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2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)最新文献

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Estimation of thin film stress in buckled MEMS bridge from pull-in voltage 从拉入电压估计屈曲MEMS电桥薄膜应力
2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) Pub Date : 2017-08-01 DOI: 10.1109/RSM.2017.8069121
R. Latif, Muhammad Fahmi bin Jaafar, B. Majlis, M. M. Aqil
{"title":"Estimation of thin film stress in buckled MEMS bridge from pull-in voltage","authors":"R. Latif, Muhammad Fahmi bin Jaafar, B. Majlis, M. M. Aqil","doi":"10.1109/RSM.2017.8069121","DOIUrl":"https://doi.org/10.1109/RSM.2017.8069121","url":null,"abstract":"A simple and easy method to estimate either compressive or tensile thin film stress that exists within the buckled MEMS bridge structure is presented. An array of tantalum MEMS bridge with buckle profile is fabricated at length 570 μm–1620 μm. The distance between the maximum vertical deflection of the fabricated buckled tantalum bridge to the substrate is measured. The analytical pull-in voltage for buckled tantalum bridge at different length is calculated, taking into account the influence of strain and bridge's curvature profile. The pull-in voltage of the fabricated buckled tantalum MEMS bridge is measured and compared to the analytical model. The stress is then estimated by fitting the experimental measurement results to the analytical model using the least mean square method. The presence of stress within the buckled tantalum MEMS bridge structures has been found to be compressive. The average tantalum thin film stress value has been estimated to be ∼0.24 MPa.","PeriodicalId":215909,"journal":{"name":"2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116008570","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
DNA/AuNP-graphene back-gated field effect transistor as a biosensor for lead (II) ion detection DNA/ aunp -石墨烯背门控场效应晶体管作为铅离子检测的生物传感器
2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) Pub Date : 2017-08-01 DOI: 10.1109/RSM.2017.8069165
Ling Hoe Chee, Pradeep Kumar, C. Kang, Z. A. Burhanudin
{"title":"DNA/AuNP-graphene back-gated field effect transistor as a biosensor for lead (II) ion detection","authors":"Ling Hoe Chee, Pradeep Kumar, C. Kang, Z. A. Burhanudin","doi":"10.1109/RSM.2017.8069165","DOIUrl":"https://doi.org/10.1109/RSM.2017.8069165","url":null,"abstract":"Lead is a very toxic substance that causes metabolic disruption by mimicking the chemical profile of other important ions in the human body. The current technique of determining the presence of lead in drinkable water are simply too expensive to be implemented for large-scale real time monitoring. As an alternative, a sensor based on graphene field effect transistor is developed. The graphene layer itself is decorated with gold nanoparticle (AuNP) and it acts as a sensing medium while guanine-rich deoxyribonucleic acid (DNA) that is attached to the AuNP acts as a chemical probe. The guanine-rich DNA forms G-quadruplex when exposed to lead ions and thus changes the overall charge on the surface of the graphene. The changes can be observed via I-V measurement of the sensor. The fabricated sensors are capable of detecting lead ions even at 20 nM concentration. Such a sensor is scalable and can offer a cheap and effective option for monitoring the quality of water in real-time.","PeriodicalId":215909,"journal":{"name":"2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130156484","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Effect of 3D microstructure geometry on wetting properties of PDMS surfaces by micro 3-dimensional (3D) grayscale fabrication technique 三维微观结构几何形状对微三维灰度制备PDMS表面润湿性能的影响
2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) Pub Date : 2017-08-01 DOI: 10.1109/RSM.2017.8069145
I. S. L. A. Hamid, A. A. Manaf
{"title":"Effect of 3D microstructure geometry on wetting properties of PDMS surfaces by micro 3-dimensional (3D) grayscale fabrication technique","authors":"I. S. L. A. Hamid, A. A. Manaf","doi":"10.1109/RSM.2017.8069145","DOIUrl":"https://doi.org/10.1109/RSM.2017.8069145","url":null,"abstract":"We develop a 3D microstructures on polydimethylsiloxane (PDMS) surface by grayscale fabrication technique with a single mask layer. The effect of the microstructures on wetting properties of the surface was studied. Contact angles of pure water droplet were measured on circular pillar, square pillar and hierarchical pillar to investigate the wetting properties. Results shown that the contact angles on the PDMS surface with microstructures increased. The Wenzel wetting mode occurred in all types of microstuctured PDMS surfaces. The contact angle was improved from 105° to 131.89°.","PeriodicalId":215909,"journal":{"name":"2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130797642","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Development of ECG home monitoring system 心电家庭监护系统的研制
2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) Pub Date : 2017-08-01 DOI: 10.1109/RSM.2017.8069119
S. Rafiq, A. Alam, M. R. Islam
{"title":"Development of ECG home monitoring system","authors":"S. Rafiq, A. Alam, M. R. Islam","doi":"10.1109/RSM.2017.8069119","DOIUrl":"https://doi.org/10.1109/RSM.2017.8069119","url":null,"abstract":"Nowadays, the cardiovascular diseases have become one of the leading causes of death. The ECG signal comprises of the electrical signals of the heart that can be used to reveal the heart's condition. This could indicate early health warnings and help prevent fatal incidents. In this paper, a 3-electrodes home ECG monitoring system has been developed and designed to detect the condition of the heart at instant without going to the hospital for precautionary measures. The developed ECG system can be integrated to Wi-Fi LAN or mobile Bluetooth to communicate with doctor for immediate advice. The wet electrodes have been used for acquiring ECG signals of different age groups of people to verify the effectiveness of the system. The acquired ECG signals were verified using the persons' previous medical history.","PeriodicalId":215909,"journal":{"name":"2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126984803","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Sequential experimental strategies of longitudinal unzipping of SWNTs: Selective width of single layer graphene nanoribbon 单壁碳纳米管纵向解压缩的顺序实验策略:单层石墨烯纳米带的选择宽度
2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) Pub Date : 2017-08-01 DOI: 10.1109/RSM.2017.8069173
Hideaki Furuki, T. Fujiwara, A. Termehyousefi, Hirofumi Tanaka
{"title":"Sequential experimental strategies of longitudinal unzipping of SWNTs: Selective width of single layer graphene nanoribbon","authors":"Hideaki Furuki, T. Fujiwara, A. Termehyousefi, Hirofumi Tanaka","doi":"10.1109/RSM.2017.8069173","DOIUrl":"https://doi.org/10.1109/RSM.2017.8069173","url":null,"abstract":"Single-layer graphene nanoribbon (sGNR) is a naturally good conductor and is a promising material for use as nanowiring in next generation computers. We have investigated a new fabrication method of sGNR by using a sonochemical technique to facilitate longitudinal unzipping of single-walled carbon nanotubes. The optimization of the fabrication process is discussed using a statistical analysis method of “Design of Experiment” to obtain the longest sGNR by unzipping of SWNT. The obtained results will contribute to downscaling of integrated circuits in the near future.","PeriodicalId":215909,"journal":{"name":"2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126727771","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Low cost design and fabrication of PDMS microfluidics micromixers for DNA extraction 用于DNA提取的PDMS微流控微混合器的低成本设计与制造
2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) Pub Date : 2017-08-01 DOI: 10.1109/RSM.2017.8069158
A. Ayoib, U. Hashim, S. Gopinath, M. Arshad, N. A. Karim, V. Thivina, N. Nordin, R. Yopop
{"title":"Low cost design and fabrication of PDMS microfluidics micromixers for DNA extraction","authors":"A. Ayoib, U. Hashim, S. Gopinath, M. Arshad, N. A. Karim, V. Thivina, N. Nordin, R. Yopop","doi":"10.1109/RSM.2017.8069158","DOIUrl":"https://doi.org/10.1109/RSM.2017.8069158","url":null,"abstract":"Efficient micromixing is required for fast reaction and improved mixing performance for DNA extraction in microfluidic devices. This study outlines a simple, low cost approach for prototyping design and fabrication of PDMS microfluidics micromixers for DNA extraction. The design is plotted using AutoCAD software and the master template is fabricated using a negative photoresist, SU-8, on a microscopic glass slide. PDMS was used for replication of microfluidics channels to create a microfluidics chip due to its biocompatibility as well as other advantages pertaining to high performance of fluid delivery and biochemical reactions. High power microscopy (HPM) results show successful, insignificant difference in size, <70 μm between the dimensions in the original design on AutoCAD software and the dimensions in PDMS microfluidics after fabrication. FTIR spectra shows peaks between 690 cm−1–1500 cm−1, indicating presence of DNA fragments from the fraction sample pooled at microfluidics outlet, which signifies successful DNA extraction.","PeriodicalId":215909,"journal":{"name":"2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114686047","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Application of BOE and KOH+IPA for fabrication of smooth nanopore membrane surface for artificial kidney BOE和KOH+IPA在制备人造肾脏表面纳米孔膜中的应用
2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) Pub Date : 2017-08-01 DOI: 10.1109/RSM.2017.8069130
K. Mustafa, J. Yunas, A. A. Hamzah, B. Majlis
{"title":"Application of BOE and KOH+IPA for fabrication of smooth nanopore membrane surface for artificial kidney","authors":"K. Mustafa, J. Yunas, A. A. Hamzah, B. Majlis","doi":"10.1109/RSM.2017.8069130","DOIUrl":"https://doi.org/10.1109/RSM.2017.8069130","url":null,"abstract":"This paper reports square silicon nanopore filtration membrane fabrication on <100>-oriented silicon substrate by employing potassium hydroxide (KOH) + isopropyl alcohol (IPA) wet etching. The aim of the study is to get a smooth membrane surface as the nanopore patterning base. A constant heated temperature of 80 °C employing double boil technique is used in both buffer oxide etching (BOE) and KOH etching steps to shorten time taken and get a better surface roughness. 10 minutes quick exposed nitride layer removal is achieved using the constant high temperature setting, while an add-on of 10 % IPA in KOH etchant aids in producing a uniform and smooth etched surface. A smooth surface roughness is required in patterning uniform filtration nanopores later on, and applied as a filtration membrane in artificial kidney.","PeriodicalId":215909,"journal":{"name":"2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132479829","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Deposition temperature dependence of ZnO nanostructures growth using TCVD for EGFET pH sensor 用TCVD法生长EGFET pH传感器的ZnO纳米结构的沉积温度依赖性
2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) Pub Date : 2017-08-01 DOI: 10.1109/RSM.2017.8069124
A. B. Rosli, S. S. Shariffudin, Z. Awang, S. H. Herman
{"title":"Deposition temperature dependence of ZnO nanostructures growth using TCVD for EGFET pH sensor","authors":"A. B. Rosli, S. S. Shariffudin, Z. Awang, S. H. Herman","doi":"10.1109/RSM.2017.8069124","DOIUrl":"https://doi.org/10.1109/RSM.2017.8069124","url":null,"abstract":"This work reports on the ability of ZnO nanostructures deposited using thermal chemical vapour deposition (TCVD) method as the sensing membrane for extendend-gate field effect transistor (EGFET) application. Four samples was prepared at different deposition time ranging from 500 to 650 °C in order to study the effect of deposition temperature on EGFET pH sensor performance. The surface morphology of ZnO was examined using FESEM while its ability as EGFET sensing membrane was evaluated using semiconductor device analyzer. From the FESEM results, the ZnO nanostructures varied when the temperature was increased. The best sensitivity of ZnO nanostructures was found at 600 °C with 51.2 mV/pH of sensitivity and 0.9885 of linearity.","PeriodicalId":215909,"journal":{"name":"2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)","volume":"140 5","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131894846","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Sensitivity increment of one dimensional photonic crystal biosensor 一维光子晶体生物传感器的灵敏度增量
2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) Pub Date : 2017-08-01 DOI: 10.1109/RSM.2017.8069146
M. H. Haron, A. Zain, B. Majlis
{"title":"Sensitivity increment of one dimensional photonic crystal biosensor","authors":"M. H. Haron, A. Zain, B. Majlis","doi":"10.1109/RSM.2017.8069146","DOIUrl":"https://doi.org/10.1109/RSM.2017.8069146","url":null,"abstract":"Designing a high sensitivity device has been a research focus and a requirement in biosensor application. We found out that one of the way to increase the sensitivity of an optical biosensor device is to increase the interaction area between the target analyte and the sensing region of the biosensor device where the light propagates. Using a high quality-factor (Q) one dimensional photonic crystal (1D PhC) biosensor structure based on silicon-on-insulator (SOI) material, we showed here the increase in the device's sensitivity as we gradually increase the analyte interaction area with the device's sensing region, side by side until all area around the sensing region are utilized in the sensing. 3D FDTD simulation tool was used. Final sensitivity is increased by up to 500% — as compared to only utilizing the top part of the 1D PhC. Mode profile analysis of the waveguide shows and suggests that the evanescent field of the guided light and the slotted periodic holes can be exploited for sensing in all direction surrounding the PhC. Analysis of this technique is supported by the optical path length (OPL) of the Fermat's principle theory. This research's output is important in designing a high sensitivity PhC biosensor and also other related optical biosensor device.","PeriodicalId":215909,"journal":{"name":"2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115326727","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Template-assisted growth of highly oriented 3D graphene pH sensor towards new avenues for biosensor 模板辅助生长的高定向3D石墨烯pH传感器为生物传感器开辟了新途径
2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM) Pub Date : 2017-08-01 DOI: 10.1109/RSM.2017.8069150
V. Perumal, N. M. Mohamed, M. S. M. Saheed, M. S. M. Saheed
{"title":"Template-assisted growth of highly oriented 3D graphene pH sensor towards new avenues for biosensor","authors":"V. Perumal, N. M. Mohamed, M. S. M. Saheed, M. S. M. Saheed","doi":"10.1109/RSM.2017.8069150","DOIUrl":"https://doi.org/10.1109/RSM.2017.8069150","url":null,"abstract":"In recent times, the high flexibility and exceptional electrical conductivity of free-standing monolithic 3D graphene has attracted considerable attention in the field of electronic sensor development for real time sensing. In this work, we have synthesized free-standing monolithic 3D graphene through chemical vapor deposition (CVD) using nickel foam as a sacrificial template for pH sensing. The surface and structural morphology were characterized by scanning electron microscopy and Raman spectroscopy. The results show a highly oriented and defect free monolithic 3D graphene which imitates the nickel template surface and the 3D graphene microporous structure firmly retained its structure even after Ni template etching. The voltage versus current and resistance corresponding to pH (pH-4 to pH-10) at constant current of 1μA are detailed in delineated graphs. It shows a linear regression of R = (211.90 −13.67pH) and a measured sensitivity of 13.67 Ω/pH for the developed 3D graphene device. The synthesized 3D graphene paves a way for the development of highly sensitive, selective and flexible sensing platform which presents a new avenue for biosensor development.","PeriodicalId":215909,"journal":{"name":"2017 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)","volume":"659 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122961505","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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