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2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)最新文献

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On-site monitoring of soil condition for precision agriculture by using multimodal microchip integrated with EC and temperature sensors 利用多模态微芯片集成EC和温度传感器对精准农业土壤状况进行现场监测
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6626714
M. Futagawa, Y. Ban, K. Kawashima, K. Sawada
{"title":"On-site monitoring of soil condition for precision agriculture by using multimodal microchip integrated with EC and temperature sensors","authors":"M. Futagawa, Y. Ban, K. Kawashima, K. Sawada","doi":"10.1109/TRANSDUCERS.2013.6626714","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626714","url":null,"abstract":"For precise control of the growth conditions for plants, miniaturized sensor which is capable to insert and measure in medium culture directly is required. Insertion type multimodal sensor including electrical conductivity (EC) and temperature sensor was fabricated. For a visualization of nutrient solution diffusion and a real time monitoring of decreasing concentration for rarifying nutrient solution, the multimodal sensor monitored three difference depths in soil and a limited extent in closed soil, in real time. We achieved to visualize in actual cultivation environment by using the multimodal sensor, for the first time.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115298945","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
The size limit of Al/Ni multilayer rectangular cuboids for generating self-propagating exothermic reaction on a Si wafer Al/Ni多层矩形长方体在硅晶片上产生自扩散放热反应的尺寸极限
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6627170
S. Ito, S. Inoue, T. Namazu
{"title":"The size limit of Al/Ni multilayer rectangular cuboids for generating self-propagating exothermic reaction on a Si wafer","authors":"S. Ito, S. Inoue, T. Namazu","doi":"10.1109/TRANSDUCERS.2013.6627170","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627170","url":null,"abstract":"In this study, the size limit of Al/Ni nano-multilayered rectangular cuboids for the self-propagation of their exothermic reaction on a Si wafer was investigated. After Al/Ni multilayer films were deposited on a Si wafer, micro-sized rectangular cuboids were formed from the films using focused ion beam. By applying a small spark to the cuboids, we have tried to make them exothermic reaction. As the result, both of reacted and unreacted cuboids were found. In the cuboids with higher aspect ratio and smaller one-side length, the reaction easily occurred. The cause of the size effect was discussed in the viewpoint of thermal conductivity of a Si substrate.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"35 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115435525","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
Nano-opto-mechanical (NOM) acoustic wavefront sensor via ring resonators 基于环形谐振器的纳米光机械声波前传感器
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6627273
B. Dong, H. Cai, J. Tsai, P. Kropelnicki, A. Randles, M. Tang, D. Kwong, A. Liu
{"title":"Nano-opto-mechanical (NOM) acoustic wavefront sensor via ring resonators","authors":"B. Dong, H. Cai, J. Tsai, P. Kropelnicki, A. Randles, M. Tang, D. Kwong, A. Liu","doi":"10.1109/TRANSDUCERS.2013.6627273","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627273","url":null,"abstract":"Nano-opto-mechanical systems (NOMS) based sensor is attracting widely attention due to its low cost, small footprint and good capability. Optical enabled NOMS acoustic wavefront sensor offers superior resolution and resilience to electromagnetic interference. In this paper, a novel NOMS acoustic wavefront sensor based on ring resonator array is proposed. The resonance wavelength of the ring resonator is modified by the membrane which is beneath the ring resonator can be deformed by the acoustic pressure. It has merits including high sensitivity, good linearity, CMOS compatibility and ease in integration.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"104 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115693483","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Combined phase-readout and self-calibration of MEMS gyroscopes 微机电系统陀螺仪的相位读出与自校准相结合
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6626928
A. N. Shirazi, G. Casinovi, M. Dalal, F. Ayazi
{"title":"Combined phase-readout and self-calibration of MEMS gyroscopes","authors":"A. N. Shirazi, G. Casinovi, M. Dalal, F. Ayazi","doi":"10.1109/TRANSDUCERS.2013.6626928","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626928","url":null,"abstract":"This paper presents a gyroscope interface architecture that combines readout and self-calibration functions in a reconfigurable fashion. The phase readout and calibration operation relies on the phase shifts observed at the gyroscope outputs with respect to the applied excitations. The proposed electrostatic calibration obviates the use of any additional moving parts or calibration stage. The significance of this work is having shared interface electronics between the readout and calibration configurations, which inherently compensates for the sources of drift in the electronics, resulting in improved calibration accuracy. Experimental data is presented that supports the theoretical analysis of the proposed readout and self-calibration schemes.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"3 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114676966","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 11
Ultra-thin atomic layer deposition films for corrosion resistance 超薄原子层沉积膜耐腐蚀
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6627171
A. Haemmerli, Joseph C. Doll, J. Provine, R. T. Howe, David Goldhaber-Gordon, Beth L. Pruitt
{"title":"Ultra-thin atomic layer deposition films for corrosion resistance","authors":"A. Haemmerli, Joseph C. Doll, J. Provine, R. T. Howe, David Goldhaber-Gordon, Beth L. Pruitt","doi":"10.1109/TRANSDUCERS.2013.6627171","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627171","url":null,"abstract":"We evaluated the chemical and electrochemical corrosion resistance of ultra-thin films deposited via atomic layer deposition (ALD) for potential wafer-scale passivation of biomedical microdevices. A variety of ALD coatings can be deposited conformally on metal or silicon surfaces at low temperature. We were able to protect aluminum electrodes against corrosion in ionic media with a voltage stress of 1V for 200 hours using a double ALD film stack of 5nm Al2O3 and 5nm HfO2.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"24 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114652368","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 10
Hydrochloric acid-impregnated paper for liquid metal microfluidics 液态金属微流控用盐酸浸渍纸
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6627343
Daeyoung Kim, Yunho Lee, Dong-weon Lee, W. Choi, Jeong‐Bong Lee
{"title":"Hydrochloric acid-impregnated paper for liquid metal microfluidics","authors":"Daeyoung Kim, Yunho Lee, Dong-weon Lee, W. Choi, Jeong‐Bong Lee","doi":"10.1109/TRANSDUCERS.2013.6627343","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627343","url":null,"abstract":"We report a method of substantially improving lyophobicity of a paper against gallium-based liquid, using hydrochloric acid (HCl) impregnation. We also report an extremely simple fabrication of microfluidic channels on a HCl-impregnated paper for gallium-based liquid metal, Galinstan®. Paper has many favorable properties in microfluidic applications, such as low cost, abundant supply, easy fabrication, and flexibility. We evaluated lyophobicity of several papers by measuring static and dynamic contact angles with a goal of finding optimal super-lyophobic paper-based substrate for microfluidics applications. We found HCl-impregnated laser printer flattened paper towel shows appropriate super-lyophobicity. We performed a bouncing experiment of a Galinstan® droplet on the HCl-impregnated flattened paper substrate and demonstrated movement of a liquid metal droplet in microfluidic channels formed on the HCl-impregnated paper.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116922688","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 12
A SOI-CMOS compatible smart yarn technology 一种SOI-CMOS兼容的智能纱线技术
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6626723
H. Tu, Yong Xu
{"title":"A SOI-CMOS compatible smart yarn technology","authors":"H. Tu, Yong Xu","doi":"10.1109/TRANSDUCERS.2013.6626723","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626723","url":null,"abstract":"Smart yarns and intelligent textiles have been researched for quite some time. However, most smart yarns and textiles developed so far do not come with sophisticated functionalities due to the fact that silicon-based sensors and CMOS circuits cannot be seamlessly integrated. This paper reports a SOI-CMOS compatible technology to fabricate smart yarns, enabling the monolithic and invisible integration of CMOS and sensors. A tubular shaped parylene smart yarn with reinforcing PMDS core has been developed. Isotropic XeF2 silicon etching and conformal parylene coating were used to form the outer shell and release the electronic/sensing components from a SOI wafer. PDMS cores were injected after the release to reinforce and strengthen the yarns. To prove the concept, silicon strain gauges and MOSFETs were first integrated.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121115064","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
The plastic and creep behavior of silicon microstructure at high temperature 高温下硅显微组织的塑性和蠕变行为
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6626726
S. Yao, D. Xu, B. Xiong, Y. Wang
{"title":"The plastic and creep behavior of silicon microstructure at high temperature","authors":"S. Yao, D. Xu, B. Xiong, Y. Wang","doi":"10.1109/TRANSDUCERS.2013.6626726","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626726","url":null,"abstract":"This paper presents an experimental method to investigate the plastic and creep behavior of single crystal silicon (SCS) microstructure at high temperature. The relationship between plastic deformation and structure dimensions is demonstrated, and the creep curve of microstructure is firstly reported. The plastic and creep behavior of SCS microstructure, which consists of a square diaphragm with a center boss and a vacuum cavity, was investigated by measuring the deformation of the microstructure after undergoing a series of high temperature processes. The experiment results show that the plastic deformation is in inverse ratio to the cube of the diaphragm thickness. The obvious creep was observed at 1100°C. The creep rate decreased with time and then became nearly constant.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127175878","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 5
Multisite wide-area depth transfers of nanoparticles into a soft material via nanotip probe arrays 通过纳米探针阵列将纳米颗粒多位点广域深度转移到软材料中
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6626739
A. Goryu, R. Numano, M. Ishida, T. Kawano
{"title":"Multisite wide-area depth transfers of nanoparticles into a soft material via nanotip probe arrays","authors":"A. Goryu, R. Numano, M. Ishida, T. Kawano","doi":"10.1109/TRANSDUCERS.2013.6626739","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6626739","url":null,"abstract":"We demonstrated a multisite wide-area pinpoint depth transfers of nanoparticles into a soft material via three-dimensional (3D) nanotip probe arrays, for powerful applications including local drug delivery and DNA transfer into biological samples (e.g., cells/neurons and tissues). An array of electrically biased nanoscale tips of the probes enabled multisite traps of polystyrene nanoparticles. Here we demonstrate the multisite wide-area depth transfers of the trapped particles into a soft material of gelatin by simply penetrating the nanotip probe array as a “stamp” usage. These results suggest that the nanotip probe arrays should be applicable to trap numerous particles, including DNA/molecules attached nanoparticles, and realize multisite nanoinjections into biological samples, including tissues and individual cells/neurons.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"27 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124856940","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Optofluidic multiplexing and switching device 光流复用开关装置
2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI: 10.1109/TRANSDUCERS.2013.6627272
L. Brandhoff, E. Weber, S. van den Driesche, M. Bulters, R. Bergmann, M. Vellekoop
{"title":"Optofluidic multiplexing and switching device","authors":"L. Brandhoff, E. Weber, S. van den Driesche, M. Bulters, R. Bergmann, M. Vellekoop","doi":"10.1109/TRANSDUCERS.2013.6627272","DOIUrl":"https://doi.org/10.1109/TRANSDUCERS.2013.6627272","url":null,"abstract":"We present a novel optofluidic multiplexing and switching device in which light switching between different fibers via movable droplets in a liquid core waveguide is realized. The Poly-(dimethylsiloxane) (PDMS)-based device uses aqueous droplets in high index oil to create a movable interruption in the waveguide. Light is thus coupled out at the position of said droplet and then back into adjacent optical fibers. Depending on the amount of output fibers included in the design, this system constitutes either a light switch for one output or a multiplexer when multiple output ports are used.","PeriodicalId":202479,"journal":{"name":"2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)","volume":"30 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2013-06-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125051153","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 4
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