Fused Quartz Dual Shell Resonator

Abstract

In this paper, for the first time, we present a dual-shell architecture for fabrication of 3D Fused Quartz resonators. The architecture is realized by defining two encapsulated and concentric cavities using plasma-activated wafer bonding followed by the high-temperature glassblowing. A finite element model is presented to simulate the fabrication process and predict the final geometry of the dual-shell device from process parameters. We developed the fabrication process and demonstrated manufactured micro-structures. The dual-shell architecture provides a protective shield as well as a fixed-fixed anchor for the sensing element of the resonators. The proposed structure can be instrumented to operate as a resonator, a gyroscope, or other vibratory sensor and anticipated to have advantages for precision operation in a harsh environment.