ISTFA 2021: Conference Proceedings from the 47th International Symposium for Testing and Failure Analysis最新文献

筛选
英文 中文
Universal Application of Load Board (L/B) and Socket with Direct Current Tester (DCT) for Various Packages 通用应用负载板(L/B)和插座与直流测试仪(DCT)的各种封装
Yi-Sheng Lin, Yu-Hsiang Hsiao, Pei-Yu Tseng, Yu-Jen Chang, Cheng-Hsin Liu, Yu-Ting Lin
{"title":"Universal Application of Load Board (L/B) and Socket with Direct Current Tester (DCT) for Various Packages","authors":"Yi-Sheng Lin, Yu-Hsiang Hsiao, Pei-Yu Tseng, Yu-Jen Chang, Cheng-Hsin Liu, Yu-Ting Lin","doi":"10.31399/asm.cp.istfa2021p0330","DOIUrl":"https://doi.org/10.31399/asm.cp.istfa2021p0330","url":null,"abstract":"\u0000 We develop a new workflow with O/S tester (Direct Current Tester, DCT) to detect quickly the defect location of failure packages, which can be used in the semiconductor industry for E-FA (Electrical Failure Analysis) fault localization for short, leakage, and open defects. This paper introduces the capability and presents two case studies identifying the defect location of solder balls where DCT with defect mapping function is useful as a non-destructive analysis technique. In this paper, the new methodology and application of DCT on open and short defects in various packages with different sizes have been presented. The experimental results of the design testing program and an intender tooling were verified for the accuracy of the defect mapping function in determining the pin location to defect.","PeriodicalId":188323,"journal":{"name":"ISTFA 2021: Conference Proceedings from the 47th International Symposium for Testing and Failure Analysis","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130457791","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Fast and Effective Sample Preparation Technique for Backside Fault Isolation on GaN Packaged Devices GaN封装器件背面故障隔离快速有效的样品制备技术
T. Colpaert, S. Verleye
{"title":"Fast and Effective Sample Preparation Technique for Backside Fault Isolation on GaN Packaged Devices","authors":"T. Colpaert, S. Verleye","doi":"10.31399/asm.cp.istfa2021p0279","DOIUrl":"https://doi.org/10.31399/asm.cp.istfa2021p0279","url":null,"abstract":"\u0000 This paper describes a fast and effective sample preparation method to allow backside fault localization on GaN package devices. Backside analysis by Photon Emission Microscopy (PEM) is becoming preferable to frontside analysis when the die is covered by metal layers. This paper describes an optimized method for backside sample preparation on GaN package devices having a thick heavily doped p-type silicon substrate. The method combines mechanical and chemical deprocessing steps, resulting in a fast and effective sample preparation technique for PEM analysis. Additionally, the laser marking process parameters to facilitate orientation during the final physical failure analysis by Focused Ion Beam (FIB) are also shared.","PeriodicalId":188323,"journal":{"name":"ISTFA 2021: Conference Proceedings from the 47th International Symposium for Testing and Failure Analysis","volume":"363 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115967138","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Recent Developments for the Characterization of Crystals and Defects at the Nanoscale using On-Axis TKD in SEM 扫描电镜上轴TKD表征纳米尺度晶体和缺陷的最新进展
D. Goran, T. Schwager, A. Fanta
{"title":"Recent Developments for the Characterization of Crystals and Defects at the Nanoscale using On-Axis TKD in SEM","authors":"D. Goran, T. Schwager, A. Fanta","doi":"10.31399/asm.cp.istfa2021p0217","DOIUrl":"https://doi.org/10.31399/asm.cp.istfa2021p0217","url":null,"abstract":"\u0000 The development of advanced nanomaterials and nanodevices is dependent on the availability of powerful and reliable characterization techniques. In this context, we developed hardware and software capabilities to help push the spatial resolution limit during orientation mapping in a Scanning Electron Microscope (SEM).","PeriodicalId":188323,"journal":{"name":"ISTFA 2021: Conference Proceedings from the 47th International Symposium for Testing and Failure Analysis","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122550209","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Credits 学分
{"title":"Credits","authors":"","doi":"10.31399/asm.cp.istfa2021fm01","DOIUrl":"https://doi.org/10.31399/asm.cp.istfa2021fm01","url":null,"abstract":"\u0000 Listings of the EDFAS 2021-2022 Board of Directors and ITSTFA 2021 Organizing Committee and Session Chairs.","PeriodicalId":188323,"journal":{"name":"ISTFA 2021: Conference Proceedings from the 47th International Symposium for Testing and Failure Analysis","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134119163","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Demystifying Unexpected Silicon Responses through User-Defined Fault Models (UDFM) and Failure Analysis 通过用户自定义故障模型(UDFM)和故障分析揭开意外硅响应的神秘面纱
Subhadip Kundu, Gaurav Bhargava, L. Endrinal, Lavakumar Ranganathan
{"title":"Demystifying Unexpected Silicon Responses through User-Defined Fault Models (UDFM) and Failure Analysis","authors":"Subhadip Kundu, Gaurav Bhargava, L. Endrinal, Lavakumar Ranganathan","doi":"10.31399/asm.cp.istfa2021p0369","DOIUrl":"https://doi.org/10.31399/asm.cp.istfa2021p0369","url":null,"abstract":"\u0000 Failure Analysis (FA) plays an important role during silicon development and yield ramp up, helping identify critical test, design marginality and process issues in a timely and efficient manner. FA techniques typically rely on diagnosis callouts as a starting point for debug. Diagnostic algorithms rely on the error logs collected on production patterns which are generated to detect Stuck-at Faults (SAF) and Transition Delay Faults (TDF). Typically, SAF patterns screen out the static defects and TDF patterns test for transient fails. But often, we see cases where a SAF pattern shmoo is clean but the TDF pattern shmoo is a gross failure indicating a cell-internal static defect missed by the traditional SAF patterns. In this work, we will present our own developed User-Defined Fault Model, which targets cell-internal faults to explain unexpected silicon observations. An added advantage of the work can be seen in improving diagnosis results on the error logs collected using these targeted UDFM patterns. Since UDFM utilizes targeted fault excitation, the diagnosis algorithm results in better callouts. In this paper, we will also propose a custom diagnosis flow using our in-house UDFM to achieve better resolution. Three FA case studies will be presented to showcase the usefulness and effectivity of the proposed methods.","PeriodicalId":188323,"journal":{"name":"ISTFA 2021: Conference Proceedings from the 47th International Symposium for Testing and Failure Analysis","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124893434","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Pulsing Test for Defect of Resistive Word Line in DRAM Main Cell using WGFMU (Waveform Generator Fast Measurement Unit) 用WGFMU(波形发生器快速测量单元)脉冲检测DRAM主单元电阻字线缺陷
Jaeyun Lee, EuiSeok Kim, JunYeal Lim, SeokHoon Oh, YoungHa Park
{"title":"Pulsing Test for Defect of Resistive Word Line in DRAM Main Cell using WGFMU (Waveform Generator Fast Measurement Unit)","authors":"Jaeyun Lee, EuiSeok Kim, JunYeal Lim, SeokHoon Oh, YoungHa Park","doi":"10.31399/asm.cp.istfa2021p0258","DOIUrl":"https://doi.org/10.31399/asm.cp.istfa2021p0258","url":null,"abstract":"\u0000 In this paper, we compare and describe the difference between the oscilloscope pulsing test and the WGFMU (Waveform Generator Fast Measurement Unit) in analyzing the defect of high resistance in DRAM main cell sample. The nanoprobe system has many constraints in the pulsing analysis utilizing the oscilloscope and pulse generator. There are certain cases where the system cannot support analysis when the saturation current is extremely minimal, such as the DRAM cell. In this paper, we address this constraint and propose a new way to conduct pulsing tests using the WGFMU's arbitrary linear waveform generator in the nanoprobe system.","PeriodicalId":188323,"journal":{"name":"ISTFA 2021: Conference Proceedings from the 47th International Symposium for Testing and Failure Analysis","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116133309","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Automated Metrology on the Verticality of Cross-Sectioned Channel Hole at V-NAND with Over 200 Layers by Transmission Electron Microscope 200层以上v型nand横截面孔洞垂直度的透射电镜自动测量
Dong-yeob Kim, Jong-ick Son, C. H. Kang
{"title":"Automated Metrology on the Verticality of Cross-Sectioned Channel Hole at V-NAND with Over 200 Layers by Transmission Electron Microscope","authors":"Dong-yeob Kim, Jong-ick Son, C. H. Kang","doi":"10.31399/asm.cp.istfa2021p0313","DOIUrl":"https://doi.org/10.31399/asm.cp.istfa2021p0313","url":null,"abstract":"\u0000 In this paper, we present a nanoscale verticality measurement method for V-NAND with 200 or more layers of high layers using an automated transmission electron microscope, which has been developed a lot in the analysis field. Nanoscale measurements in cross-sectional images in 3D-NAND with such a high layer do not include both the top and bottom areas in one image of FOV. Therefore, it is very difficult for a person to objectively measure the etching angle or verticality of the channel hole. We experimented the verticality measurement of a channel hole in the two images in different areas using an automated transmission electron microscope imaging and measurement. In this paper, we present the results and analysis of the experiment and detailed metrology methods.","PeriodicalId":188323,"journal":{"name":"ISTFA 2021: Conference Proceedings from the 47th International Symposium for Testing and Failure Analysis","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115190165","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Pushing Failure Mode Stimulus to Overcome the Limitation/Boundaries of Soft Defect Localization Tools 推失效模式刺激克服软缺陷定位工具的局限性/边界
A. Norico, Rommel Estores
{"title":"Pushing Failure Mode Stimulus to Overcome the Limitation/Boundaries of Soft Defect Localization Tools","authors":"A. Norico, Rommel Estores","doi":"10.31399/asm.cp.istfa2021p0084","DOIUrl":"https://doi.org/10.31399/asm.cp.istfa2021p0084","url":null,"abstract":"\u0000 Temperature dependent failures are some of the most challenging cases that will be encountered by the analyst. Soft Defect Localization (SDL) is a technique used to analyze such temperature-dependent, ‘soft defect’ failures [1]. There are many literatures that discuss this technique and its different applications [2-7]. Dynamic Analysis by Laser Stimulation (DALS) is one of the known SDL implementations [8-11]. However, there are cases where the failure is occurring at a temperature where the laser alone is not sufficient to effectively induce a change of device behavior. In these situations, the analyst needs to think out of the box by understanding how the device will react to external conditions and to make necessary adjustments in DALS settings. This paper will discuss three cases that presents different challenges such as performing DALS analysis where the failing temperature is too high for the laser to induce a change of behavior from ambient temperature, cold temperature failure, complex triggering (Serial Peripheral Interface, SPI), and using an internal signal as input for DALS analysis. The approach used for a successful DALS analysis of each case will be discussed in detail.","PeriodicalId":188323,"journal":{"name":"ISTFA 2021: Conference Proceedings from the 47th International Symposium for Testing and Failure Analysis","volume":"29 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128771814","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Impacts of Substrate Thinning on FPGA Performance and Reliability 衬底薄化对FPGA性能和可靠性的影响
D. Leonhardt, T. Beechem, M. Cannon, N. Dodds, Matthew Fellows, T. Grzybowski, G. Haase, Thomas LeBoeuf, David Lee, William Rice
{"title":"Impacts of Substrate Thinning on FPGA Performance and Reliability","authors":"D. Leonhardt, T. Beechem, M. Cannon, N. Dodds, Matthew Fellows, T. Grzybowski, G. Haase, Thomas LeBoeuf, David Lee, William Rice","doi":"10.31399/asm.cp.istfa2021p0423","DOIUrl":"https://doi.org/10.31399/asm.cp.istfa2021p0423","url":null,"abstract":"\u0000 Global thinning of integrated circuits is a technique that enables backside failure analysis and radiation testing. Prior work also shows increased thresholds for single-event latchup and upset in thinned devices. We present impacts of global thinning on device performance and reliability of 28 nm node field programmable gate arrays (FPGA). Devices are thinned to values of 50, 10, and 3 microns using a micromachining and polishing method. Lattice damage, in the form of dislocations, extend about 1 micron below the machined surface. The damage layer is removed after polishing with colloidal SiO2 slurry. We create a 2D finite-element model with liner elasticity equations and flip-chip packaged device geometry to show that thinning increases compressive global stress in the Si, while C4 bumps increase stress locally. Measurements of stress using Raman spectroscopy qualitatively agree with our stress model but also reveal the need for more complex structural models to account for nonlinear effects occurring in devices thinned to 3 microns and after temperature cycling to 125°C. Thermal imaging shows that increased local heating occurs with increased thinning but the maximum temperature difference across the 3-micron die is less than 2°C. Ring oscillators (ROs) programmed throughout the FPGA fabric slow about 0.5% after thinning compared to full thickness values. Temperature cycling the devices to 125°C further decreases RO frequency about 0.5%, which we attribute to stress changes in the Si.","PeriodicalId":188323,"journal":{"name":"ISTFA 2021: Conference Proceedings from the 47th International Symposium for Testing and Failure Analysis","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124945791","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Wafer Pattern Recognition for Detecting Process Abnormalities in NAND Flash Memory Manufacturing 用于NAND快闪记忆体制造过程异常侦测的晶圆模式识别
Jeongin Choe, Taehyeon Kim, Saetbyeol Yoon, Sangyong Yoon, Ki-Whan Song, J. Song, Myungsuk Kim, Woo Young Choi
{"title":"Wafer Pattern Recognition for Detecting Process Abnormalities in NAND Flash Memory Manufacturing","authors":"Jeongin Choe, Taehyeon Kim, Saetbyeol Yoon, Sangyong Yoon, Ki-Whan Song, J. Song, Myungsuk Kim, Woo Young Choi","doi":"10.31399/asm.cp.istfa2021p0406","DOIUrl":"https://doi.org/10.31399/asm.cp.istfa2021p0406","url":null,"abstract":"\u0000 We have adopted various defect detection systems in the front stage of manufacturing in order to effectively manage the quality of flash memory products. In this paper, we propose an intelligent pattern recognition methodology which enables us to discriminate abnormal wafer automatically in the course of NAND flash memory manufacturing. Our proposed technique consists of the two steps: pre-processing and hybrid clustering. The pre-processing step based on process primitives efficiently eliminates noisy data. Then, the hybrid clustering step dramatically reduces the total amount of computing, which makes our technique practical for the mass production of NAND flash memory.","PeriodicalId":188323,"journal":{"name":"ISTFA 2021: Conference Proceedings from the 47th International Symposium for Testing and Failure Analysis","volume":"77 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-10-31","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126256035","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
相关产品
×
本文献相关产品
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信
小红书