2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)最新文献_第7页

Growth time dependent of high quality graphene on interdigital electrodes for MEMS supercapacitor 高质量石墨烯在MEMS超级电容器数字间电极上的生长时间依赖性

2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) Pub Date : 2017-08-01 DOI: 10.1109/RSM.2017.8069153

H. E. Z. Abidin, A. A. Hamzah, M. A. Mohamed, B. Majlis, Reena Sri Selvarajan

引用次数: 1

Electrical characterization of gold contact on porous silicon layers 多孔硅层上金接触的电学特性

2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) Pub Date : 2017-08-01 DOI: 10.1109/RSM.2017.8069138

M. A. Hussin, M. Abidin

{"title":"Electrical characterization of gold contact on porous silicon layers","authors":"M. A. Hussin, M. Abidin","doi":"10.1109/RSM.2017.8069138","DOIUrl":"https://doi.org/10.1109/RSM.2017.8069138","url":null,"abstract":"Investigation on metallic contact on porous silicon (PS) layers is typically important before final integration into application devices. The electrical characterization of Au thickness of 100 nm and ∼210 nm on ∼3 μm and ∼6 μm PS thickness on PS were studied by measuring the current-voltage (I-V) response. The PS layers of n-type oriented silicon (Si) wafer were prepared by electrochemical etching. Au was deposited on the PS layers using Q150RS automated sputter coater. Based on scanning electron microscope (SEM) images, the thickness of PS was confirmed as 3.07 μm and 6.15 μm for respective samples. The average pore diameter was determined with the aid of ImageJ and Matlab by applying image processing analysis. There were found to be 17.91 μm and 27.26 μm respectively. The I-V curve of PS with Au contact showed significant tendency of Ohmic behaviour compared to non-PS samples that shows Schottky behaviour. The higher conductivity was obtained from sample 3.07 μm of PS thickness with 100 nm Au. Based on this analysis, it can be concluded that thickness of Au and thickness of PS affect the performance of Au-PS device as the conductivity increases as the thickness of Au on PS layers was decreased.","PeriodicalId":215909,"journal":{"name":"2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131677296","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 0

Negative charge dielectrophoresis by using different radius of electrodes for biological particles 采用不同半径的电极对生物颗粒进行负电荷电介质电泳

2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) Pub Date : 2017-08-01 DOI: 10.1109/RSM.2017.8069126

F. W. Yunus, A. A. Hamzah, M. R. Buyong, J. Yunas, B. Majlis

引用次数: 6

Gold nano-particle based Al interdigitated electrode electrical biosensor for specific ssDNA target detection 基于金纳米颗粒的Al交叉指电极电生物传感器用于特异性ssDNA靶标检测

2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) Pub Date : 2017-08-01 DOI: 10.1109/RSM.2017.8069167

R. Rajapaksha, U. Hashim, N. Natasha, M. Uda, V. Thivina, C. Fernando

{"title":"Gold nano-particle based Al interdigitated electrode electrical biosensor for specific ssDNA target detection","authors":"R. Rajapaksha, U. Hashim, N. Natasha, M. Uda, V. Thivina, C. Fernando","doi":"10.1109/RSM.2017.8069167","DOIUrl":"https://doi.org/10.1109/RSM.2017.8069167","url":null,"abstract":"Interdigitated electrode based electrical biosensors are prominent in biosensor field. The large number of finger electrodes as comb structure gain high sensitivity through electrical measurements. Listeria monocytogenes is a serious food borne pathogen based bacterium that can cause dangerous disease to human, some infection may result in death. In here, biosensor was prepared from 1μm gap Aluminum Interdigitated Electrode (Al IDE). Functionalization steps of the Al IDE to create biosensor was based on silanization by APTES, immobilization with Gold Nano particles (GNPs) mixed single stranded Listeria synthetic probe ssDNA with Au nano-particles and blocking with tween-20. Before and after functionalization the sensor was characterized morphologically using SEM images and structurally using EDX spectra. The functionalization steps were electrically characterized using current-voltage measurements. The selectivity of the biosensor with specific target was identified electrically using complementary, non-complementary and single base mismatch ssDNA targets. Blocking step with tween-20 was important to detect target specifically. The obtained variations in current indicate the varied concentrations of Listeria targets and it is confirmed that biosensor is suitable to detect different concentrations in the range from 10 fM to 10 μΜ.","PeriodicalId":215909,"journal":{"name":"2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132042718","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 7

Temperature cycle test study on thick metal passivation cracks 厚金属钝化裂纹的温度循环试验研究

2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) Pub Date : 2017-08-01 DOI: 10.1109/RSM.2017.8069159

H. Ahmataku, R. Sethu

引用次数: 2