发布求助
文献互助 智能选刊 最新文献

2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)最新文献

筛选
英文 中文
An Improved Fabrication Process for Micro Hemispherical Resonator Gyroscope 一种改进的微半球谐振陀螺仪制造工艺
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739642
Yan Shi, X. Xi, Wei Li, Yulie Wu, Xuezhong Wu, Kun Lu, Zhenjun Wang, D. Xiao
{"title":"An Improved Fabrication Process for Micro Hemispherical Resonator Gyroscope","authors":"Yan Shi, X. Xi, Wei Li, Yulie Wu, Xuezhong Wu, Kun Lu, Zhenjun Wang, D. Xiao","doi":"10.1109/ISISS.2019.8739642","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739642","url":null,"abstract":"This paper reports an improved fabrication process for micro hemispherical resonator gyroscope $(mu mathbf{HRG})$, which enhance consistency of quality factor, frequency and capacitance gaps. Micro hemispherical resonator is formed from fused silica substrate through thermal deformation on fast whirling platform individually. Following procedures including laser ablation, metallization and integrating to electrodes are accomplished on wafer-level and optimized through experimental data. The resonators are electrically characterized in vacuum chamber. Frequency for $mathrm{n}=2$ wineglass mode ranges from 7kHz to 8kHz and quality factors range from 100,000 to 160,000, which are significant to stabilize and enhance gyro's performance. The accomplished device operates in force-rebalance mode in vacuum packaging, realizing a full-scale range above $pm 200deg/sec$ and bias instability of 0.63 deg/hr.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"115 32","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131913511","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Reducing Noise in a Ring-laser Gyro Based on Stimulated Brillouin Scattering 基于受激布里渊散射的环形激光陀螺降噪
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739699
K. Nelson, M. Puckett, Jianfeng Wu, D. Bose, S. Gundavarapu, D. Blumenthal
{"title":"Reducing Noise in a Ring-laser Gyro Based on Stimulated Brillouin Scattering","authors":"K. Nelson, M. Puckett, Jianfeng Wu, D. Bose, S. Gundavarapu, D. Blumenthal","doi":"10.1109/ISISS.2019.8739699","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739699","url":null,"abstract":"Although Brillouin scattering is a parasitic effect in many systems, stimulated Brillouin scattering (SBS) can also be harnessed for useful applications. Brillouin lasers have been of interest in the fields of optics and photonics since the early 1990s because of the extremely narrow linewidths they offer [1]. Chip-scale versions of these devices have begun to emerge more recently, and the performance attained in them is steadily approaching that of their fiber counterparts [2-4]. Honeywell is using Brillouin lasing in chip-scale SiO2/Si3N4 waveguide resonators to create a robust ring-laser gyroscope. Current limitations on gyro noise are 1) limited optical power in the sensing light, due to cascading of Brillouin lasing to higher SBS orders, and 2) scattering and absorption loss of the Brillouin light in the resonator. We are addressing both issues.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"10 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130899329","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
micro-Torr Vacuum Packaging of Gettered Ceramic Chip Carriers 吸光陶瓷芯片载体的微托真空封装
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739428
R. Knight, Donald D. Devoe, R. Polcawich, J. Pulskamp, B. Power
{"title":"micro-Torr Vacuum Packaging of Gettered Ceramic Chip Carriers","authors":"R. Knight, Donald D. Devoe, R. Polcawich, J. Pulskamp, B. Power","doi":"10.1109/ISISS.2019.8739428","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739428","url":null,"abstract":"This paper reports for the first-time accurate sub 1 μTorr vacuum package pressure measurement for getter-activated leadless ceramic chip carriers (LCCs) sensor packages. This has been accomplished by creating a de-lidding vacuum chamber fixture to open a packaged quad-mass gyroscope (QMG) in a vacuum chamber and, thus, minimize any environmental contaminants the sensor would see if it was otherwise opened in atmosphere. Quality factor measurements have been shown to decrease by 15-25% when exposing moderate-to-high Q QMGs to atmosphere and re-measuring in a vacuum chamber. After exposing a sensor to atmosphere, contaminants are introduced, and vacuum packaging pressure cannot be accurately measured without subjecting the same sensor to the high temperature bakes seen in vacuum packaging.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"70 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133034218","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Improving the stability of 1.5 mm2 gyroscopes down to 2°/hr at 1000 s with NEMS based sensing 利用基于NEMS的传感技术，在1000秒内将1.5 mm2陀螺仪的稳定性提高到2°/小时
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739450
M. Gadola, Marco Malvicini, G. Langfelder, M. Colin, P. Robert
{"title":"Improving the stability of 1.5 mm2 gyroscopes down to 2°/hr at 1000 s with NEMS based sensing","authors":"M. Gadola, Marco Malvicini, G. Langfelder, M. Colin, P. Robert","doi":"10.1109/ISISS.2019.8739450","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739450","url":null,"abstract":"This research explores the stability performance of amplitude-modulated MEMS gyroscopes based on resistive NEMS sensing for drive and sense motion detection. After careful considerations on the device and electronic design, in particular oriented to (i) terms that affect scale-factor stability and (ii) terms that affect offset stability, a system is developed using best-in-class electronic components for temperature drift. Within a maximum voltage of 5 V (without any voltage boosting), the system shows a full-scale range larger than 350 dps on a 100-Hz bandwidth, 1 mdps/vflz angle random walk and 2°/hr bias stability up to 1000 s observation interval. All these figures are obtained on a 1.5 mm2footprint sensor.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"52 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132693219","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Fused Quartz Dual Shell Resonator 熔融石英双壳谐振器
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739671
M. Asadian, A. Shkel
{"title":"Fused Quartz Dual Shell Resonator","authors":"M. Asadian, A. Shkel","doi":"10.1109/ISISS.2019.8739671","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739671","url":null,"abstract":"In this paper, for the first time, we present a dual-shell architecture for fabrication of 3D Fused Quartz resonators. The architecture is realized by defining two encapsulated and concentric cavities using plasma-activated wafer bonding followed by the high-temperature glassblowing. A finite element model is presented to simulate the fabrication process and predict the final geometry of the dual-shell device from process parameters. We developed the fabrication process and demonstrated manufactured micro-structures. The dual-shell architecture provides a protective shield as well as a fixed-fixed anchor for the sensing element of the resonators. The proposed structure can be instrumented to operate as a resonator, a gyroscope, or other vibratory sensor and anticipated to have advantages for precision operation in a harsh environment.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"18 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122076249","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 6
Frequency Stabilization in a MEMS Oscillator with 1:2 Internal Resonance 1:2内共振MEMS振荡器的频率稳定
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739695
Jun Yu, K. Asadi, Hatem Brahmi, Hanna Cho, Saman Nezmi, Soobum Lee
{"title":"Frequency Stabilization in a MEMS Oscillator with 1:2 Internal Resonance","authors":"Jun Yu, K. Asadi, Hatem Brahmi, Hanna Cho, Saman Nezmi, Soobum Lee","doi":"10.1109/ISISS.2019.8739695","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739695","url":null,"abstract":"One of the most important functionalities of micro-electro-mechanical systems (MEMS) oscillators is to provide a reference frequency with a minimal frequency fluctuation. This paper reports the design and experimental characterization of 1:2 internal resonances (IR) in two distinct (stepped and uniform) doubly clamped micromechanical beam resonators. We have intentionally imposed an IR condition in the initial design of a geometrically nonlinear stepped beam, optimized the geometry using a reliability-based design optimization (RDO), fabricated and characterized the resonance behaviors and modal energy transfer in the response. Strong intermodal coupling through the mechanism of IR in the dynamic response provides the basis to design MEMS oscillators with highly stable reference frequencies. We report that the frequency stabilization can be achieved over a much broader range of operation because of the strong coupling between the two flexural modes.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"53 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132436832","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Pseudo-Extensional Mode MEMS Ring Gyroscope 伪外延模MEMS环形陀螺仪
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739576
I. Prikhodko, J. A. Gregory, Daniel D. Shin, Ryan Kwon, T. Kenny, M. Judy
{"title":"Pseudo-Extensional Mode MEMS Ring Gyroscope","authors":"I. Prikhodko, J. A. Gregory, Daniel D. Shin, Ryan Kwon, T. Kenny, M. Judy","doi":"10.1109/ISISS.2019.8739576","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739576","url":null,"abstract":"This paper presents the design and characterization of a yaw gyroscope which employs a pseudo-extensional mode of a ring. The extensional mode is typically a bulk mode where the ring width expands and contracts across its circumference in contrast to a traditional wineglass mode where the in-plane ring width stays nominally constant during vibrations. Our axial symmetrical gyroscope structure is comprised of an array of concentric rings to create an apparent extensional mode, but at much lower frequency since it is made of flexural elements. An advantage inherent to the new mode is the local rejection of linear accelerations as compared to the fundamental wineglass, which rejects linear accelerations by matching electrodes across the diameter of the ring. Implemented in the wafer-level Epitaxial Silicon Encapsulation process, the device occupies an area of 1.8 mm2and initial characterization clearly demonstrates feasibility of using the pseudo-extensional mode of vibration for rate sensing with Q-factors of 110,000 and noise level of $0.60^circ/surdmathrm{hr}$.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"90 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126236532","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Hourglass-beam Nanogram-proof-mass Array: Toward a High Dynamic Range Accelerometer 沙漏光束耐纳克质量阵列:迈向高动态范围加速度计
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2019-04-01 DOI: 10.1109/ISISS.2019.8739644
V. P. Chung, Xiaoliang Li, Metin G. Guney, J. Paramesh, T. Mukherjee, G. Fedder
{"title":"Hourglass-beam Nanogram-proof-mass Array: Toward a High Dynamic Range Accelerometer","authors":"V. P. Chung, Xiaoliang Li, Metin G. Guney, J. Paramesh, T. Mukherjee, G. Fedder","doi":"10.1109/ISISS.2019.8739644","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739644","url":null,"abstract":"This paper reports on the development of a monolithic capacitive accelerometer array system with a designed full-scale range of $pmb{pm 50mathrm{KG}}$, measured velocity random walk (VRW) of $pmb {14} mu mathrm{G}cdotsurd{}mathrm{h}$ and measured bias stability of 14 mG, corresponding to an effective dynamic range of 131 dB. An hourglass-beam flexure is devised to evenly distribute the distortion strain energy over the length of the flexure upon acceleration. Given the maximum targeted input acceleration and constrained by fabrication critical dimensions, the hourglass spring beam design is optimized to achieve the highest transducer sensitivity and thus maximizing the transducer dynamic range. A MEMS-array compensation technique is proposed to null the charge imbalance from transducer offset. Independent modulation voltage control on a 2-cell array and 182-cell array in parallel connection enable fine-grain offset compensation and coarse-grain offset compensation, respectively.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"115 22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2019-04-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126377579","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Prospects of SPIN Gyroscopes Based on Nitrogen-Vacancy Centers in Diamond 金刚石中氮空位中心自旋陀螺的发展前景
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2018-11-12 DOI: 10.1364/LAOP.2018.TU4A.2
A. Jarmola, D. Budker, S. Hawasli, A. G. Birdwell, T. Ivanov, V. Malinovsky
{"title":"Prospects of SPIN Gyroscopes Based on Nitrogen-Vacancy Centers in Diamond","authors":"A. Jarmola, D. Budker, S. Hawasli, A. G. Birdwell, T. Ivanov, V. Malinovsky","doi":"10.1364/LAOP.2018.TU4A.2","DOIUrl":"https://doi.org/10.1364/LAOP.2018.TU4A.2","url":null,"abstract":"This project aims to develop solid-state gyroscopes based on ensembles of negatively charged nitrogen-vacancy (NV) centers in diamond [1], [2]. The NV center is a defect formed in diamond by one substitutional nitrogen atom and an adjacent vacancy. The NV- center features a ground state with electronic spin $mathrm{S}=1$, which can be initialized, manipulated, and detected via convenient optical, microwave and radiofrequency transitions (Fig. 1). Nuclear spins are appealing in the context of gyroscopes because they have much smaller gyromagnetic ratios than that of the electron (by a factor of about 1000), reducing the requirements on static magnetic-field stability and homogeneity. The lifetime of nuclear spin-polarization is much longer than for electron spins. Recent work [3] has shown that it is possible to achieve high, $sim$ 98%, polarization of $^{14}mathrm{N}$ or $^{15}mathrm{N}$ spins in diamond using excited-state level-anticrossing induced by hyperfine coupling of the nitrogen nucleus in the NV center with the electrons of the defect.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"77 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-11-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133590773","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Alkali-Metal Mixture for Synthetic Alkali Vapor Density Reduction 用于降低合成碱蒸气密度的碱金属混合物
2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Pub Date : 2018-05-29 DOI: 10.1109/ISISS.2019.8739404
Justin M. Brown, C. Hessel, J. Hensley
{"title":"Alkali-Metal Mixture for Synthetic Alkali Vapor Density Reduction","authors":"Justin M. Brown, C. Hessel, J. Hensley","doi":"10.1109/ISISS.2019.8739404","DOIUrl":"https://doi.org/10.1109/ISISS.2019.8739404","url":null,"abstract":"Atom-based sensors offer the potential for long-term stable inertial measurements and are under active development for next generation inertial sensing applications. These sensors measure properties of atomic vapors where lasers interact and manipulate the atomic gas. Such measurements provide an attractive platform for long-term stable measurements since Nature has produced massive quantities of identical atoms where the interaction between light and atoms can be predicted to high precision through quantum mechanics. Furthermore, the electro-optic tools to manipulate and control the intensity, frequency, and polarization of light are well developed. However, deployment of these sensors is limited by both the complexity and size, weight, and power (SWaP) of the sensor architecture.","PeriodicalId":162724,"journal":{"name":"2019 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2018-05-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131628814","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
首页 上一页 下一页 尾页
0
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整，为了账户安全，请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
请完成安全验证×
相关产品
×
本文献相关产品
联系我们：info@booksci.cn Book学术提供免费学术资源搜索服务，方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号：604180095
Book学术官方微信