Status of the Soft X-ray/XUV Optical Metrology Program at the National Institute of Standards and Technology

Abstract

The National Institute of Standards and Technology (NIST) has initiated a program devoted to the characterization of soft x-ray optics at the wavelength of use. Although NIST has an operational XUV characterization facility which it is using to make measurements for users across the country, that facility suffers from several deficiencies that will limit its usefulness in the coming years. Therefore, we are constructing an improved monochromator/ reflectometer beamline that will upgrade and extend our XUV measurement capabilities.