Pseudo-Extensional Mode MEMS Ring Gyroscope

I. Prikhodko, J. A. Gregory, Daniel D. Shin, Ryan Kwon, T. Kenny, M. Judy
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引用次数: 3

Abstract

This paper presents the design and characterization of a yaw gyroscope which employs a pseudo-extensional mode of a ring. The extensional mode is typically a bulk mode where the ring width expands and contracts across its circumference in contrast to a traditional wineglass mode where the in-plane ring width stays nominally constant during vibrations. Our axial symmetrical gyroscope structure is comprised of an array of concentric rings to create an apparent extensional mode, but at much lower frequency since it is made of flexural elements. An advantage inherent to the new mode is the local rejection of linear accelerations as compared to the fundamental wineglass, which rejects linear accelerations by matching electrodes across the diameter of the ring. Implemented in the wafer-level Epitaxial Silicon Encapsulation process, the device occupies an area of 1.8 mm2and initial characterization clearly demonstrates feasibility of using the pseudo-extensional mode of vibration for rate sensing with Q-factors of 110,000 and noise level of $0.60^\circ/\surd\mathrm{hr}$.
伪外延模MEMS环形陀螺仪
本文介绍了一种采用环形伪张模的偏航陀螺仪的设计和特性。拉伸模态是典型的体积模态,环宽度在其周长上膨胀和收缩,而传统的酒杯模态在振动期间平面内环宽度名义上保持恒定。我们的轴对称陀螺仪结构由一组同心圆组成,以产生明显的拉伸模式,但由于它是由弯曲元件制成的,因此频率要低得多。与基本的葡萄酒杯相比,新模式固有的优点是局部抑制线性加速度,基本的葡萄酒杯通过在环的直径上匹配电极来抑制线性加速度。该器件采用晶圆级外延硅封装工艺,占地面积为1.8 mm2,初步表征清楚地表明,使用伪拉伸振动模式进行速率传感的可行性,其q因子为11万,噪声水平为0.60^\circ/\surd\ maththrm {hr}$。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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