发布求助
文献互助 智能选刊 最新文献

Physics of X-Ray Multilayer Structures最新文献

筛选
英文 中文
Status of the Soft X-ray/XUV Optical Metrology Program at the National Institute of Standards and Technology 国家标准与技术研究院软x射线/XUV光学计量项目现状
Physics of X-Ray Multilayer Structures Pub Date : 1992-03-05 DOI: 10.1364/pxrayms.1992.pd3
R. Watts, D. Ederer, T. Lucatorto, C. Tarrio
{"title":"Status of the Soft X-ray/XUV Optical Metrology Program at the National Institute of Standards and Technology","authors":"R. Watts, D. Ederer, T. Lucatorto, C. Tarrio","doi":"10.1364/pxrayms.1992.pd3","DOIUrl":"https://doi.org/10.1364/pxrayms.1992.pd3","url":null,"abstract":"The National Institute of Standards and Technology (NIST) has initiated a program devoted to the characterization of soft x-ray optics at the wavelength of use. Although NIST has an operational XUV characterization facility which it is using to make measurements for users across the country, that facility suffers from several deficiencies that will limit its usefulness in the coming years. Therefore, we are constructing an improved monochromator/ reflectometer beamline that will upgrade and extend our XUV measurement capabilities.","PeriodicalId":164371,"journal":{"name":"Physics of X-Ray Multilayer Structures","volume":"T152 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1992-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125650200","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Mosaic Reflectivity of X-ray Multilayer Structures x射线多层结构的镶嵌反射率
Physics of X-Ray Multilayer Structures Pub Date : 1992-03-05 DOI: 10.1364/pxrayms.1992.tuc4
F. Christensen, H. Schnopper
{"title":"Mosaic Reflectivity of X-ray Multilayer Structures","authors":"F. Christensen, H. Schnopper","doi":"10.1364/pxrayms.1992.tuc4","DOIUrl":"https://doi.org/10.1364/pxrayms.1992.tuc4","url":null,"abstract":"Mosaic reflectivity from multilayer structures has previously been detected1) but only in a limited angular range close to the Bragg angle (θB) and only at a single energy. In this paper, a systematic study of the mosaic reflectivity is performed at five line energies (B-Kα (0.183 keV), Cr-Lα (0.573 keV), Ni-Lα (0.852 keV), Pd-Lα (2.838 keV), Cu-Kα (8.048 keV)) for a series of Ni/C multilayers with similar d-spacings and similar ratio between Ni-content and C-content but different deposition methods. The mosaic reflectivity is measured in the complete angular range from zero to 2 θB around the first order Bragg peak. Several interesting and novel effects are revealed. First of all, it is observed that the mosaic reflectivity increases linearly as the angle of incidence is decreased. Secondly, the mosaic reflectivity is observed to decrease sharply as one enters the total reflection region. Thirdly, the mosaic reflectivity disappears completely as the angle of incidence approaches twice the Bragg angle. Finally, the mosaic reflectivity varies in a characteristic way with the energy.","PeriodicalId":164371,"journal":{"name":"Physics of X-Ray Multilayer Structures","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1992-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134278347","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Synchrotron Study of Roughness in Fe-Cr Multilayers Fe-Cr多层膜粗糙度的同步加速器研究
Physics of X-Ray Multilayer Structures Pub Date : 1992-03-05 DOI: 10.1364/pxrayms.1992.tuc3
B. Clemens, A. Payne, S. Brennan
{"title":"Synchrotron Study of Roughness in Fe-Cr Multilayers","authors":"B. Clemens, A. Payne, S. Brennan","doi":"10.1364/pxrayms.1992.tuc3","DOIUrl":"https://doi.org/10.1364/pxrayms.1992.tuc3","url":null,"abstract":"Many advances in the characterization of roughness in artificially layered structures have grown out of interest in their x-ray optical properties. In the present work we apply these techniques to a different application of layered media: magnetic multilayers. Recent reports have shown that the antiferromagnetic order and giant magnetoresistance in layered magnetic materials are mediated by interface quality and roughness, and several reports claim layer roughness enhances giant magnetoresistance. The objective of the current work is to characterize interface roughness and correlate it to the magnetic properties in these materials. We have fabricated structurally distinct Fe/Cr layered structures and examined both the exchange coupling and electrical transport properties. We correlate this with quantitative measurements of the character and magnitude of the structural perturbations.","PeriodicalId":164371,"journal":{"name":"Physics of X-Ray Multilayer Structures","volume":"330 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1992-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116788084","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Relationship between soft X-ray reflectance and structural parameters of nanometer-period multilayers for X-ray mirrors 软x射线反射率与纳米周期多层x射线反射镜结构参数的关系
Physics of X-Ray Multilayer Structures Pub Date : 1992-03-05 DOI: 10.1364/pxrayms.1992.mb1
P. Houdy, P. Boher
{"title":"Relationship between soft X-ray reflectance and structural parameters of nanometer-period multilayers for X-ray mirrors","authors":"P. Houdy, P. Boher","doi":"10.1364/pxrayms.1992.mb1","DOIUrl":"https://doi.org/10.1364/pxrayms.1992.mb1","url":null,"abstract":"Multilayers alternating materials at atomic scale have been deposited, using UHV diode rf sputtering, to be used as soft X-ray mirrors [1,2,3,4]. We have investigated the relationship between the stack performances (reflectivity, selectivity) and the structural chara cteristics of the stacks. The use of graphite instead of amorphous carbon in Ni/C multilayers results in an increase of the performances as well as cooling the sample during the deposition. A similar effect is observed in W/BN multilayers introducing nitrogen during the growth to saturate the nitride. In the case of Si/SiN stacks, narrow Bragg peaks and a higher reflectivity are obtained anealing the samples up to 800°C. At least, a comparison is made between Mo/Si and Co/Si multilayers in order to show the importance of interface compound formation.","PeriodicalId":164371,"journal":{"name":"Physics of X-Ray Multilayer Structures","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1992-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129419669","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Preparation and Characterization of Platinum-Carbon Multilayers 铂碳多层膜的制备与表征
Physics of X-Ray Multilayer Structures Pub Date : 1992-03-05 DOI: 10.1364/pxrayms.1992.wb3
K. Yamashita, G. Lodha, T. Suzuki, I. Hatsukade, M. Ohtani
{"title":"Preparation and Characterization of Platinum-Carbon Multilayers","authors":"K. Yamashita, G. Lodha, T. Suzuki, I. Hatsukade, M. Ohtani","doi":"10.1364/pxrayms.1992.wb3","DOIUrl":"https://doi.org/10.1364/pxrayms.1992.wb3","url":null,"abstract":"Development of platinum-carbon(Pt/C) multilayers is aimed at applying to grazing incidence x-ray optical systems such as x-ray telescope, x-ray microscope and x-ray beamline optics of synchrotron radiation.","PeriodicalId":164371,"journal":{"name":"Physics of X-Ray Multilayer Structures","volume":"284 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1992-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122965341","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Pulse Laser Deposition of Layered Synthetic Microstructures 脉冲激光沉积层状合成微结构
Physics of X-Ray Multilayer Structures Pub Date : 1992-03-05 DOI: 10.1364/pxrayms.1992.md3
S. Gaponov, E. Kluenkov, Y. Platonov, N. Salashchenko
{"title":"Pulse Laser Deposition of Layered Synthetic Microstructures","authors":"S. Gaponov, E. Kluenkov, Y. Platonov, N. Salashchenko","doi":"10.1364/pxrayms.1992.md3","DOIUrl":"https://doi.org/10.1364/pxrayms.1992.md3","url":null,"abstract":"The deposition technique of LSM's efficiently reflecting in the soft x-ray region (SXR) should satisfy the following requirements: to be capable of depositing continuous superthin layers up to 5Å thick, to control thickness and crystal structure of superthin layers, to sustain the period thickness at the LSM depth with an accuracy to hundredth fractions of the period. Thus, the admissible rms height of interfacial LSM roughness should not exceed 2-5Å, while the accuracy of sustaining the period thickness in the shortwave part of the SXR region (where the structure period d=15-25Å and the number of efficiently reflecting periods 100) amounts to fractions of Ångstrom.","PeriodicalId":164371,"journal":{"name":"Physics of X-Ray Multilayer Structures","volume":"214 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1992-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115739000","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Thermal Stability of Mo-based Multilayers Fabricated by rf Sputtering 射频溅射制备钼基多层膜的热稳定性
Physics of X-Ray Multilayer Structures Pub Date : 1992-03-05 DOI: 10.1364/pxrayms.1992.tha1
Y. Ishii, H. Takenaka, T. Kawamura, H. Kinoshita
{"title":"Thermal Stability of Mo-based Multilayers Fabricated by rf Sputtering","authors":"Y. Ishii, H. Takenaka, T. Kawamura, H. Kinoshita","doi":"10.1364/pxrayms.1992.tha1","DOIUrl":"https://doi.org/10.1364/pxrayms.1992.tha1","url":null,"abstract":"Mo-based periodic multilayers such as Mo/Si and Mo/B4C show great promise as reflectors for soft x-ray reduction lithography 1-3). The thermal stability of multilayers is one of the most important factors for ensuring the reliable performance. The Mo/Si and Mo/B4C multilayers show high reflectivity in the 8 nm - 15 nm region at normal incidence. The purpose of this paper is to present the resulting changes of layered and crystal structures of the Mo/Si and Mo/B4C multilayers upon thermal annealing.","PeriodicalId":164371,"journal":{"name":"Physics of X-Ray Multilayer Structures","volume":"161 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1992-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122434850","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
A system for rapid characterization of multilayer mirrors and other soft x-ray optical components 多层反射镜和其他软x射线光学元件的快速表征系统
Physics of X-Ray Multilayer Structures Pub Date : 1992-03-05 DOI: 10.1364/pxrayms.1992.mc5
S. Mrowka, B. MacGowan, L. D. Silva, J. Koch
{"title":"A system for rapid characterization of multilayer mirrors and other soft x-ray optical components","authors":"S. Mrowka, B. MacGowan, L. D. Silva, J. Koch","doi":"10.1364/pxrayms.1992.mc5","DOIUrl":"https://doi.org/10.1364/pxrayms.1992.mc5","url":null,"abstract":"We have developed a system capable of rapid characterization of optics in the soft x-ray region. X-rays from a laser produced plasma source are dispersed by a grating spectrograph onto a microchannel plate detector which is coupled to a CCD detector, figure 1. The CCD image is then read by a Macintosh computer. Part of the x-ray flux from the plasma is passed through the optic under test before being analyzed by the grating. In this way, spectral images with and without the test component in the optical path can be recorded simultaneously and compared to give throughput, figure 2. A .7 Joule Nd:Yag laser with 8ns pulse width, frequency doubled and capable of 10Hz operation, is focussed onto various targets to produce the x-ray pulses. A thin film filter is used to stop visible laser light from reaching the detector. Multiple diffraction orders from the grating are recorded so that the wavelength scale on the detector can be determined with high precision.","PeriodicalId":164371,"journal":{"name":"Physics of X-Ray Multilayer Structures","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1992-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122695622","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
An Experimental Set-up for the Production of Large Size X-Ray Multilayer Structures 制备大尺寸x射线多层结构的实验装置
Physics of X-Ray Multilayer Structures Pub Date : 1992-03-05 DOI: 10.1364/pxrayms.1992.mb4
E. Ziegler, J. Peffen, P. Høghøj
{"title":"An Experimental Set-up for the Production of Large Size X-Ray Multilayer Structures","authors":"E. Ziegler, J. Peffen, P. Høghøj","doi":"10.1364/pxrayms.1992.mb4","DOIUrl":"https://doi.org/10.1364/pxrayms.1992.mb4","url":null,"abstract":"Multilayer-based x-ray optical components call for heterostructures made of smooth and uniform layers with an abrupt interface, which imposes severe restrictions to the choice of materials. The multilayers have to be very uniform (1%) over the area that will be illuminated by an X-ray beam. For hard x-rays the small angle of incidence implies multilayers that are several tens of centimeter long, even when using a small d-spacing. When the beam is produced by a synchrotron storage ring source the high heat flux connected with the intense x-ray beams requires materials that are chemically very stable.","PeriodicalId":164371,"journal":{"name":"Physics of X-Ray Multilayer Structures","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1992-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"120899563","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Multilayer Structures Traversed by Electron Beams as Narrow Line X-Ray Sources 电子束作为窄线x射线源穿越多层结构
Physics of X-Ray Multilayer Structures Pub Date : 1992-03-05 DOI: 10.1364/pxrayms.1992.thb4
A. Kaplan, C. Law
{"title":"Multilayer Structures Traversed by Electron Beams as Narrow Line X-Ray Sources","authors":"A. Kaplan, C. Law","doi":"10.1364/pxrayms.1992.thb4","DOIUrl":"https://doi.org/10.1364/pxrayms.1992.thb4","url":null,"abstract":"When an electron beam traverses the interface between two media with different dielectric constants, the so called transition radiation are generation [1]. In a periodic structure with multiple interfaces, the radiation is greatly enhanced around a spatial region in a conical pattern for certain wavelength. In previous research [1,2] structures with the thickness of each layer is much longer than the wavelength are used. As a result, ultra-relativistic electrons with energies 100 Mev to 50 Gev [2] are required. However, with advent of new technologies, periodic multilayer structures can be constructed with a spatial period less then 100 Å. The generation of soft x rays with a low-energy electron beam that passes through such a multilayer structure was recently proposed [3]. In solid-state structures, the losses due to photoabsorption, and electron scattering may be the main obstacles in x-ray generation with these structures. We showed [4] that the energy of the electron beam from ~ 200 Kev to a few Mev is sufficient to compensate for the loss due to electron scattering. We further demonstrated that above the electron energy of ~ 200 Kev for most of the materials radiating soft x-ray frequency range, the photoabsorption is the limiting factor and electron scattering can be neglected. The phtotoabsorption imposes an energy “ceiling” above which further increase in beam energy is rewarded with diminishing radiation. Based on these results, we prescribe the optimal geometric configuration for maximum radiation from multilayer structures composed of certain materials at certain frequency and electron beam energy.","PeriodicalId":164371,"journal":{"name":"Physics of X-Ray Multilayer Structures","volume":"61 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"1992-03-05","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126691330","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
首页 上一页 下一页 尾页
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整，为了账户安全，请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
请完成安全验证×
相关产品
×
本文献相关产品
联系我们：info@booksci.cn Book学术提供免费学术资源搜索服务，方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号：604180095
Book学术官方微信
小红书