Particle cytometer utilizing rotating flexural plate modes and capacitive sensing

We report on capacitive detection and single particle cytometry using rotating flexural plate modes of center-anchored surface micromachined polysilicon disk actuators. Current state-of-the-art cytometry systems are expensive and have bulky laser interrogation subsystems. Therefore, several efforts are underway to miniaturize these systems using microfluidic components such as microvalves and pumps (Chou, H. et al., Solid state sensors and actuators workshop, 1998). However, most of these systems require large off-chip pumps/valves, or high voltages for cell manipulation. We present an integrated system with pumping, trapping, and the ability to integrate one particle for a long time after trapping using a wide variety of surface sensors, all in a potentially battery powered format.