotating flexural plate modes of center-anchored surface micromachined polysilicon disk actuators. Current state-of-the-art cytometry systems are expensive and have bulky laser interrogation subsystems. Therefore, several efforts are underway to miniaturize these systems using microfluidic components such as microvalves and pumps (Chou, H. et al., Solid state sensors and actuators workshop, 1998). However, most of these systems require large off-chip pumps/valves, or high voltages for cell manipulation. We present an integrated system with pumping, trapping, and the ability to integrate one particle for a long time after trapping using a wide variety of surface sensors, all in a potentially battery powered format.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"22 1","pages":"605-608 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83688149","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Development of a wireless environmental sensor system and MEMS-based RF circuit components 开发了一种基于mems的无线环境传感器系统和射频电路元件
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1497489
E. Yoon, K. Yun
{"title":"Development of a wireless environmental sensor system and MEMS-based RF circuit components","authors":"E. Yoon, K. Yun","doi":"10.1109/SENSOR.2005.1497489","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1497489","url":null,"abstract":"This paper reports a miniaturized environmental sensor system integrated with RF communication module. This system has been developed for on-site monitoring of water pollution by heavy metal ions. The system is composed of an electrochemical sensor, a custom potentiostat module, and an RF module for wireless communication. Also, the authors presented monolithic MEMS VCOs integrated with high-Q MEMS inductors and MEMS transmission lines for low-power wireless transceiver applications. Phase noise of the proposed MEMS VCOs has been improved by more than 7 dBc/Hz compared with their CMOS counterparts at 1MHz offset from center frequencies of 5GHz and 13 GHz, respectively.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"59 1","pages":"1981-1985 Vol. 2"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"83985130","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
The frequency design of nozzles layout of the piezoelectrically actuated micro droplet generator based on a fluid-solid interaction modal analysis 基于流固耦合模态分析的压电微液滴发生器喷嘴布置频率设计
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. Pub Date : 2005-06-05 DOI: 10.1109/SENSOR.2005.1496540
Yanying Feng, Zhaoying Zhou, Guibin Du, Junhua Zhu
{"title":"The frequency design of nozzles layout of the piezoelectrically actuated micro droplet generator based on a fluid-solid interaction modal analysis","authors":"Yanying Feng, Zhaoying Zhou, Guibin Du, Junhua Zhu","doi":"10.1109/SENSOR.2005.1496540","DOIUrl":"https://doi.org/10.1109/SENSOR.2005.1496540","url":null,"abstract":"Generally, the behavior of a micro droplet generator is related to its resonant frequency, near which the pressure wave in the liquid chamber reaches maximum amplitude. However, the pressure wave distributes differently under different frequencies, and this leads to the fact that not all nozzles produce droplet ejection in one operating cycle under a certain frequency. Those nozzles not working negatively affect those working well, and even make the device fail. We study numerically and experimentally the effect of nozzle layout on the droplet ejection of a droplet generator with arrayed nozzles. The experimental and numerically predicted results agree very well and prove that only increasing the number of nozzles may not enhance droplet generation, and the design of nozzle layout from the point of view of the pressure wave resonant mode is necessary for a nozzle array droplet generator.","PeriodicalId":22359,"journal":{"name":"The 13th International Conference on Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05.","volume":"4 1","pages":"808-811 Vol. 1"},"PeriodicalIF":0.0,"publicationDate":"2005-06-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"89057523","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
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