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Frequency Stability of 3D Encapsulated VHF MEMS Resonator 三维封装VHF MEMS谐振器的频率稳定性
2018 IEEE International Frequency Control Symposium (IFCS) Pub Date : 2018-05-01 DOI: 10.1109/FCS.2018.8597510
Fengxiang Wang, Q. Yuan, X. Kan, Zeji Chen, Jinling Yang, Fuhua Yang
{"title":"Frequency Stability of 3D Encapsulated VHF MEMS Resonator","authors":"Fengxiang Wang, Q. Yuan, X. Kan, Zeji Chen, Jinling Yang, Fuhua Yang","doi":"10.1109/FCS.2018.8597510","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597510","url":null,"abstract":"Frequency stability of 3D encapsulated VHF MEMS resonators with Q-factor of 10000 are systematically studied. A negating capacitive compensation technique was developed to eliminating the parasitic effect caused by the PCB circuits. The long-term frequency stability results of the resonance frequency variation and the noise floor of Allan Deviation were $pm 1$ ppm and 26 ppb, respectively, which were comparable to these of the typical quartz resonator. The thermal cycling test between −40 °C and 85 °C for both the long-term operation and the temperature cycling were measured and the results show that the resonant frequency drifts were less than $pm$ 1.5 ppm, indicating the high frequency stability of the encapsulated disk resonator.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"34 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127665574","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
SAW Correlators in LiNbO3 and GaN on Sapphire 蓝宝石上LiNbO3和GaN的SAW相关器
2018 IEEE International Frequency Control Symposium (IFCS) Pub Date : 2018-05-01 DOI: 10.1109/FCS.2018.8597441
Siddhartha Ghosh, J. Cafarella
{"title":"SAW Correlators in LiNbO3 and GaN on Sapphire","authors":"Siddhartha Ghosh, J. Cafarella","doi":"10.1109/FCS.2018.8597441","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597441","url":null,"abstract":"This paper describes the use of Lithium Niobate and GaN on sapphire substrates to define SAW correlators for direct sequence spread spectrum modulation. Passive correlators with maximal length sequence periods of 7 and 15 are fabricated and tested on 128° Y-cut bulk Lithium Niobate. The input transducer is modulated at carrier frequencies of 470-930 MHz with a chip duration of 100 n $s$. At the output, a maximum peak-to-sidelobe ratio of 15 dB is measured. The same design is then fabricated in GaN on sapphire in order to incorporate acoustoelectric gain sections using an AlGaN barrier engineered to ensure low sheet density. We consider a basic cell consisting of a tap followed by a gain section to support long correlator structures. This represents a first step towards mitigating acoustic propagation losses in monolithic GaN SAW correlators.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"405 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133536074","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 13
A Low Jitter Monolithic MEMS Thin Film SAW Oscillator in $0.13 mu mathrm{m}$ CMOS $0.13 mu mathm {m}$ CMOS的低抖动单片MEMS薄膜SAW振荡器
2018 IEEE International Frequency Control Symposium (IFCS) Pub Date : 2018-05-01 DOI: 10.1109/FCS.2018.8597474
Ahmad El-Hemeily, S. Ibrahim, M. Atef, Ali Fawzy, Mostafa Essawy, Eslam Helal, E. Saad, Ayman Ahmed, Eloi MarigoFerrer, M. Soundarapandian, Arjun KumarKantimahanti
{"title":"A Low Jitter Monolithic MEMS Thin Film SAW Oscillator in $0.13 mu mathrm{m}$ CMOS","authors":"Ahmad El-Hemeily, S. Ibrahim, M. Atef, Ali Fawzy, Mostafa Essawy, Eslam Helal, E. Saad, Ayman Ahmed, Eloi MarigoFerrer, M. Soundarapandian, Arjun KumarKantimahanti","doi":"10.1109/FCS.2018.8597474","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597474","url":null,"abstract":"The design and measurement of a monolithic low-jitter thin-film surface-acoustic-wave (TFSAW) based oscillator employing an integrated micro-electromechanical systems (MEMS) SAW resonator developed on top of a standard $0.13-mu mathrm{m}$ CMOS technology [1] are presented. All oscillator circuitry is placed under the SAW resonator for efficient area utilization enabling a compact low-cost highly-integrated solution. The oscillator has an oscillation frequency of 323 MHz and power dissipation of 10.5 mW. Measured phase noise performance of the oscillator is −121 dBc/Hz at 10-kHz offset frequency and measured noise floor is a −146 dBc/Hz. The integrated phase jitter from 12 kHz to 20 MHz is less than 160 fs. For a lower power consumption of 5 mW, the phase noise performance is −118 dBc/Hz at 10-kHz offset frequency, −142 dBc/Hz noise floor, and the integrated phase jitter is 212 fs. This performance allows the development of highperformance low-jitter highly-integrated low-cost clocking solutions based on MEMS SAW oscillators replacing traditional quartz crystal and SAW-based discrete solutions.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134618349","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
The 2nd-Harmonic Signal in the Rb Atomic Clock for “Status-of-Health” Monitoring 用于“健康状态”监测的Rb原子钟中的二次谐波信号
2018 IEEE International Frequency Control Symposium (IFCS) Pub Date : 2018-05-01 DOI: 10.1109/FCS.2018.8597488
A. Hudson, J. Camparo
{"title":"The 2nd-Harmonic Signal in the Rb Atomic Clock for “Status-of-Health” Monitoring","authors":"A. Hudson, J. Camparo","doi":"10.1109/FCS.2018.8597488","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597488","url":null,"abstract":"In the Rb atomic frequency standard (RAFS), the 2<sup>nd</sup>harmonic signal, S2, is routinely taken as a “Status-of-Health” indicator for the atomic signal. In part, this role for S<inf>2</inf>derives from the Quasi-Static Approximation (QSA), where harmonic signals are taken as proportional to derivatives of the static lineshape. However, clock operating conditions violate the assumptions of the QSA, and so justification of the relationship between S<inf>2</inf> and <tex>$text{dS}_{1}/mathrm{d}Deltavert_{Delta=0}$</tex> (i.e., the correction signal's slope on resonance) is questionable. To better understand S<inf>2</inf> and its potential as a status-of-health indicator, we are continuing a series of experiments begun in our laboratory. Here, we discuss the role of temperature gradients on S<inf>2</inf>, and the extent to which temperature gradients might or might not influence S<inf>2</inf>'s ability to monitor clock health.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"31 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133035778","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Nanomechanical Disk Resonator-on-Membrane with Pico-Meter Deflection Resolution 具有皮米偏转分辨率的膜上纳米机械圆盘谐振器
2018 IEEE International Frequency Control Symposium (IFCS) Pub Date : 2018-05-01 DOI: 10.1109/FCS.2018.8597529
V. Qaradaghi, A. Ramezany, M. Mahdavi, S. Pourkamali
{"title":"Nanomechanical Disk Resonator-on-Membrane with Pico-Meter Deflection Resolution","authors":"V. Qaradaghi, A. Ramezany, M. Mahdavi, S. Pourkamali","doi":"10.1109/FCS.2018.8597529","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597529","url":null,"abstract":"This paper reports on fabrication of nano mechanical disk resonators on micro-thick membranes and characterization of their resonance frequency shift due to air-pressure induced membrane deflection. Finite element analysis (FEM) has been used to show the estimate deflection at the center of the membrane. For the $20mu mathbf{m}$ thick, 2mm diameter membrane in this work, 1mPa of pressure change corresponds to 2pm of deflection (shear stress of 12Pa at the center of the membrane). Measurements show highest resonator sensitivity of 0.5Hz per pico-meter of deflection at the membrane center. In addition, it is shown that as the dimension of disks decreases from $20mu mathbf{m}$ to $5mu mathbf{m}$, the resonator sensitivity increases by about 8 times.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"9 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123492805","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Micro-Resonator-on-Membrane for Real-Time Biosensing 用于实时生物传感的膜上微谐振器
2018 IEEE International Frequency Control Symposium (IFCS) Pub Date : 2018-05-01 DOI: 10.1109/FCS.2018.8597584
M. Mahdavi, Honglei Wang, Amin Abbasalipour, Walter Hu, S. Pourkamali
{"title":"Micro-Resonator-on-Membrane for Real-Time Biosensing","authors":"M. Mahdavi, Honglei Wang, Amin Abbasalipour, Walter Hu, S. Pourkamali","doi":"10.1109/FCS.2018.8597584","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597584","url":null,"abstract":"This work presents Micro-Resonator-on-Membrane (MRoM) as an effective approach to harness high mass sensitivity of MEMS resonators for real-time label-free biosensing. MRoMs are formed on SOI substrates and are comprised of a Thin-film Piezoelectric-on-Si (TPoS) micro-resonator separated by a thin oxide membrane from the backside cavity in which biological solutions are hosted. The isolating membrane reduces the liquid-resonator interaction and minimizes viscous losses to maintain relatively high resonator quality factor $(Q)$ in contact with liquid. The membrane also insulates the resonator electrical connections from the conductive biological solution eliminating undesirable interferences. In order to minimize the added anchor loss from the membrane connecting the resonator to the substrate, in-plane acoustic reflectors are carved into the device layer around the resonator. Membrane surface modification with antibody and detection of target analyte has been successfully demonstrated for MRoMs. Frequency shift of 90 kHz (805 ppm) has been measured for a 111 MHz 3rd length extensional (LE) mode of an MRoM due to adsorption of anti-mouse-IgG molecules tagged with 10 nm diameter gold nanoparticles with surface density of 1011/cm2. This translates to measured mass sensitivity of −88.9 Hz.cm2/ng","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"26 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"128245189","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Preliminary Evaluation of NRC-FCs2 Fountain Clock at the National Research Council Canada 加拿大国家研究委员会对NRC-FCs2喷泉钟的初步评价
2018 IEEE International Frequency Control Symposium (IFCS) Pub Date : 2018-05-01 DOI: 10.1109/FCS.2018.8597543
S. Beattie, B. Jian, A. JohnAlcock, M. Gertsvolf, R. Hendricks, K. Szymaniec, K. Gibble
{"title":"Preliminary Evaluation of NRC-FCs2 Fountain Clock at the National Research Council Canada","authors":"S. Beattie, B. Jian, A. JohnAlcock, M. Gertsvolf, R. Hendricks, K. Szymaniec, K. Gibble","doi":"10.1109/FCS.2018.8597543","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597543","url":null,"abstract":"At the National Research Council Canada we are currently performing the first accuracy evaluation of our newly developed caesium fountain clock, NRC-FCs2. This primary frequency standard operates with a short term stability of $sigma_{mathbf{y}}(tau)=1.1 mathbf{x} 10^{-13}tau^{-1/2}$ and, upon full evaluation, we expect to achieve a type B uncertainty in fractional frequency below $5 mathbf{x} 10^{-16}$. We will discuss the current status of the evaluation, including several evaluated shifts, as well as the outstanding systematics yet to be fully characterized.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"15 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124873443","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Stress Generation in Terfenol-D Using HBAR for NV Center Based Hybrid Sensor 基于HBAR的NV中心混合传感器Terfenol-D应力生成
2018 IEEE International Frequency Control Symposium (IFCS) Pub Date : 2018-05-01 DOI: 10.1109/FCS.2018.8597442
Ashlesha Patil, K. Saha
{"title":"Stress Generation in Terfenol-D Using HBAR for NV Center Based Hybrid Sensor","authors":"Ashlesha Patil, K. Saha","doi":"10.1109/FCS.2018.8597442","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597442","url":null,"abstract":"The applications for nanoscale local stress sensing span a wide range of fields. The hybrid sensor we study here utilizes the ultrasensitive magnetic field response of the nitrogen vacancy center (NV-center) in diamond in conjunction with the magnetostrictive property of Terfenol-D. We propose and simulate a device model for the experimental verification of local nanoscale stress sensing. We generate spatially varying stress in Terfenol-D with the help of the high-overtone bulk acoustic resonator (HBAR) which is then converted to the magnetic field via the Villari effect. We calculate the stress tensor of Terfenol-D, which is then fed into micromagnetic simulator to obtain magnetic field experienced by the NV ceters.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"170 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131239036","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
The Test on CAPS Experimental System Time Transfer CAPS实验系统时间传递的测试
2018 IEEE International Frequency Control Symposium (IFCS) Pub Date : 2018-05-01 DOI: 10.1109/FCS.2018.8597535
J.F. Wu, R. Yan, Y. Liu, Y. Hu, F.S. Peng, H. Wu
{"title":"The Test on CAPS Experimental System Time Transfer","authors":"J.F. Wu, R. Yan, Y. Liu, Y. Hu, F.S. Peng, H. Wu","doi":"10.1109/FCS.2018.8597535","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597535","url":null,"abstract":"China Area Positioning System (CAPS) is a novel navigation system, in which the satellite transponder without atomic clock onboard is used as navigation satellite. In 2002, a group of Chinese astronomers at the Chinese Academy of Sciences (CAS) presented this new concept. The function of CAPS demonstration system was checked and measured in June 2005. The time accuracy of CA-code is 160 ns. The time accuracy of P-code is 13 ns. From 2010 to 2017, CAPS developed from the verification system to the experimental system. CAPS experimental system is used for satellite navigation and technical experiment. It provides a real and space-ground integrated experimental environment, and fully supports the development of BeiDou Navigation Satellite System (BDS). In August 2017, the function of CAPS experimental system was checked and measured. The results are as follow: The uncertainty of time transfer is 2.87ns (95%) in Beijing, and the uncertainty of time transfer is 3.96ns (95%) in Xi'an. This paper describes the structure and working princip[le of CAPS experimental system, and analyzes the technical characteristics. We analyzed the difference between the CAPS verification system and the experimental system. We foclused on the th method of CAPS system timing test. At last, we give the system test results and make a particular analysis.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"28 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127249424","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Effects of Electronic Frequency Dividers on Angle-Modulated Signals and Their Potential Applications in Frequency Analysis 电子分频器对角调制信号的影响及其在频率分析中的潜在应用
2018 IEEE International Frequency Control Symposium (IFCS) Pub Date : 2018-05-01 DOI: 10.1109/FCS.2018.8597583
Dipen Barot, L. Duan
{"title":"Effects of Electronic Frequency Dividers on Angle-Modulated Signals and Their Potential Applications in Frequency Analysis","authors":"Dipen Barot, L. Duan","doi":"10.1109/FCS.2018.8597583","DOIUrl":"https://doi.org/10.1109/FCS.2018.8597583","url":null,"abstract":"Electronic frequency divider (EFD) is a common two port electronic component that is widely used in electronics and photonics. In this presentation, we discuss how an EFD responds to an angle-modulated signal in general and demonstrate, both theoretically and experimentally, that different modulation scenarios lead to different EFD output characteristics. In practice, such effects can help differentiate certain types of phase and frequency modulations, which is often difficult to accomplish with direct measurement of power spectral density (PSD). In addition, we show EFD-aided PSD measurement allows for quantitative assessment of wideband frequency-modulation parameters, such as modulation frequency, modulation index and frequency deviation, which is not possible with any conventional spectral analysis methods. The enhanced spectral specificity may benefit the field of frequency control by helping system designers more effectively identify potential fluctuation sources and their scales. The technique may also find applications in modulation recognition, radar technologies, laser frequency metrology, microwave photonics, etc.","PeriodicalId":180164,"journal":{"name":"2018 IEEE International Frequency Control Symposium (IFCS)","volume":"89 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125518104","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
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