基于环形谐振器的纳米光机械声波前传感器

2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) Pub Date : 2013-06-16 DOI:10.1109/TRANSDUCERS.2013.6627273

B. Dong, H. Cai, J. Tsai, P. Kropelnicki, A. Randles, M. Tang, D. Kwong, A. Liu

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引用次数: 1

摘要

基于纳米光机械系统(NOMS)的传感器以其成本低、占地面积小、性能好等优点而受到广泛关注。光学支持的NOMS声波前传感器提供卓越的分辨率和抗电磁干扰的弹性。提出了一种基于环形谐振器阵列的新型NOMS声波前传感器。环形谐振器的谐振波长由其下的膜所改变，而膜在声压作用下会发生变形。它具有灵敏度高、线性度好、CMOS兼容、易于集成等优点。

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Nano-opto-mechanical (NOM) acoustic wavefront sensor via ring resonators

Nano-opto-mechanical systems (NOMS) based sensor is attracting widely attention due to its low cost, small footprint and good capability. Optical enabled NOMS acoustic wavefront sensor offers superior resolution and resilience to electromagnetic interference. In this paper, a novel NOMS acoustic wavefront sensor based on ring resonator array is proposed. The resonance wavelength of the ring resonator is modified by the membrane which is beneath the ring resonator can be deformed by the acoustic pressure. It has merits including high sensitivity, good linearity, CMOS compatibility and ease in integration.

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2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)

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