2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems最新文献_第3页

Ambient Temperature-Gradient Compensated Low-Drift Thermopile Flow Sensor 环境温度梯度补偿低漂移热电堆流量传感器

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805423

Marcel Dijkstra, T. Lammerink, M. D. de Boer, R. Wiegerink, M. Elwenspoek

引用次数: 11

Microactuation Utilizing Wafer-Level Integrated SMA Wires 利用晶圆级集成SMA导线的微致动

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805571

Donato Clausi, H. Gradin, S. Braun, J. Peirs, G. Stemme, D. Reynaerts, Wouter van der Wijngaart

引用次数: 5

Temperature-Controlled Transfer and Self-Wiring for Multi-Color Led Display on a Flexible Substrate 柔性基板上多色Led显示屏的温控传输和自布线

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805347

E. Iwase, H. Onoe, A. Nakai, Kiyoshi Matsumoto, I. Shimoyama

引用次数: 2

Topology Optimization for Micro Rotational Mirror Design and Safe Manufacturing 微旋转镜的拓扑优化设计与安全制造

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805559

T. Chen, Z. Liu, J. Korvink, S. Krausse, U. Wallrabe

引用次数: 3

Non-Linear Fluidic Integrated Circuits Realized by Pneumatic-Field Effect Transistors with Controllable Output Resistance 输出电阻可控的气场效应晶体管实现的非线性流体集成电路

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805429

H. Takao, N. Tanaka, M. Sugiura, K. Sawada, M. Ishida

引用次数: 4

A Novel Underwater Actuator Driven by Magnetization Repulsion/Attraction 一种新型的由磁化、排斥/吸引驱动的水下驱动器

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805567

Han-Tang Su, Tsung-Lin Tang, W. Fang

引用次数: 5

Classification and Condensation of Nano-Sized Airborne Particles by Electrically Tunning Collection Size 电调节收集尺寸对纳米级空气粒子的分类和冷凝

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805400

Yong-Ho Kim, S. Kwon, Dongho Park, Jungho Hwang, Yong-Jun Kim

引用次数: 1

Microelectromechanical Metal-Air-Insulator-Semiconductor (MEM-MAIS) Diode: A Novel Hybrid Device for ESD Protection 微机电金属-空气-绝缘体-半导体(mems - mais)二极管:一种新型的ESD保护混合器件

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805336

D. Acquaviva, D. Tsamados, P. Coronel, T. Skotnicki, A. Ionescu

引用次数: 6

Monolithic Centrifugal Microfluidic Platform for Bacteria Capture and Concentration, Lysis, Nucleic-Acid Amplification, and Real-Time Detection 用于细菌捕获和浓缩，裂解，核酸扩增和实时检测的单片离心微流控平台

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805392

J. Garcia-Cordero, I. Dimov, Justin O'Grady, J. Ducrée, T. Barry, A. Ricco

引用次数: 5

Novel Concept of Microwave MEMS Reconfigurable 7X45° Multi-Stage Dielectric-Block Phase Shifter 微波MEMS可重构7X45°多级介电块移相器的新概念

2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems Pub Date : 2009-03-27 DOI: 10.1109/MEMSYS.2009.4805307

N. Somjit, G. Stemme, J. Oberhammer

{"title":"Novel Concept of Microwave MEMS Reconfigurable 7X45° Multi-Stage Dielectric-Block Phase Shifter","authors":"N. Somjit, G. Stemme, J. Oberhammer","doi":"10.1109/MEMSYS.2009.4805307","DOIUrl":"https://doi.org/10.1109/MEMSYS.2009.4805307","url":null,"abstract":"A novel concept of ultra-broadband multi-stage digital-type microwave MEMS phase shifters with the best performance optimized for W-band applications is introduced in this paper. The relative phase shift of 45° of a single stage is achieved by vertically moving a ¿2-long high-resistivity silicon dielectric block above a 3D micromachined coplanar waveguide (3D CPW) by electrostatic actuation, resulting in different propagation constants of the microwave signal for the up-state and the down-state. For full 360° phase-shift capability, seven stages are cascaded. The devices are fabricated and assembled by wafer-scale processes using bulk and surface micromachining. The measurement results of the first prototypes show that the W-band return and insertion loss of a single 45° stage is better than -15 dB and -1.7 dB, respectively, while the 7-stage phase shifter has a return loss better than -12 dB with an insertion loss less than -4 dB. The phase shifters also perform well from 1-110 GHz with the return loss better than -10 dB, an insertion loss of less than -1.5 dB and a fairly linear phase-shift over the whole frequency range and the actuation voltage is 30 V. To the knowledge of the authors this phase shifter is better than all previous works in term of insertion loss, return loss and phase shift per losses (°/dB) from 70-100 GHz.","PeriodicalId":187850,"journal":{"name":"2009 IEEE 22nd International Conference on Micro Electro Mechanical Systems","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2009-03-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114356774","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}

引用次数: 10